7/29/2011	12:15:24 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/29/2011	12:15:25 AM	Recipe started at 12:15 AM
7/29/2011	12:15:25 AM	Helium valve closed
7/29/2011	12:15:25 AM	H2 valve closed
7/29/2011	12:15:25 AM	BCl3 valve closed
7/29/2011	12:15:25 AM	PH3 valve closed
7/29/2011	12:15:25 AM	SiCl4 pre valve closed
7/29/2011	12:15:25 AM	SiCl4 post valve closed
7/29/2011	12:15:25 AM	Main Vac valve closed
7/29/2011	12:15:25 AM	Bypass valve closed
7/29/2011	12:15:25 AM	Bubbler valve closed
7/29/2011	12:15:25 AM	Helium MFC set to  0.000000
7/29/2011	12:15:25 AM	H2 MFC set to  0.000000
7/29/2011	12:15:25 AM	BCl3 MFC set to  0.000000
7/29/2011	12:15:25 AM	PHl3 MFC set to  0.000000
7/29/2011	12:15:25 AM	SiCl4 MFC set to  0.000000
7/29/2011	12:15:25 AM	Bypass solenoid MFC set to  0.000000
7/29/2011	12:15:25 AM	Tube furnace set to 0
7/29/2011	12:15:28 AM	H2 valve closed
7/29/2011	12:15:28 AM	BCl3 valve closed
7/29/2011	12:15:28 AM	PH3 valve closed
7/29/2011	12:15:28 AM	SiCl4 pre valve closed
7/29/2011	12:15:28 AM	SiCl4 post valve closed
7/29/2011	12:15:28 AM	Main Vac valve closed
7/29/2011	12:15:28 AM	Bypass valve closed
7/29/2011	12:15:28 AM	Bubbler valve closed
7/29/2011	12:15:28 AM	Helium valve opened
7/29/2011	12:15:28 AM	Helium MFC set to  500.000000
7/29/2011	12:15:28 AM	H2 MFC set to  0.000000
7/29/2011	12:15:28 AM	BCl3 MFC set to  0.000000
7/29/2011	12:15:28 AM	PHl3 MFC set to  0.000000
7/29/2011	12:15:28 AM	SiCl4 MFC set to  0.000000
7/29/2011	12:15:28 AM	Bypass solenoid MFC set to  0.000000
7/29/2011	12:15:28 AM	Tube furnace set to 0
7/29/2011	12:15:35 AM	Helium valve closed
7/29/2011	12:15:35 AM	H2 valve closed
7/29/2011	12:15:35 AM	BCl3 valve closed
7/29/2011	12:15:35 AM	PH3 valve closed
7/29/2011	12:15:35 AM	SiCl4 pre valve closed
7/29/2011	12:15:35 AM	SiCl4 post valve closed
7/29/2011	12:15:35 AM	Main Vac valve closed
7/29/2011	12:15:35 AM	Bypass valve closed
7/29/2011	12:15:35 AM	Bubbler valve closed
7/29/2011	12:15:35 AM	Helium MFC set to  0.000000
7/29/2011	12:15:35 AM	H2 MFC set to  0.000000
7/29/2011	12:15:35 AM	BCl3 MFC set to  0.000000
7/29/2011	12:15:35 AM	PHl3 MFC set to  0.000000
7/29/2011	12:15:35 AM	SiCl4 MFC set to  0.000000
7/29/2011	12:15:35 AM	Bypass solenoid MFC set to  0.000000
7/29/2011	12:15:35 AM	Tube furnace set to 0
7/29/2011	12:15:36 AM	Run finished at 12:15 AM
7/29/2011	12:15:36 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/29/2011	12:18:04 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/29/2011	12:18:04 AM	Recipe started at 12:18 AM
7/29/2011	12:18:05 AM	Helium valve closed
7/29/2011	12:18:05 AM	H2 valve closed
7/29/2011	12:18:05 AM	BCl3 valve closed
7/29/2011	12:18:05 AM	PH3 valve closed
7/29/2011	12:18:05 AM	SiCl4 pre valve closed
7/29/2011	12:18:05 AM	SiCl4 post valve closed
7/29/2011	12:18:05 AM	Main Vac valve closed
7/29/2011	12:18:05 AM	Bubbler valve closed
7/29/2011	12:18:05 AM	Bypass valve opened
7/29/2011	12:18:05 AM	Helium MFC set to  0.000000
7/29/2011	12:18:05 AM	H2 MFC set to  0.000000
7/29/2011	12:18:05 AM	BCl3 MFC set to  0.000000
7/29/2011	12:18:05 AM	PHl3 MFC set to  0.000000
7/29/2011	12:18:05 AM	SiCl4 MFC set to  0.000000
7/29/2011	12:18:05 AM	Bypass solenoid MFC set to  0.000000
7/29/2011	12:18:05 AM	Tube furnace set to 0
7/29/2011	12:19:06 AM	Helium valve closed
7/29/2011	12:19:06 AM	H2 valve closed
7/29/2011	12:19:06 AM	BCl3 valve closed
7/29/2011	12:19:06 AM	PH3 valve closed
7/29/2011	12:19:06 AM	SiCl4 pre valve closed
7/29/2011	12:19:06 AM	SiCl4 post valve closed
7/29/2011	12:19:06 AM	Main Vac valve closed
7/29/2011	12:19:06 AM	Bubbler valve closed
7/29/2011	12:19:06 AM	Bypass valve opened
7/29/2011	12:19:06 AM	Helium MFC set to  0.000000
7/29/2011	12:19:06 AM	H2 MFC set to  0.000000
7/29/2011	12:19:06 AM	BCl3 MFC set to  0.000000
7/29/2011	12:19:06 AM	PHl3 MFC set to  0.000000
7/29/2011	12:19:06 AM	SiCl4 MFC set to  0.000000
7/29/2011	12:19:06 AM	Bypass solenoid MFC set to  0.000000
7/29/2011	12:19:06 AM	Tube furnace set to 0
7/29/2011	12:20:06 AM	Helium valve closed
7/29/2011	12:20:06 AM	H2 valve closed
7/29/2011	12:20:06 AM	BCl3 valve closed
7/29/2011	12:20:06 AM	PH3 valve closed
7/29/2011	12:20:06 AM	SiCl4 pre valve closed
7/29/2011	12:20:06 AM	SiCl4 post valve closed
7/29/2011	12:20:06 AM	Bypass valve closed
7/29/2011	12:20:06 AM	Bubbler valve closed
7/29/2011	12:20:06 AM	Main Vac valve opened
7/29/2011	12:20:06 AM	Helium MFC set to  0.000000
7/29/2011	12:20:06 AM	H2 MFC set to  0.000000
7/29/2011	12:20:06 AM	BCl3 MFC set to  0.000000
7/29/2011	12:20:06 AM	PHl3 MFC set to  0.000000
7/29/2011	12:20:06 AM	SiCl4 MFC set to  0.000000
7/29/2011	12:20:06 AM	Bypass solenoid MFC set to  0.000000
7/29/2011	12:20:06 AM	Tube furnace set to 0
7/29/2011	12:20:07 AM	Run finished at 12:20 AM
7/29/2011	12:20:07 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/29/2011	9:57:34 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/29/2011	9:57:35 AM	Recipe started at 9:57 AM
7/29/2011	9:57:35 AM	Helium valve closed
7/29/2011	9:57:35 AM	H2 valve closed
7/29/2011	9:57:35 AM	BCl3 valve closed
7/29/2011	9:57:35 AM	PH3 valve closed
7/29/2011	9:57:35 AM	SiCl4 pre valve closed
7/29/2011	9:57:35 AM	SiCl4 post valve closed
7/29/2011	9:57:35 AM	Main Vac valve closed
7/29/2011	9:57:35 AM	Bypass valve closed
7/29/2011	9:57:35 AM	Bubbler valve closed
7/29/2011	9:57:35 AM	Helium MFC set to  0.000000
7/29/2011	9:57:35 AM	H2 MFC set to  0.000000
7/29/2011	9:57:35 AM	BCl3 MFC set to  0.000000
7/29/2011	9:57:35 AM	PHl3 MFC set to  0.000000
7/29/2011	9:57:35 AM	SiCl4 MFC set to  0.000000
7/29/2011	9:57:35 AM	Bypass solenoid MFC set to  0.000000
7/29/2011	9:57:35 AM	Tube furnace set to 0
7/29/2011	9:57:38 AM	H2 valve closed
7/29/2011	9:57:38 AM	BCl3 valve closed
7/29/2011	9:57:38 AM	PH3 valve closed
7/29/2011	9:57:38 AM	SiCl4 pre valve closed
7/29/2011	9:57:38 AM	SiCl4 post valve closed
7/29/2011	9:57:38 AM	Main Vac valve closed
7/29/2011	9:57:38 AM	Bypass valve closed
7/29/2011	9:57:38 AM	Bubbler valve closed
7/29/2011	9:57:38 AM	Helium valve opened
7/29/2011	9:57:38 AM	Helium MFC set to  500.000000
7/29/2011	9:57:38 AM	H2 MFC set to  0.000000
7/29/2011	9:57:38 AM	BCl3 MFC set to  0.000000
7/29/2011	9:57:38 AM	PHl3 MFC set to  0.000000
7/29/2011	9:57:38 AM	SiCl4 MFC set to  0.000000
7/29/2011	9:57:38 AM	Bypass solenoid MFC set to  0.000000
7/29/2011	9:57:38 AM	Tube furnace set to 0
7/29/2011	9:58:44 AM	Helium valve closed
7/29/2011	9:58:44 AM	H2 valve closed
7/29/2011	9:58:44 AM	BCl3 valve closed
7/29/2011	9:58:44 AM	PH3 valve closed
7/29/2011	9:58:44 AM	SiCl4 pre valve closed
7/29/2011	9:58:44 AM	SiCl4 post valve closed
7/29/2011	9:58:44 AM	Main Vac valve closed
7/29/2011	9:58:44 AM	Bypass valve closed
7/29/2011	9:58:44 AM	Bubbler valve closed
7/29/2011	9:58:44 AM	Helium MFC set to  0.000000
7/29/2011	9:58:44 AM	H2 MFC set to  0.000000
7/29/2011	9:58:44 AM	BCl3 MFC set to  0.000000
7/29/2011	9:58:44 AM	PHl3 MFC set to  0.000000
7/29/2011	9:58:44 AM	SiCl4 MFC set to  0.000000
7/29/2011	9:58:44 AM	Bypass solenoid MFC set to  0.000000
7/29/2011	9:58:44 AM	Tube furnace set to 0
7/29/2011	9:58:45 AM	Run finished at 9:58 AM
7/29/2011	9:58:45 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/29/2011	10:04:23 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/29/2011	10:04:24 AM	Recipe started at 10:04 AM
7/29/2011	10:04:24 AM	Helium valve closed
7/29/2011	10:04:24 AM	H2 valve closed
7/29/2011	10:04:24 AM	BCl3 valve closed
7/29/2011	10:04:24 AM	PH3 valve closed
7/29/2011	10:04:24 AM	SiCl4 pre valve closed
7/29/2011	10:04:24 AM	SiCl4 post valve closed
7/29/2011	10:04:24 AM	Main Vac valve closed
7/29/2011	10:04:24 AM	Bubbler valve closed
7/29/2011	10:04:24 AM	Bypass valve opened
7/29/2011	10:04:24 AM	Helium MFC set to  0.000000
7/29/2011	10:04:24 AM	H2 MFC set to  0.000000
7/29/2011	10:04:24 AM	BCl3 MFC set to  0.000000
7/29/2011	10:04:24 AM	PHl3 MFC set to  0.000000
7/29/2011	10:04:24 AM	SiCl4 MFC set to  0.000000
7/29/2011	10:04:24 AM	Bypass solenoid MFC set to  0.000000
7/29/2011	10:04:24 AM	Tube furnace set to 0
7/29/2011	10:05:31 AM	Helium valve closed
7/29/2011	10:05:31 AM	H2 valve closed
7/29/2011	10:05:31 AM	BCl3 valve closed
7/29/2011	10:05:31 AM	PH3 valve closed
7/29/2011	10:05:31 AM	SiCl4 pre valve closed
7/29/2011	10:05:31 AM	SiCl4 post valve closed
7/29/2011	10:05:31 AM	Main Vac valve closed
7/29/2011	10:05:31 AM	Bubbler valve closed
7/29/2011	10:05:31 AM	Bypass valve opened
7/29/2011	10:05:31 AM	Helium MFC set to  0.000000
7/29/2011	10:05:31 AM	H2 MFC set to  0.000000
7/29/2011	10:05:31 AM	BCl3 MFC set to  0.000000
7/29/2011	10:05:31 AM	PHl3 MFC set to  0.000000
7/29/2011	10:05:31 AM	SiCl4 MFC set to  0.000000
7/29/2011	10:05:31 AM	Bypass solenoid MFC set to  0.000000
7/29/2011	10:05:31 AM	Tube furnace set to 0
7/29/2011	10:06:31 AM	Helium valve closed
7/29/2011	10:06:31 AM	H2 valve closed
7/29/2011	10:06:31 AM	BCl3 valve closed
7/29/2011	10:06:31 AM	PH3 valve closed
7/29/2011	10:06:31 AM	SiCl4 pre valve closed
7/29/2011	10:06:31 AM	SiCl4 post valve closed
7/29/2011	10:06:31 AM	Bypass valve closed
7/29/2011	10:06:31 AM	Bubbler valve closed
7/29/2011	10:06:31 AM	Main Vac valve opened
7/29/2011	10:06:31 AM	Helium MFC set to  0.000000
7/29/2011	10:06:31 AM	H2 MFC set to  0.000000
7/29/2011	10:06:31 AM	BCl3 MFC set to  0.000000
7/29/2011	10:06:31 AM	PHl3 MFC set to  0.000000
7/29/2011	10:06:31 AM	SiCl4 MFC set to  0.000000
7/29/2011	10:06:31 AM	Bypass solenoid MFC set to  0.000000
7/29/2011	10:06:32 AM	Tube furnace set to 0
7/29/2011	10:06:33 AM	Run finished at 10:06 AM
7/29/2011	10:06:33 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/29/2011	10:07:50 AM	Main Vac valve closed
7/29/2011	10:07:56 AM	Main Vac valve opened
7/29/2011	10:08:27 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
7/29/2011	10:08:39 AM	Recipe started at 10:08 AM
7/29/2011	10:08:39 AM	Helium valve closed
7/29/2011	10:08:39 AM	H2 valve closed
7/29/2011	10:08:39 AM	BCl3 valve closed
7/29/2011	10:08:39 AM	PH3 valve closed
7/29/2011	10:08:39 AM	SiCl4 pre valve closed
7/29/2011	10:08:39 AM	SiCl4 post valve closed
7/29/2011	10:08:39 AM	Main Vac valve closed
7/29/2011	10:08:39 AM	Bubbler valve closed
7/29/2011	10:08:39 AM	Bypass valve opened
7/29/2011	10:08:39 AM	Helium MFC set to  0.000000
7/29/2011	10:08:39 AM	H2 MFC set to  0.000000
7/29/2011	10:08:39 AM	BCl3 MFC set to  0.000000
7/29/2011	10:08:39 AM	PHl3 MFC set to  0.000000
7/29/2011	10:08:39 AM	SiCl4 MFC set to  0.000000
7/29/2011	10:08:39 AM	Bypass solenoid MFC set to  0.000000
7/29/2011	10:08:39 AM	Tube furnace set to 0
7/29/2011	10:08:40 AM	Helium valve closed
7/29/2011	10:08:40 AM	H2 valve closed
7/29/2011	10:08:40 AM	BCl3 valve closed
7/29/2011	10:08:40 AM	PH3 valve closed
7/29/2011	10:08:40 AM	SiCl4 pre valve closed
7/29/2011	10:08:40 AM	SiCl4 post valve closed
7/29/2011	10:08:40 AM	Main Vac valve closed
7/29/2011	10:08:40 AM	Bubbler valve closed
7/29/2011	10:08:40 AM	Bypass valve opened
7/29/2011	10:08:40 AM	Helium MFC set to  0.000000
7/29/2011	10:08:40 AM	H2 MFC set to  0.000000
7/29/2011	10:08:40 AM	BCl3 MFC set to  0.000000
7/29/2011	10:08:40 AM	PHl3 MFC set to  0.000000
7/29/2011	10:08:40 AM	SiCl4 MFC set to  0.000000
7/29/2011	10:08:40 AM	Bypass solenoid MFC set to  0.000000
7/29/2011	10:08:40 AM	Tube furnace set to 0
7/29/2011	10:09:02 AM	Run aborted at 10:09 AM
7/29/2011	10:09:02 AM	Helium valve closed
7/29/2011	10:09:02 AM	H2 valve closed
7/29/2011	10:09:02 AM	BCl3 valve closed
7/29/2011	10:09:02 AM	PH3 valve closed
7/29/2011	10:09:02 AM	SiCl4 pre valve closed
7/29/2011	10:09:02 AM	SiCl4 post valve closed
7/29/2011	10:09:02 AM	Bypass valve closed
7/29/2011	10:09:02 AM	Main Vac valve closed
7/29/2011	10:09:02 AM	Bubbler valve closed
7/29/2011	10:09:02 AM	Helium MFC set to  0.000000
7/29/2011	10:09:02 AM	H2 MFC set to  0.000000
7/29/2011	10:09:02 AM	BCl3 MFC set to  0.000000
7/29/2011	10:09:02 AM	PHl3 MFC set to  0.000000
7/29/2011	10:09:02 AM	SiCl4 MFC set to  0.000000
7/29/2011	10:09:02 AM	Tube furnace set to 0
7/29/2011	10:09:02 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
7/29/2011	10:09:05 AM	Main Vac valve opened
7/29/2011	10:14:29 AM	Recipe started at 10:14 AM
7/29/2011	10:14:29 AM	Helium valve closed
7/29/2011	10:14:29 AM	H2 valve closed
7/29/2011	10:14:29 AM	BCl3 valve closed
7/29/2011	10:14:29 AM	PH3 valve closed
7/29/2011	10:14:29 AM	SiCl4 pre valve closed
7/29/2011	10:14:29 AM	SiCl4 post valve closed
7/29/2011	10:14:29 AM	Bypass valve closed
7/29/2011	10:14:29 AM	Bubbler valve closed
7/29/2011	10:14:29 AM	Main Vac valve opened
7/29/2011	10:14:29 AM	Helium MFC set to  0.000000
7/29/2011	10:14:29 AM	H2 MFC set to  0.000000
7/29/2011	10:14:29 AM	BCl3 MFC set to  0.000000
7/29/2011	10:14:29 AM	PHl3 MFC set to  0.000000
7/29/2011	10:14:29 AM	SiCl4 MFC set to  0.000000
7/29/2011	10:14:29 AM	Bypass solenoid MFC set to  0.000000
7/29/2011	10:14:29 AM	Tube furnace set to 150
7/29/2011	10:14:59 AM	H2 valve closed
7/29/2011	10:14:59 AM	BCl3 valve closed
7/29/2011	10:14:59 AM	PH3 valve closed
7/29/2011	10:14:59 AM	SiCl4 pre valve closed
7/29/2011	10:14:59 AM	SiCl4 post valve closed
7/29/2011	10:14:59 AM	Bypass valve closed
7/29/2011	10:14:59 AM	Bubbler valve closed
7/29/2011	10:14:59 AM	Helium valve opened
7/29/2011	10:14:59 AM	Main Vac valve opened
7/29/2011	10:14:59 AM	Helium MFC set to  20.000000
7/29/2011	10:14:59 AM	H2 MFC set to  0.000000
7/29/2011	10:14:59 AM	BCl3 MFC set to  0.000000
7/29/2011	10:14:59 AM	PHl3 MFC set to  0.000000
7/29/2011	10:14:59 AM	SiCl4 MFC set to  0.000000
7/29/2011	10:14:59 AM	Bypass solenoid MFC set to  0.000000
7/29/2011	10:14:59 AM	Tube furnace set to 150
7/29/2011	10:15:29 AM	Helium valve closed
7/29/2011	10:15:29 AM	H2 valve closed
7/29/2011	10:15:29 AM	BCl3 valve closed
7/29/2011	10:15:29 AM	PH3 valve closed
7/29/2011	10:15:29 AM	SiCl4 pre valve closed
7/29/2011	10:15:29 AM	SiCl4 post valve closed
7/29/2011	10:15:29 AM	Bypass valve closed
7/29/2011	10:15:29 AM	Bubbler valve closed
7/29/2011	10:15:29 AM	Main Vac valve opened
7/29/2011	10:15:29 AM	Helium MFC set to  0.000000
7/29/2011	10:15:29 AM	H2 MFC set to  0.000000
7/29/2011	10:15:29 AM	BCl3 MFC set to  0.000000
7/29/2011	10:15:29 AM	PHl3 MFC set to  0.000000
7/29/2011	10:15:29 AM	SiCl4 MFC set to  0.000000
7/29/2011	10:15:29 AM	Bypass solenoid MFC set to  0.000000
7/29/2011	10:15:29 AM	Tube furnace set to 150
7/29/2011	10:15:59 AM	H2 valve closed
7/29/2011	10:15:59 AM	BCl3 valve closed
7/29/2011	10:15:59 AM	PH3 valve closed
7/29/2011	10:15:59 AM	SiCl4 pre valve closed
7/29/2011	10:15:59 AM	SiCl4 post valve closed
7/29/2011	10:15:59 AM	Bypass valve closed
7/29/2011	10:15:59 AM	Bubbler valve closed
7/29/2011	10:15:59 AM	Helium valve opened
7/29/2011	10:15:59 AM	Main Vac valve opened
7/29/2011	10:15:59 AM	Helium MFC set to  20.000000
7/29/2011	10:15:59 AM	H2 MFC set to  0.000000
7/29/2011	10:15:59 AM	BCl3 MFC set to  0.000000
7/29/2011	10:15:59 AM	PHl3 MFC set to  0.000000
7/29/2011	10:15:59 AM	SiCl4 MFC set to  0.000000
7/29/2011	10:16:00 AM	Bypass solenoid MFC set to  0.000000
7/29/2011	10:16:00 AM	Tube furnace set to 150
7/29/2011	10:16:30 AM	Helium valve closed
7/29/2011	10:16:30 AM	H2 valve closed
7/29/2011	10:16:30 AM	BCl3 valve closed
7/29/2011	10:16:30 AM	PH3 valve closed
7/29/2011	10:16:30 AM	SiCl4 pre valve closed
7/29/2011	10:16:30 AM	SiCl4 post valve closed
7/29/2011	10:16:30 AM	Bypass valve closed
7/29/2011	10:16:30 AM	Bubbler valve closed
7/29/2011	10:16:30 AM	Main Vac valve opened
7/29/2011	10:16:30 AM	Helium MFC set to  0.000000
7/29/2011	10:16:30 AM	H2 MFC set to  0.000000
7/29/2011	10:16:30 AM	BCl3 MFC set to  0.000000
7/29/2011	10:16:30 AM	PHl3 MFC set to  0.000000
7/29/2011	10:16:30 AM	SiCl4 MFC set to  0.000000
7/29/2011	10:16:30 AM	Bypass solenoid MFC set to  0.000000
7/29/2011	10:16:30 AM	Tube furnace set to 150
7/29/2011	10:17:00 AM	H2 valve closed
7/29/2011	10:17:00 AM	BCl3 valve closed
7/29/2011	10:17:00 AM	PH3 valve closed
7/29/2011	10:17:00 AM	SiCl4 pre valve closed
7/29/2011	10:17:00 AM	SiCl4 post valve closed
7/29/2011	10:17:00 AM	Bypass valve closed
7/29/2011	10:17:00 AM	Bubbler valve closed
7/29/2011	10:17:00 AM	Helium valve opened
7/29/2011	10:17:00 AM	Main Vac valve opened
7/29/2011	10:17:00 AM	Helium MFC set to  20.000000
7/29/2011	10:17:00 AM	H2 MFC set to  0.000000
7/29/2011	10:17:00 AM	BCl3 MFC set to  0.000000
7/29/2011	10:17:00 AM	PHl3 MFC set to  0.000000
7/29/2011	10:17:00 AM	SiCl4 MFC set to  0.000000
7/29/2011	10:17:00 AM	Bypass solenoid MFC set to  0.000000
7/29/2011	10:17:00 AM	Tube furnace set to 150
7/29/2011	10:17:30 AM	Helium valve closed
7/29/2011	10:17:30 AM	H2 valve closed
7/29/2011	10:17:30 AM	BCl3 valve closed
7/29/2011	10:17:30 AM	PH3 valve closed
7/29/2011	10:17:30 AM	SiCl4 pre valve closed
7/29/2011	10:17:30 AM	SiCl4 post valve closed
7/29/2011	10:17:30 AM	Bypass valve closed
7/29/2011	10:17:30 AM	Bubbler valve closed
7/29/2011	10:17:30 AM	Main Vac valve opened
7/29/2011	10:17:30 AM	Helium MFC set to  0.000000
7/29/2011	10:17:30 AM	H2 MFC set to  0.000000
7/29/2011	10:17:30 AM	BCl3 MFC set to  0.000000
7/29/2011	10:17:30 AM	PHl3 MFC set to  0.000000
7/29/2011	10:17:30 AM	SiCl4 MFC set to  0.000000
7/29/2011	10:17:30 AM	Bypass solenoid MFC set to  0.000000
7/29/2011	10:17:30 AM	Tube furnace set to 150
7/29/2011	10:18:00 AM	H2 valve closed
7/29/2011	10:18:00 AM	BCl3 valve closed
7/29/2011	10:18:00 AM	PH3 valve closed
7/29/2011	10:18:00 AM	SiCl4 pre valve closed
7/29/2011	10:18:00 AM	SiCl4 post valve closed
7/29/2011	10:18:00 AM	Bypass valve closed
7/29/2011	10:18:00 AM	Bubbler valve closed
7/29/2011	10:18:00 AM	Helium valve opened
7/29/2011	10:18:00 AM	Main Vac valve opened
7/29/2011	10:18:00 AM	Helium MFC set to  20.000000
7/29/2011	10:18:00 AM	H2 MFC set to  0.000000
7/29/2011	10:18:00 AM	BCl3 MFC set to  0.000000
7/29/2011	10:18:00 AM	PHl3 MFC set to  0.000000
7/29/2011	10:18:00 AM	SiCl4 MFC set to  0.000000
7/29/2011	10:18:00 AM	Bypass solenoid MFC set to  0.000000
7/29/2011	10:18:00 AM	Tube furnace set to 150
7/29/2011	10:18:30 AM	Helium valve closed
7/29/2011	10:18:30 AM	H2 valve closed
7/29/2011	10:18:30 AM	BCl3 valve closed
7/29/2011	10:18:30 AM	PH3 valve closed
7/29/2011	10:18:30 AM	SiCl4 pre valve closed
7/29/2011	10:18:30 AM	SiCl4 post valve closed
7/29/2011	10:18:30 AM	Bypass valve closed
7/29/2011	10:18:30 AM	Bubbler valve closed
7/29/2011	10:18:30 AM	Main Vac valve opened
7/29/2011	10:18:30 AM	Helium MFC set to  0.000000
7/29/2011	10:18:30 AM	H2 MFC set to  0.000000
7/29/2011	10:18:30 AM	BCl3 MFC set to  0.000000
7/29/2011	10:18:30 AM	PHl3 MFC set to  0.000000
7/29/2011	10:18:30 AM	SiCl4 MFC set to  0.000000
7/29/2011	10:18:30 AM	Bypass solenoid MFC set to  0.000000
7/29/2011	10:18:31 AM	Tube furnace set to 150
7/29/2011	10:19:01 AM	H2 valve closed
7/29/2011	10:19:01 AM	BCl3 valve closed
7/29/2011	10:19:01 AM	PH3 valve closed
7/29/2011	10:19:01 AM	SiCl4 pre valve closed
7/29/2011	10:19:01 AM	SiCl4 post valve closed
7/29/2011	10:19:01 AM	Bypass valve closed
7/29/2011	10:19:01 AM	Bubbler valve closed
7/29/2011	10:19:01 AM	Helium valve opened
7/29/2011	10:19:01 AM	Main Vac valve opened
7/29/2011	10:19:01 AM	Helium MFC set to  20.000000
7/29/2011	10:19:01 AM	H2 MFC set to  0.000000
7/29/2011	10:19:01 AM	BCl3 MFC set to  0.000000
7/29/2011	10:19:01 AM	PHl3 MFC set to  0.000000
7/29/2011	10:19:01 AM	SiCl4 MFC set to  0.000000
7/29/2011	10:19:01 AM	Bypass solenoid MFC set to  0.000000
7/29/2011	10:19:01 AM	Tube furnace set to 150
7/29/2011	10:19:31 AM	Helium valve closed
7/29/2011	10:19:31 AM	H2 valve closed
7/29/2011	10:19:31 AM	BCl3 valve closed
7/29/2011	10:19:31 AM	PH3 valve closed
7/29/2011	10:19:31 AM	SiCl4 pre valve closed
7/29/2011	10:19:31 AM	SiCl4 post valve closed
7/29/2011	10:19:31 AM	Bypass valve closed
7/29/2011	10:19:31 AM	Bubbler valve closed
7/29/2011	10:19:31 AM	Main Vac valve opened
7/29/2011	10:19:31 AM	Helium MFC set to  0.000000
7/29/2011	10:19:31 AM	H2 MFC set to  0.000000
7/29/2011	10:19:31 AM	BCl3 MFC set to  0.000000
7/29/2011	10:19:31 AM	PHl3 MFC set to  0.000000
7/29/2011	10:19:31 AM	SiCl4 MFC set to  0.000000
7/29/2011	10:19:31 AM	Bypass solenoid MFC set to  0.000000
7/29/2011	10:19:31 AM	Tube furnace set to 150
7/29/2011	10:20:01 AM	H2 valve closed
7/29/2011	10:20:01 AM	BCl3 valve closed
7/29/2011	10:20:01 AM	PH3 valve closed
7/29/2011	10:20:01 AM	SiCl4 pre valve closed
7/29/2011	10:20:01 AM	SiCl4 post valve closed
7/29/2011	10:20:01 AM	Bypass valve closed
7/29/2011	10:20:01 AM	Bubbler valve closed
7/29/2011	10:20:01 AM	Helium valve opened
7/29/2011	10:20:01 AM	Main Vac valve opened
7/29/2011	10:20:01 AM	Helium MFC set to  20.000000
7/29/2011	10:20:01 AM	H2 MFC set to  0.000000
7/29/2011	10:20:01 AM	BCl3 MFC set to  0.000000
7/29/2011	10:20:01 AM	PHl3 MFC set to  0.000000
7/29/2011	10:20:01 AM	SiCl4 MFC set to  0.000000
7/29/2011	10:20:01 AM	Bypass solenoid MFC set to  0.000000
7/29/2011	10:20:01 AM	Tube furnace set to 150
7/29/2011	10:20:31 AM	Helium valve closed
7/29/2011	10:20:31 AM	H2 valve closed
7/29/2011	10:20:31 AM	BCl3 valve closed
7/29/2011	10:20:31 AM	PH3 valve closed
7/29/2011	10:20:31 AM	SiCl4 pre valve closed
7/29/2011	10:20:31 AM	SiCl4 post valve closed
7/29/2011	10:20:31 AM	Bypass valve closed
7/29/2011	10:20:31 AM	Bubbler valve closed
7/29/2011	10:20:31 AM	Main Vac valve opened
7/29/2011	10:20:31 AM	Helium MFC set to  0.000000
7/29/2011	10:20:31 AM	H2 MFC set to  0.000000
7/29/2011	10:20:31 AM	BCl3 MFC set to  0.000000
7/29/2011	10:20:31 AM	PHl3 MFC set to  0.000000
7/29/2011	10:20:31 AM	SiCl4 MFC set to  0.000000
7/29/2011	10:20:31 AM	Bypass solenoid MFC set to  0.000000
7/29/2011	10:20:31 AM	Tube furnace set to 150
7/29/2011	10:21:01 AM	H2 valve closed
7/29/2011	10:21:01 AM	BCl3 valve closed
7/29/2011	10:21:01 AM	PH3 valve closed
7/29/2011	10:21:01 AM	SiCl4 pre valve closed
7/29/2011	10:21:01 AM	SiCl4 post valve closed
7/29/2011	10:21:01 AM	Bypass valve closed
7/29/2011	10:21:01 AM	Bubbler valve closed
7/29/2011	10:21:01 AM	Helium valve opened
7/29/2011	10:21:01 AM	Main Vac valve opened
7/29/2011	10:21:01 AM	Helium MFC set to  20.000000
7/29/2011	10:21:01 AM	H2 MFC set to  0.000000
7/29/2011	10:21:01 AM	BCl3 MFC set to  0.000000
7/29/2011	10:21:01 AM	PHl3 MFC set to  0.000000
7/29/2011	10:21:01 AM	SiCl4 MFC set to  0.000000
7/29/2011	10:21:01 AM	Bypass solenoid MFC set to  0.000000
7/29/2011	10:21:02 AM	Tube furnace set to 150
7/29/2011	10:21:32 AM	Helium valve closed
7/29/2011	10:21:32 AM	H2 valve closed
7/29/2011	10:21:32 AM	BCl3 valve closed
7/29/2011	10:21:32 AM	PH3 valve closed
7/29/2011	10:21:32 AM	SiCl4 pre valve closed
7/29/2011	10:21:32 AM	SiCl4 post valve closed
7/29/2011	10:21:32 AM	Bypass valve closed
7/29/2011	10:21:32 AM	Bubbler valve closed
7/29/2011	10:21:32 AM	Main Vac valve opened
7/29/2011	10:21:32 AM	Helium MFC set to  0.000000
7/29/2011	10:21:32 AM	H2 MFC set to  0.000000
7/29/2011	10:21:32 AM	BCl3 MFC set to  0.000000
7/29/2011	10:21:32 AM	PHl3 MFC set to  0.000000
7/29/2011	10:21:32 AM	SiCl4 MFC set to  0.000000
7/29/2011	10:21:32 AM	Bypass solenoid MFC set to  0.000000
7/29/2011	10:21:32 AM	Tube furnace set to 150
7/29/2011	10:22:02 AM	H2 valve closed
7/29/2011	10:22:02 AM	BCl3 valve closed
7/29/2011	10:22:02 AM	PH3 valve closed
7/29/2011	10:22:02 AM	SiCl4 pre valve closed
7/29/2011	10:22:02 AM	SiCl4 post valve closed
7/29/2011	10:22:02 AM	Bypass valve closed
7/29/2011	10:22:02 AM	Bubbler valve closed
7/29/2011	10:22:02 AM	Helium valve opened
7/29/2011	10:22:02 AM	Main Vac valve opened
7/29/2011	10:22:02 AM	Helium MFC set to  20.000000
7/29/2011	10:22:02 AM	H2 MFC set to  0.000000
7/29/2011	10:22:02 AM	BCl3 MFC set to  0.000000
7/29/2011	10:22:02 AM	PHl3 MFC set to  0.000000
7/29/2011	10:22:02 AM	SiCl4 MFC set to  0.000000
7/29/2011	10:22:02 AM	Bypass solenoid MFC set to  0.000000
7/29/2011	10:22:02 AM	Tube furnace set to 150
7/29/2011	10:22:32 AM	Helium valve closed
7/29/2011	10:22:32 AM	H2 valve closed
7/29/2011	10:22:32 AM	BCl3 valve closed
7/29/2011	10:22:32 AM	PH3 valve closed
7/29/2011	10:22:32 AM	SiCl4 pre valve closed
7/29/2011	10:22:32 AM	SiCl4 post valve closed
7/29/2011	10:22:32 AM	Bypass valve closed
7/29/2011	10:22:32 AM	Bubbler valve closed
7/29/2011	10:22:32 AM	Main Vac valve opened
7/29/2011	10:22:32 AM	Helium MFC set to  0.000000
7/29/2011	10:22:32 AM	H2 MFC set to  0.000000
7/29/2011	10:22:32 AM	BCl3 MFC set to  0.000000
7/29/2011	10:22:32 AM	PHl3 MFC set to  0.000000
7/29/2011	10:22:32 AM	SiCl4 MFC set to  0.000000
7/29/2011	10:22:32 AM	Bypass solenoid MFC set to  0.000000
7/29/2011	10:22:32 AM	Tube furnace set to 150
7/29/2011	10:23:02 AM	H2 valve closed
7/29/2011	10:23:02 AM	BCl3 valve closed
7/29/2011	10:23:02 AM	PH3 valve closed
7/29/2011	10:23:02 AM	SiCl4 pre valve closed
7/29/2011	10:23:02 AM	SiCl4 post valve closed
7/29/2011	10:23:02 AM	Bypass valve closed
7/29/2011	10:23:02 AM	Bubbler valve closed
7/29/2011	10:23:02 AM	Helium valve opened
7/29/2011	10:23:02 AM	Main Vac valve opened
7/29/2011	10:23:02 AM	Helium MFC set to  20.000000
7/29/2011	10:23:02 AM	H2 MFC set to  0.000000
7/29/2011	10:23:02 AM	BCl3 MFC set to  0.000000
7/29/2011	10:23:02 AM	PHl3 MFC set to  0.000000
7/29/2011	10:23:02 AM	SiCl4 MFC set to  0.000000
7/29/2011	10:23:02 AM	Bypass solenoid MFC set to  0.000000
7/29/2011	10:23:03 AM	Tube furnace set to 150
7/29/2011	10:23:33 AM	Helium valve closed
7/29/2011	10:23:33 AM	H2 valve closed
7/29/2011	10:23:33 AM	BCl3 valve closed
7/29/2011	10:23:33 AM	PH3 valve closed
7/29/2011	10:23:33 AM	SiCl4 pre valve closed
7/29/2011	10:23:33 AM	SiCl4 post valve closed
7/29/2011	10:23:33 AM	Bypass valve closed
7/29/2011	10:23:33 AM	Bubbler valve closed
7/29/2011	10:23:33 AM	Main Vac valve opened
7/29/2011	10:23:33 AM	Helium MFC set to  0.000000
7/29/2011	10:23:33 AM	H2 MFC set to  0.000000
7/29/2011	10:23:33 AM	BCl3 MFC set to  0.000000
7/29/2011	10:23:33 AM	PHl3 MFC set to  0.000000
7/29/2011	10:23:33 AM	SiCl4 MFC set to  0.000000
7/29/2011	10:23:33 AM	Bypass solenoid MFC set to  0.000000
7/29/2011	10:23:33 AM	Tube furnace set to 150
7/29/2011	10:24:03 AM	H2 valve closed
7/29/2011	10:24:03 AM	BCl3 valve closed
7/29/2011	10:24:03 AM	PH3 valve closed
7/29/2011	10:24:03 AM	SiCl4 pre valve closed
7/29/2011	10:24:03 AM	SiCl4 post valve closed
7/29/2011	10:24:03 AM	Bypass valve closed
7/29/2011	10:24:03 AM	Bubbler valve closed
7/29/2011	10:24:03 AM	Helium valve opened
7/29/2011	10:24:03 AM	Main Vac valve opened
7/29/2011	10:24:03 AM	Helium MFC set to  20.000000
7/29/2011	10:24:03 AM	H2 MFC set to  0.000000
7/29/2011	10:24:03 AM	BCl3 MFC set to  0.000000
7/29/2011	10:24:03 AM	PHl3 MFC set to  0.000000
7/29/2011	10:24:03 AM	SiCl4 MFC set to  0.000000
7/29/2011	10:24:03 AM	Bypass solenoid MFC set to  0.000000
7/29/2011	10:24:03 AM	Tube furnace set to 150
7/29/2011	10:24:33 AM	Helium valve closed
7/29/2011	10:24:33 AM	H2 valve closed
7/29/2011	10:24:33 AM	BCl3 valve closed
7/29/2011	10:24:33 AM	PH3 valve closed
7/29/2011	10:24:33 AM	SiCl4 pre valve closed
7/29/2011	10:24:33 AM	SiCl4 post valve closed
7/29/2011	10:24:33 AM	Bypass valve closed
7/29/2011	10:24:33 AM	Bubbler valve closed
7/29/2011	10:24:33 AM	Main Vac valve opened
7/29/2011	10:24:33 AM	Helium MFC set to  0.000000
7/29/2011	10:24:33 AM	H2 MFC set to  0.000000
7/29/2011	10:24:33 AM	BCl3 MFC set to  0.000000
7/29/2011	10:24:33 AM	PHl3 MFC set to  0.000000
7/29/2011	10:24:33 AM	SiCl4 MFC set to  0.000000
7/29/2011	10:24:33 AM	Bypass solenoid MFC set to  0.000000
7/29/2011	10:24:33 AM	Tube furnace set to 150
7/29/2011	10:24:34 AM	Run finished at 10:24 AM
7/29/2011	10:38:27 AM	Main Vac valve closed
7/29/2011	10:38:53 AM	Main Vac valve opened
7/29/2011	10:39:27 AM	Main Vac valve closed
7/29/2011	10:39:43 AM	Main Vac valve opened
7/29/2011	10:49:00 AM	Recipe started at 10:48 AM
7/29/2011	10:49:00 AM	Helium valve closed
7/29/2011	10:49:00 AM	H2 valve closed
7/29/2011	10:49:00 AM	BCl3 valve closed
7/29/2011	10:49:00 AM	PH3 valve closed
7/29/2011	10:49:00 AM	SiCl4 pre valve closed
7/29/2011	10:49:00 AM	SiCl4 post valve closed
7/29/2011	10:49:00 AM	Main Vac valve closed
7/29/2011	10:49:00 AM	Bypass valve closed
7/29/2011	10:49:00 AM	Bubbler valve closed
7/29/2011	10:49:00 AM	Helium MFC set to  0.000000
7/29/2011	10:49:00 AM	H2 MFC set to  0.000000
7/29/2011	10:49:00 AM	BCl3 MFC set to  0.000000
7/29/2011	10:49:00 AM	PHl3 MFC set to  0.000000
7/29/2011	10:49:00 AM	SiCl4 MFC set to  0.000000
7/29/2011	10:49:00 AM	Bypass solenoid MFC set to  0.000000
7/29/2011	10:49:00 AM	Tube furnace set to 0
7/29/2011	10:49:03 AM	Helium valve closed
7/29/2011	10:49:03 AM	BCl3 valve closed
7/29/2011	10:49:03 AM	PH3 valve closed
7/29/2011	10:49:03 AM	SiCl4 pre valve closed
7/29/2011	10:49:03 AM	SiCl4 post valve closed
7/29/2011	10:49:03 AM	Main Vac valve closed
7/29/2011	10:49:03 AM	Bypass valve closed
7/29/2011	10:49:03 AM	Bubbler valve closed
7/29/2011	10:49:03 AM	H2 valve opened
7/29/2011	10:49:03 AM	Helium MFC set to  0.000000
7/29/2011	10:49:03 AM	H2 MFC set to  500.000000
7/29/2011	10:49:03 AM	BCl3 MFC set to  0.000000
7/29/2011	10:49:03 AM	PHl3 MFC set to  0.000000
7/29/2011	10:49:03 AM	SiCl4 MFC set to  0.000000
7/29/2011	10:49:03 AM	Bypass solenoid MFC set to  0.000000
7/29/2011	10:49:03 AM	Tube furnace set to 0
7/29/2011	10:50:06 AM	Helium valve closed
7/29/2011	10:50:06 AM	BCl3 valve closed
7/29/2011	10:50:06 AM	PH3 valve closed
7/29/2011	10:50:06 AM	SiCl4 pre valve closed
7/29/2011	10:50:06 AM	SiCl4 post valve closed
7/29/2011	10:50:06 AM	Main Vac valve closed
7/29/2011	10:50:06 AM	Bypass valve closed
7/29/2011	10:50:06 AM	H2 valve opened
7/29/2011	10:50:06 AM	Bubbler valve opened
7/29/2011	10:50:06 AM	Helium MFC set to  0.000000
7/29/2011	10:50:06 AM	H2 MFC set to  500.000000
7/29/2011	10:50:06 AM	BCl3 MFC set to  0.000000
7/29/2011	10:50:06 AM	PHl3 MFC set to  0.000000
7/29/2011	10:50:06 AM	SiCl4 MFC set to  0.000000
7/29/2011	10:50:06 AM	Bypass solenoid MFC set to  0.000000
7/29/2011	10:50:06 AM	Tube furnace set to 0
7/29/2011	10:50:07 AM	Helium valve closed
7/29/2011	10:50:07 AM	BCl3 valve closed
7/29/2011	10:50:07 AM	PH3 valve closed
7/29/2011	10:50:07 AM	SiCl4 pre valve closed
7/29/2011	10:50:07 AM	SiCl4 post valve closed
7/29/2011	10:50:07 AM	Main Vac valve closed
7/29/2011	10:50:07 AM	Bypass valve closed
7/29/2011	10:50:07 AM	H2 valve opened
7/29/2011	10:50:07 AM	Bubbler valve opened
7/29/2011	10:50:07 AM	Helium MFC set to  0.000000
7/29/2011	10:50:07 AM	H2 MFC set to  500.000000
7/29/2011	10:50:07 AM	BCl3 MFC set to  0.000000
7/29/2011	10:50:07 AM	PHl3 MFC set to  0.000000
7/29/2011	10:50:07 AM	SiCl4 MFC set to  0.000000
7/29/2011	10:50:07 AM	Bypass solenoid MFC set to  0.000000
7/29/2011	10:50:08 AM	Tube furnace set to 1000
7/29/2011	11:10:07 AM	Helium valve closed
7/29/2011	11:10:07 AM	PH3 valve closed
7/29/2011	11:10:07 AM	Main Vac valve closed
7/29/2011	11:10:07 AM	Bypass valve closed
7/29/2011	11:10:07 AM	H2 valve opened
7/29/2011	11:10:07 AM	BCl3 valve opened
7/29/2011	11:10:07 AM	SiCl4 pre valve opened
7/29/2011	11:10:07 AM	SiCl4 post valve opened
7/29/2011	11:10:07 AM	Bubbler valve opened
7/29/2011	11:10:07 AM	Helium MFC set to  0.000000
7/29/2011	11:10:07 AM	H2 MFC set to  500.000000
7/29/2011	11:10:07 AM	BCl3 MFC set to  2.000000
7/29/2011	11:10:07 AM	PHl3 MFC set to  0.000000
7/29/2011	11:10:07 AM	SiCl4 MFC set to  50.000000
7/29/2011	11:10:07 AM	Bypass solenoid MFC set to  0.000000
7/29/2011	11:10:08 AM	Tube furnace set to 1000
7/29/2011	11:30:08 AM	Helium valve closed
7/29/2011	11:30:08 AM	BCl3 valve closed
7/29/2011	11:30:08 AM	PH3 valve closed
7/29/2011	11:30:08 AM	SiCl4 pre valve closed
7/29/2011	11:30:08 AM	SiCl4 post valve closed
7/29/2011	11:30:08 AM	Main Vac valve closed
7/29/2011	11:30:08 AM	Bypass valve closed
7/29/2011	11:30:08 AM	H2 valve opened
7/29/2011	11:30:08 AM	Bubbler valve opened
7/29/2011	11:30:08 AM	Helium MFC set to  0.000000
7/29/2011	11:30:08 AM	H2 MFC set to  500.000000
7/29/2011	11:30:08 AM	BCl3 MFC set to  0.000000
7/29/2011	11:30:08 AM	PHl3 MFC set to  0.000000
7/29/2011	11:30:08 AM	SiCl4 MFC set to  0.000000
7/29/2011	11:30:08 AM	Bypass solenoid MFC set to  0.000000
7/29/2011	11:30:08 AM	Tube furnace set to 750
7/29/2011	11:35:08 AM	H2 valve closed
7/29/2011	11:35:08 AM	BCl3 valve closed
7/29/2011	11:35:08 AM	PH3 valve closed
7/29/2011	11:35:08 AM	SiCl4 pre valve closed
7/29/2011	11:35:08 AM	SiCl4 post valve closed
7/29/2011	11:35:08 AM	Main Vac valve closed
7/29/2011	11:35:08 AM	Bypass valve closed
7/29/2011	11:35:08 AM	Helium valve opened
7/29/2011	11:35:08 AM	Bubbler valve opened
7/29/2011	11:35:08 AM	Helium MFC set to  500.000000
7/29/2011	11:35:08 AM	H2 MFC set to  0.000000
7/29/2011	11:35:08 AM	BCl3 MFC set to  0.000000
7/29/2011	11:35:08 AM	PHl3 MFC set to  0.000000
7/29/2011	11:35:08 AM	SiCl4 MFC set to  0.000000
7/29/2011	11:35:08 AM	Bypass solenoid MFC set to  0.000000
7/29/2011	11:35:08 AM	Tube furnace set to 0
7/29/2011	11:41:34 AM	Helium valve closed
7/29/2011	11:41:34 AM	H2 valve closed
7/29/2011	11:41:34 AM	BCl3 valve closed
7/29/2011	11:41:34 AM	PH3 valve closed
7/29/2011	11:41:34 AM	SiCl4 pre valve closed
7/29/2011	11:41:34 AM	SiCl4 post valve closed
7/29/2011	11:41:34 AM	Main Vac valve closed
7/29/2011	11:41:34 AM	Bypass valve closed
7/29/2011	11:41:34 AM	Bubbler valve closed
7/29/2011	11:41:34 AM	Helium MFC set to  0.000000
7/29/2011	11:41:34 AM	H2 MFC set to  0.000000
7/29/2011	11:41:34 AM	BCl3 MFC set to  0.000000
7/29/2011	11:41:34 AM	PHl3 MFC set to  0.000000
7/29/2011	11:41:34 AM	SiCl4 MFC set to  0.000000
7/29/2011	11:41:34 AM	Bypass solenoid MFC set to  0.000000
7/29/2011	11:41:34 AM	Tube furnace set to 0
7/29/2011	11:41:35 AM	Run finished at 11:41 AM
7/29/2011	11:41:45 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/29/2011	11:41:46 AM	Recipe started at 11:41 AM
7/29/2011	11:41:46 AM	Helium valve closed
7/29/2011	11:41:46 AM	H2 valve closed
7/29/2011	11:41:46 AM	BCl3 valve closed
7/29/2011	11:41:46 AM	PH3 valve closed
7/29/2011	11:41:46 AM	SiCl4 pre valve closed
7/29/2011	11:41:46 AM	SiCl4 post valve closed
7/29/2011	11:41:46 AM	Main Vac valve closed
7/29/2011	11:41:46 AM	Bypass valve closed
7/29/2011	11:41:46 AM	Bubbler valve closed
7/29/2011	11:41:46 AM	Helium MFC set to  0.000000
7/29/2011	11:41:46 AM	H2 MFC set to  0.000000
7/29/2011	11:41:46 AM	BCl3 MFC set to  0.000000
7/29/2011	11:41:46 AM	PHl3 MFC set to  0.000000
7/29/2011	11:41:46 AM	SiCl4 MFC set to  0.000000
7/29/2011	11:41:46 AM	Bypass solenoid MFC set to  0.000000
7/29/2011	11:41:46 AM	Tube furnace set to 0
7/29/2011	11:41:49 AM	H2 valve closed
7/29/2011	11:41:49 AM	BCl3 valve closed
7/29/2011	11:41:49 AM	PH3 valve closed
7/29/2011	11:41:49 AM	SiCl4 pre valve closed
7/29/2011	11:41:49 AM	SiCl4 post valve closed
7/29/2011	11:41:49 AM	Main Vac valve closed
7/29/2011	11:41:49 AM	Bypass valve closed
7/29/2011	11:41:49 AM	Bubbler valve closed
7/29/2011	11:41:49 AM	Helium valve opened
7/29/2011	11:41:49 AM	Helium MFC set to  500.000000
7/29/2011	11:41:49 AM	H2 MFC set to  0.000000
7/29/2011	11:41:49 AM	BCl3 MFC set to  0.000000
7/29/2011	11:41:49 AM	PHl3 MFC set to  0.000000
7/29/2011	11:41:49 AM	SiCl4 MFC set to  0.000000
7/29/2011	11:41:49 AM	Bypass solenoid MFC set to  0.000000
7/29/2011	11:41:49 AM	Tube furnace set to 0
7/29/2011	11:41:50 AM	Helium valve closed
7/29/2011	11:41:50 AM	H2 valve closed
7/29/2011	11:41:50 AM	BCl3 valve closed
7/29/2011	11:41:50 AM	PH3 valve closed
7/29/2011	11:41:50 AM	SiCl4 pre valve closed
7/29/2011	11:41:50 AM	SiCl4 post valve closed
7/29/2011	11:41:50 AM	Main Vac valve closed
7/29/2011	11:41:50 AM	Bypass valve closed
7/29/2011	11:41:50 AM	Bubbler valve closed
7/29/2011	11:41:50 AM	Helium MFC set to  0.000000
7/29/2011	11:41:50 AM	H2 MFC set to  0.000000
7/29/2011	11:41:50 AM	BCl3 MFC set to  0.000000
7/29/2011	11:41:50 AM	PHl3 MFC set to  0.000000
7/29/2011	11:41:50 AM	SiCl4 MFC set to  0.000000
7/29/2011	11:41:50 AM	Bypass solenoid MFC set to  0.000000
7/29/2011	11:41:50 AM	Tube furnace set to 0
7/29/2011	11:41:51 AM	Run finished at 11:41 AM
7/29/2011	11:41:51 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/29/2011	11:52:20 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/29/2011	11:52:20 AM	Recipe started at 11:52 AM
7/29/2011	11:52:20 AM	Helium valve closed
7/29/2011	11:52:20 AM	H2 valve closed
7/29/2011	11:52:20 AM	BCl3 valve closed
7/29/2011	11:52:20 AM	PH3 valve closed
7/29/2011	11:52:20 AM	SiCl4 pre valve closed
7/29/2011	11:52:20 AM	SiCl4 post valve closed
7/29/2011	11:52:20 AM	Main Vac valve closed
7/29/2011	11:52:20 AM	Bubbler valve closed
7/29/2011	11:52:20 AM	Bypass valve opened
7/29/2011	11:52:20 AM	Helium MFC set to  0.000000
7/29/2011	11:52:20 AM	H2 MFC set to  0.000000
7/29/2011	11:52:20 AM	BCl3 MFC set to  0.000000
7/29/2011	11:52:20 AM	PHl3 MFC set to  0.000000
7/29/2011	11:52:20 AM	SiCl4 MFC set to  0.000000
7/29/2011	11:52:20 AM	Bypass solenoid MFC set to  0.000000
7/29/2011	11:52:21 AM	Tube furnace set to 0
7/29/2011	11:53:29 AM	Helium valve closed
7/29/2011	11:53:29 AM	H2 valve closed
7/29/2011	11:53:29 AM	BCl3 valve closed
7/29/2011	11:53:29 AM	PH3 valve closed
7/29/2011	11:53:29 AM	SiCl4 pre valve closed
7/29/2011	11:53:29 AM	SiCl4 post valve closed
7/29/2011	11:53:29 AM	Main Vac valve closed
7/29/2011	11:53:29 AM	Bubbler valve closed
7/29/2011	11:53:29 AM	Bypass valve opened
7/29/2011	11:53:29 AM	Helium MFC set to  0.000000
7/29/2011	11:53:29 AM	H2 MFC set to  0.000000
7/29/2011	11:53:29 AM	BCl3 MFC set to  0.000000
7/29/2011	11:53:29 AM	PHl3 MFC set to  0.000000
7/29/2011	11:53:29 AM	SiCl4 MFC set to  0.000000
7/29/2011	11:53:29 AM	Bypass solenoid MFC set to  0.000000
7/29/2011	11:53:30 AM	Tube furnace set to 0
7/29/2011	11:54:30 AM	Helium valve closed
7/29/2011	11:54:30 AM	H2 valve closed
7/29/2011	11:54:30 AM	BCl3 valve closed
7/29/2011	11:54:30 AM	PH3 valve closed
7/29/2011	11:54:30 AM	SiCl4 pre valve closed
7/29/2011	11:54:30 AM	SiCl4 post valve closed
7/29/2011	11:54:30 AM	Bypass valve closed
7/29/2011	11:54:30 AM	Bubbler valve closed
7/29/2011	11:54:30 AM	Main Vac valve opened
7/29/2011	11:54:30 AM	Helium MFC set to  0.000000
7/29/2011	11:54:30 AM	H2 MFC set to  0.000000
7/29/2011	11:54:30 AM	BCl3 MFC set to  0.000000
7/29/2011	11:54:30 AM	PHl3 MFC set to  0.000000
7/29/2011	11:54:30 AM	SiCl4 MFC set to  0.000000
7/29/2011	11:54:30 AM	Bypass solenoid MFC set to  0.000000
7/29/2011	11:54:30 AM	Tube furnace set to 0
7/29/2011	11:54:31 AM	Run finished at 11:54 AM
7/29/2011	11:54:31 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/29/2011	12:01:31 PM	Helium MFC set to  0.000000
7/29/2011	12:01:44 PM	Helium MFC set to  20.000000
7/29/2011	12:01:46 PM	Helium valve opened
7/29/2011	12:02:02 PM	Helium MFC set to  21.000000
7/29/2011	12:02:14 PM	Helium MFC set to  25.000000
7/29/2011	12:02:24 PM	Helium MFC set to  30.000000
7/29/2011	12:02:39 PM	Helium MFC set to  40.000000
7/29/2011	12:03:55 PM	Helium MFC set to  20.000000
7/29/2011	12:04:07 PM	Helium valve closed
7/29/2011	12:04:10 PM	Helium MFC set to  0.000000
7/29/2011	12:05:10 PM	Helium MFC set to  20.000000
7/29/2011	12:05:12 PM	Helium valve opened
7/29/2011	12:09:13 PM	Helium valve closed
7/29/2011	12:09:47 PM	Helium valve opened
7/29/2011	12:11:48 PM	Helium valve closed
7/29/2011	12:12:35 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
7/29/2011	12:12:48 PM	Recipe started at 12:12 PM
7/29/2011	12:12:48 PM	Helium valve closed
7/29/2011	12:12:48 PM	H2 valve closed
7/29/2011	12:12:48 PM	BCl3 valve closed
7/29/2011	12:12:48 PM	PH3 valve closed
7/29/2011	12:12:48 PM	SiCl4 pre valve closed
7/29/2011	12:12:48 PM	SiCl4 post valve closed
7/29/2011	12:12:48 PM	Main Vac valve closed
7/29/2011	12:12:48 PM	Bubbler valve closed
7/29/2011	12:12:48 PM	Bypass valve opened
7/29/2011	12:12:48 PM	Helium MFC set to  0.000000
7/29/2011	12:12:48 PM	H2 MFC set to  0.000000
7/29/2011	12:12:48 PM	BCl3 MFC set to  0.000000
7/29/2011	12:12:48 PM	PHl3 MFC set to  0.000000
7/29/2011	12:12:48 PM	SiCl4 MFC set to  0.000000
7/29/2011	12:12:48 PM	Bypass solenoid MFC set to  0.000000
7/29/2011	12:12:48 PM	Tube furnace set to 0
7/29/2011	12:12:48 PM	Helium valve closed
7/29/2011	12:12:48 PM	H2 valve closed
7/29/2011	12:12:48 PM	BCl3 valve closed
7/29/2011	12:12:48 PM	PH3 valve closed
7/29/2011	12:12:48 PM	SiCl4 pre valve closed
7/29/2011	12:12:48 PM	SiCl4 post valve closed
7/29/2011	12:12:48 PM	Main Vac valve closed
7/29/2011	12:12:48 PM	Bubbler valve closed
7/29/2011	12:12:48 PM	Bypass valve opened
7/29/2011	12:12:48 PM	Helium MFC set to  0.000000
7/29/2011	12:12:48 PM	H2 MFC set to  0.000000
7/29/2011	12:12:48 PM	BCl3 MFC set to  0.000000
7/29/2011	12:12:48 PM	PHl3 MFC set to  0.000000
7/29/2011	12:12:48 PM	SiCl4 MFC set to  0.000000
7/29/2011	12:12:48 PM	Bypass solenoid MFC set to  0.000000
7/29/2011	12:12:48 PM	Tube furnace set to 0
7/29/2011	12:12:49 PM	Run aborted at 12:12 PM
7/29/2011	12:12:49 PM	Helium valve closed
7/29/2011	12:12:49 PM	H2 valve closed
7/29/2011	12:12:49 PM	BCl3 valve closed
7/29/2011	12:12:49 PM	PH3 valve closed
7/29/2011	12:12:49 PM	SiCl4 pre valve closed
7/29/2011	12:12:49 PM	SiCl4 post valve closed
7/29/2011	12:12:49 PM	Bypass valve closed
7/29/2011	12:12:49 PM	Main Vac valve closed
7/29/2011	12:12:49 PM	Bubbler valve closed
7/29/2011	12:12:49 PM	Helium MFC set to  0.000000
7/29/2011	12:12:49 PM	H2 MFC set to  0.000000
7/29/2011	12:12:49 PM	BCl3 MFC set to  0.000000
7/29/2011	12:12:49 PM	PHl3 MFC set to  0.000000
7/29/2011	12:12:49 PM	SiCl4 MFC set to  0.000000
7/29/2011	12:12:49 PM	Tube furnace set to 0
7/29/2011	12:12:49 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
7/29/2011	12:12:52 PM	Main Vac valve opened
7/29/2011	12:13:08 PM	Recipe started at 12:13 PM
7/29/2011	12:13:08 PM	Helium valve closed
7/29/2011	12:13:08 PM	H2 valve closed
7/29/2011	12:13:08 PM	BCl3 valve closed
7/29/2011	12:13:08 PM	PH3 valve closed
7/29/2011	12:13:08 PM	SiCl4 pre valve closed
7/29/2011	12:13:08 PM	SiCl4 post valve closed
7/29/2011	12:13:08 PM	Bypass valve closed
7/29/2011	12:13:08 PM	Bubbler valve closed
7/29/2011	12:13:08 PM	Main Vac valve opened
7/29/2011	12:13:08 PM	Helium MFC set to  0.000000
7/29/2011	12:13:08 PM	H2 MFC set to  0.000000
7/29/2011	12:13:08 PM	BCl3 MFC set to  0.000000
7/29/2011	12:13:08 PM	PHl3 MFC set to  0.000000
7/29/2011	12:13:08 PM	SiCl4 MFC set to  0.000000
7/29/2011	12:13:08 PM	Bypass solenoid MFC set to  0.000000
7/29/2011	12:13:08 PM	Tube furnace set to 150
7/29/2011	12:13:38 PM	H2 valve closed
7/29/2011	12:13:38 PM	BCl3 valve closed
7/29/2011	12:13:38 PM	PH3 valve closed
7/29/2011	12:13:38 PM	SiCl4 pre valve closed
7/29/2011	12:13:38 PM	SiCl4 post valve closed
7/29/2011	12:13:38 PM	Bypass valve closed
7/29/2011	12:13:38 PM	Bubbler valve closed
7/29/2011	12:13:38 PM	Helium valve opened
7/29/2011	12:13:38 PM	Main Vac valve opened
7/29/2011	12:13:38 PM	Helium MFC set to  20.000000
7/29/2011	12:13:38 PM	H2 MFC set to  0.000000
7/29/2011	12:13:38 PM	BCl3 MFC set to  0.000000
7/29/2011	12:13:38 PM	PHl3 MFC set to  0.000000
7/29/2011	12:13:38 PM	SiCl4 MFC set to  0.000000
7/29/2011	12:13:38 PM	Bypass solenoid MFC set to  0.000000
7/29/2011	12:13:38 PM	Tube furnace set to 150
7/29/2011	12:14:08 PM	Helium valve closed
7/29/2011	12:14:08 PM	H2 valve closed
7/29/2011	12:14:08 PM	BCl3 valve closed
7/29/2011	12:14:08 PM	PH3 valve closed
7/29/2011	12:14:08 PM	SiCl4 pre valve closed
7/29/2011	12:14:08 PM	SiCl4 post valve closed
7/29/2011	12:14:08 PM	Bypass valve closed
7/29/2011	12:14:08 PM	Bubbler valve closed
7/29/2011	12:14:08 PM	Main Vac valve opened
7/29/2011	12:14:08 PM	Helium MFC set to  0.000000
7/29/2011	12:14:08 PM	H2 MFC set to  0.000000
7/29/2011	12:14:08 PM	BCl3 MFC set to  0.000000
7/29/2011	12:14:08 PM	PHl3 MFC set to  0.000000
7/29/2011	12:14:08 PM	SiCl4 MFC set to  0.000000
7/29/2011	12:14:08 PM	Bypass solenoid MFC set to  0.000000
7/29/2011	12:14:08 PM	Tube furnace set to 150
7/29/2011	12:14:38 PM	H2 valve closed
7/29/2011	12:14:38 PM	BCl3 valve closed
7/29/2011	12:14:38 PM	PH3 valve closed
7/29/2011	12:14:38 PM	SiCl4 pre valve closed
7/29/2011	12:14:38 PM	SiCl4 post valve closed
7/29/2011	12:14:38 PM	Bypass valve closed
7/29/2011	12:14:38 PM	Bubbler valve closed
7/29/2011	12:14:38 PM	Helium valve opened
7/29/2011	12:14:38 PM	Main Vac valve opened
7/29/2011	12:14:38 PM	Helium MFC set to  20.000000
7/29/2011	12:14:38 PM	H2 MFC set to  0.000000
7/29/2011	12:14:38 PM	BCl3 MFC set to  0.000000
7/29/2011	12:14:38 PM	PHl3 MFC set to  0.000000
7/29/2011	12:14:38 PM	SiCl4 MFC set to  0.000000
7/29/2011	12:14:38 PM	Bypass solenoid MFC set to  0.000000
7/29/2011	12:14:38 PM	Tube furnace set to 150
7/29/2011	12:15:08 PM	Helium valve closed
7/29/2011	12:15:08 PM	H2 valve closed
7/29/2011	12:15:08 PM	BCl3 valve closed
7/29/2011	12:15:08 PM	PH3 valve closed
7/29/2011	12:15:08 PM	SiCl4 pre valve closed
7/29/2011	12:15:08 PM	SiCl4 post valve closed
7/29/2011	12:15:08 PM	Bypass valve closed
7/29/2011	12:15:08 PM	Bubbler valve closed
7/29/2011	12:15:08 PM	Main Vac valve opened
7/29/2011	12:15:08 PM	Helium MFC set to  0.000000
7/29/2011	12:15:08 PM	H2 MFC set to  0.000000
7/29/2011	12:15:08 PM	BCl3 MFC set to  0.000000
7/29/2011	12:15:08 PM	PHl3 MFC set to  0.000000
7/29/2011	12:15:08 PM	SiCl4 MFC set to  0.000000
7/29/2011	12:15:08 PM	Bypass solenoid MFC set to  0.000000
7/29/2011	12:15:09 PM	Tube furnace set to 150
7/29/2011	12:15:14 PM	Run aborted at 12:15 PM
7/29/2011	12:15:14 PM	Helium valve closed
7/29/2011	12:15:14 PM	H2 valve closed
7/29/2011	12:15:14 PM	BCl3 valve closed
7/29/2011	12:15:14 PM	PH3 valve closed
7/29/2011	12:15:14 PM	SiCl4 pre valve closed
7/29/2011	12:15:14 PM	SiCl4 post valve closed
7/29/2011	12:15:14 PM	Bypass valve closed
7/29/2011	12:15:14 PM	Main Vac valve closed
7/29/2011	12:15:14 PM	Bubbler valve closed
7/29/2011	12:15:14 PM	Helium MFC set to  0.000000
7/29/2011	12:15:14 PM	H2 MFC set to  0.000000
7/29/2011	12:15:14 PM	BCl3 MFC set to  0.000000
7/29/2011	12:15:14 PM	PHl3 MFC set to  0.000000
7/29/2011	12:15:14 PM	SiCl4 MFC set to  0.000000
7/29/2011	12:15:14 PM	Tube furnace set to 0
7/29/2011	12:15:15 PM	Main Vac valve opened
7/29/2011	12:15:24 PM	Recipe started at 12:15 PM
7/29/2011	12:15:24 PM	Helium valve closed
7/29/2011	12:15:24 PM	H2 valve closed
7/29/2011	12:15:24 PM	BCl3 valve closed
7/29/2011	12:15:24 PM	PH3 valve closed
7/29/2011	12:15:24 PM	SiCl4 pre valve closed
7/29/2011	12:15:24 PM	SiCl4 post valve closed
7/29/2011	12:15:24 PM	Bypass valve closed
7/29/2011	12:15:24 PM	Bubbler valve closed
7/29/2011	12:15:24 PM	Main Vac valve opened
7/29/2011	12:15:24 PM	Helium MFC set to  0.000000
7/29/2011	12:15:24 PM	H2 MFC set to  0.000000
7/29/2011	12:15:24 PM	BCl3 MFC set to  0.000000
7/29/2011	12:15:24 PM	PHl3 MFC set to  0.000000
7/29/2011	12:15:24 PM	SiCl4 MFC set to  0.000000
7/29/2011	12:15:24 PM	Bypass solenoid MFC set to  0.000000
7/29/2011	12:15:24 PM	Tube furnace set to 150
7/29/2011	12:15:54 PM	H2 valve closed
7/29/2011	12:15:54 PM	BCl3 valve closed
7/29/2011	12:15:54 PM	PH3 valve closed
7/29/2011	12:15:54 PM	SiCl4 pre valve closed
7/29/2011	12:15:54 PM	SiCl4 post valve closed
7/29/2011	12:15:54 PM	Bypass valve closed
7/29/2011	12:15:54 PM	Bubbler valve closed
7/29/2011	12:15:54 PM	Helium valve opened
7/29/2011	12:15:54 PM	Main Vac valve opened
7/29/2011	12:15:54 PM	Helium MFC set to  20.000000
7/29/2011	12:15:54 PM	H2 MFC set to  0.000000
7/29/2011	12:15:54 PM	BCl3 MFC set to  0.000000
7/29/2011	12:15:54 PM	PHl3 MFC set to  0.000000
7/29/2011	12:15:54 PM	SiCl4 MFC set to  0.000000
7/29/2011	12:15:54 PM	Bypass solenoid MFC set to  0.000000
7/29/2011	12:15:54 PM	Tube furnace set to 150
7/29/2011	12:16:24 PM	Helium valve closed
7/29/2011	12:16:24 PM	H2 valve closed
7/29/2011	12:16:24 PM	BCl3 valve closed
7/29/2011	12:16:24 PM	PH3 valve closed
7/29/2011	12:16:24 PM	SiCl4 pre valve closed
7/29/2011	12:16:24 PM	SiCl4 post valve closed
7/29/2011	12:16:24 PM	Bypass valve closed
7/29/2011	12:16:24 PM	Bubbler valve closed
7/29/2011	12:16:24 PM	Main Vac valve opened
7/29/2011	12:16:24 PM	Helium MFC set to  0.000000
7/29/2011	12:16:24 PM	H2 MFC set to  0.000000
7/29/2011	12:16:24 PM	BCl3 MFC set to  0.000000
7/29/2011	12:16:24 PM	PHl3 MFC set to  0.000000
7/29/2011	12:16:24 PM	SiCl4 MFC set to  0.000000
7/29/2011	12:16:24 PM	Bypass solenoid MFC set to  0.000000
7/29/2011	12:16:24 PM	Tube furnace set to 150
7/29/2011	12:16:54 PM	H2 valve closed
7/29/2011	12:16:54 PM	BCl3 valve closed
7/29/2011	12:16:54 PM	PH3 valve closed
7/29/2011	12:16:54 PM	SiCl4 pre valve closed
7/29/2011	12:16:54 PM	SiCl4 post valve closed
7/29/2011	12:16:54 PM	Bypass valve closed
7/29/2011	12:16:54 PM	Bubbler valve closed
7/29/2011	12:16:54 PM	Helium valve opened
7/29/2011	12:16:54 PM	Main Vac valve opened
7/29/2011	12:16:54 PM	Helium MFC set to  20.000000
7/29/2011	12:16:54 PM	H2 MFC set to  0.000000
7/29/2011	12:16:54 PM	BCl3 MFC set to  0.000000
7/29/2011	12:16:54 PM	PHl3 MFC set to  0.000000
7/29/2011	12:16:54 PM	SiCl4 MFC set to  0.000000
7/29/2011	12:16:54 PM	Bypass solenoid MFC set to  0.000000
7/29/2011	12:16:54 PM	Tube furnace set to 150
7/29/2011	12:17:24 PM	Helium valve closed
7/29/2011	12:17:24 PM	H2 valve closed
7/29/2011	12:17:24 PM	BCl3 valve closed
7/29/2011	12:17:24 PM	PH3 valve closed
7/29/2011	12:17:24 PM	SiCl4 pre valve closed
7/29/2011	12:17:24 PM	SiCl4 post valve closed
7/29/2011	12:17:24 PM	Bypass valve closed
7/29/2011	12:17:24 PM	Bubbler valve closed
7/29/2011	12:17:24 PM	Main Vac valve opened
7/29/2011	12:17:24 PM	Helium MFC set to  0.000000
7/29/2011	12:17:24 PM	H2 MFC set to  0.000000
7/29/2011	12:17:24 PM	BCl3 MFC set to  0.000000
7/29/2011	12:17:24 PM	PHl3 MFC set to  0.000000
7/29/2011	12:17:24 PM	SiCl4 MFC set to  0.000000
7/29/2011	12:17:24 PM	Bypass solenoid MFC set to  0.000000
7/29/2011	12:17:25 PM	Tube furnace set to 150
7/29/2011	12:17:55 PM	H2 valve closed
7/29/2011	12:17:55 PM	BCl3 valve closed
7/29/2011	12:17:55 PM	PH3 valve closed
7/29/2011	12:17:55 PM	SiCl4 pre valve closed
7/29/2011	12:17:55 PM	SiCl4 post valve closed
7/29/2011	12:17:55 PM	Bypass valve closed
7/29/2011	12:17:55 PM	Bubbler valve closed
7/29/2011	12:17:55 PM	Helium valve opened
7/29/2011	12:17:55 PM	Main Vac valve opened
7/29/2011	12:17:55 PM	Helium MFC set to  20.000000
7/29/2011	12:17:55 PM	H2 MFC set to  0.000000
7/29/2011	12:17:55 PM	BCl3 MFC set to  0.000000
7/29/2011	12:17:55 PM	PHl3 MFC set to  0.000000
7/29/2011	12:17:55 PM	SiCl4 MFC set to  0.000000
7/29/2011	12:17:55 PM	Bypass solenoid MFC set to  0.000000
7/29/2011	12:17:55 PM	Tube furnace set to 150
7/29/2011	12:18:25 PM	Helium valve closed
7/29/2011	12:18:25 PM	H2 valve closed
7/29/2011	12:18:25 PM	BCl3 valve closed
7/29/2011	12:18:25 PM	PH3 valve closed
7/29/2011	12:18:25 PM	SiCl4 pre valve closed
7/29/2011	12:18:25 PM	SiCl4 post valve closed
7/29/2011	12:18:25 PM	Bypass valve closed
7/29/2011	12:18:25 PM	Bubbler valve closed
7/29/2011	12:18:25 PM	Main Vac valve opened
7/29/2011	12:18:25 PM	Helium MFC set to  0.000000
7/29/2011	12:18:25 PM	H2 MFC set to  0.000000
7/29/2011	12:18:25 PM	BCl3 MFC set to  0.000000
7/29/2011	12:18:25 PM	PHl3 MFC set to  0.000000
7/29/2011	12:18:25 PM	SiCl4 MFC set to  0.000000
7/29/2011	12:18:25 PM	Bypass solenoid MFC set to  0.000000
7/29/2011	12:18:25 PM	Tube furnace set to 150
7/29/2011	12:18:55 PM	H2 valve closed
7/29/2011	12:18:55 PM	BCl3 valve closed
7/29/2011	12:18:55 PM	PH3 valve closed
7/29/2011	12:18:55 PM	SiCl4 pre valve closed
7/29/2011	12:18:55 PM	SiCl4 post valve closed
7/29/2011	12:18:55 PM	Bypass valve closed
7/29/2011	12:18:55 PM	Bubbler valve closed
7/29/2011	12:18:55 PM	Helium valve opened
7/29/2011	12:18:55 PM	Main Vac valve opened
7/29/2011	12:18:55 PM	Helium MFC set to  20.000000
7/29/2011	12:18:55 PM	H2 MFC set to  0.000000
7/29/2011	12:18:55 PM	BCl3 MFC set to  0.000000
7/29/2011	12:18:55 PM	PHl3 MFC set to  0.000000
7/29/2011	12:18:55 PM	SiCl4 MFC set to  0.000000
7/29/2011	12:18:55 PM	Bypass solenoid MFC set to  0.000000
7/29/2011	12:18:55 PM	Tube furnace set to 150
7/29/2011	12:19:25 PM	Helium valve closed
7/29/2011	12:19:25 PM	H2 valve closed
7/29/2011	12:19:25 PM	BCl3 valve closed
7/29/2011	12:19:25 PM	PH3 valve closed
7/29/2011	12:19:25 PM	SiCl4 pre valve closed
7/29/2011	12:19:25 PM	SiCl4 post valve closed
7/29/2011	12:19:25 PM	Bypass valve closed
7/29/2011	12:19:25 PM	Bubbler valve closed
7/29/2011	12:19:25 PM	Main Vac valve opened
7/29/2011	12:19:25 PM	Helium MFC set to  0.000000
7/29/2011	12:19:25 PM	H2 MFC set to  0.000000
7/29/2011	12:19:25 PM	BCl3 MFC set to  0.000000
7/29/2011	12:19:25 PM	PHl3 MFC set to  0.000000
7/29/2011	12:19:25 PM	SiCl4 MFC set to  0.000000
7/29/2011	12:19:25 PM	Bypass solenoid MFC set to  0.000000
7/29/2011	12:19:25 PM	Tube furnace set to 150
7/29/2011	12:19:55 PM	H2 valve closed
7/29/2011	12:19:55 PM	BCl3 valve closed
7/29/2011	12:19:55 PM	PH3 valve closed
7/29/2011	12:19:55 PM	SiCl4 pre valve closed
7/29/2011	12:19:55 PM	SiCl4 post valve closed
7/29/2011	12:19:56 PM	Bypass valve closed
7/29/2011	12:19:56 PM	Bubbler valve closed
7/29/2011	12:19:56 PM	Helium valve opened
7/29/2011	12:19:56 PM	Main Vac valve opened
7/29/2011	12:19:56 PM	Helium MFC set to  20.000000
7/29/2011	12:19:56 PM	H2 MFC set to  0.000000
7/29/2011	12:19:56 PM	BCl3 MFC set to  0.000000
7/29/2011	12:19:56 PM	PHl3 MFC set to  0.000000
7/29/2011	12:19:56 PM	SiCl4 MFC set to  0.000000
7/29/2011	12:19:56 PM	Bypass solenoid MFC set to  0.000000
7/29/2011	12:19:56 PM	Tube furnace set to 150
7/29/2011	12:20:26 PM	Helium valve closed
7/29/2011	12:20:26 PM	H2 valve closed
7/29/2011	12:20:26 PM	BCl3 valve closed
7/29/2011	12:20:26 PM	PH3 valve closed
7/29/2011	12:20:26 PM	SiCl4 pre valve closed
7/29/2011	12:20:26 PM	SiCl4 post valve closed
7/29/2011	12:20:26 PM	Bypass valve closed
7/29/2011	12:20:26 PM	Bubbler valve closed
7/29/2011	12:20:26 PM	Main Vac valve opened
7/29/2011	12:20:26 PM	Helium MFC set to  0.000000
7/29/2011	12:20:26 PM	H2 MFC set to  0.000000
7/29/2011	12:20:26 PM	BCl3 MFC set to  0.000000
7/29/2011	12:20:26 PM	PHl3 MFC set to  0.000000
7/29/2011	12:20:26 PM	SiCl4 MFC set to  0.000000
7/29/2011	12:20:26 PM	Bypass solenoid MFC set to  0.000000
7/29/2011	12:20:26 PM	Tube furnace set to 150
7/29/2011	12:20:56 PM	H2 valve closed
7/29/2011	12:20:56 PM	BCl3 valve closed
7/29/2011	12:20:56 PM	PH3 valve closed
7/29/2011	12:20:56 PM	SiCl4 pre valve closed
7/29/2011	12:20:56 PM	SiCl4 post valve closed
7/29/2011	12:20:56 PM	Bypass valve closed
7/29/2011	12:20:56 PM	Bubbler valve closed
7/29/2011	12:20:56 PM	Helium valve opened
7/29/2011	12:20:56 PM	Main Vac valve opened
7/29/2011	12:20:56 PM	Helium MFC set to  20.000000
7/29/2011	12:20:56 PM	H2 MFC set to  0.000000
7/29/2011	12:20:56 PM	BCl3 MFC set to  0.000000
7/29/2011	12:20:56 PM	PHl3 MFC set to  0.000000
7/29/2011	12:20:56 PM	SiCl4 MFC set to  0.000000
7/29/2011	12:20:56 PM	Bypass solenoid MFC set to  0.000000
7/29/2011	12:20:56 PM	Tube furnace set to 150
7/29/2011	12:21:26 PM	Helium valve closed
7/29/2011	12:21:26 PM	H2 valve closed
7/29/2011	12:21:26 PM	BCl3 valve closed
7/29/2011	12:21:26 PM	PH3 valve closed
7/29/2011	12:21:26 PM	SiCl4 pre valve closed
7/29/2011	12:21:26 PM	SiCl4 post valve closed
7/29/2011	12:21:26 PM	Bypass valve closed
7/29/2011	12:21:26 PM	Bubbler valve closed
7/29/2011	12:21:26 PM	Main Vac valve opened
7/29/2011	12:21:26 PM	Helium MFC set to  0.000000
7/29/2011	12:21:26 PM	H2 MFC set to  0.000000
7/29/2011	12:21:26 PM	BCl3 MFC set to  0.000000
7/29/2011	12:21:26 PM	PHl3 MFC set to  0.000000
7/29/2011	12:21:26 PM	SiCl4 MFC set to  0.000000
7/29/2011	12:21:26 PM	Bypass solenoid MFC set to  0.000000
7/29/2011	12:21:26 PM	Tube furnace set to 150
7/29/2011	12:21:56 PM	H2 valve closed
7/29/2011	12:21:56 PM	BCl3 valve closed
7/29/2011	12:21:56 PM	PH3 valve closed
7/29/2011	12:21:56 PM	SiCl4 pre valve closed
7/29/2011	12:21:56 PM	SiCl4 post valve closed
7/29/2011	12:21:56 PM	Bypass valve closed
7/29/2011	12:21:56 PM	Bubbler valve closed
7/29/2011	12:21:56 PM	Helium valve opened
7/29/2011	12:21:56 PM	Main Vac valve opened
7/29/2011	12:21:56 PM	Helium MFC set to  20.000000
7/29/2011	12:21:56 PM	H2 MFC set to  0.000000
7/29/2011	12:21:56 PM	BCl3 MFC set to  0.000000
7/29/2011	12:21:56 PM	PHl3 MFC set to  0.000000
7/29/2011	12:21:56 PM	SiCl4 MFC set to  0.000000
7/29/2011	12:21:56 PM	Bypass solenoid MFC set to  0.000000
7/29/2011	12:21:57 PM	Tube furnace set to 150
7/29/2011	12:22:27 PM	Helium valve closed
7/29/2011	12:22:27 PM	H2 valve closed
7/29/2011	12:22:27 PM	BCl3 valve closed
7/29/2011	12:22:27 PM	PH3 valve closed
7/29/2011	12:22:27 PM	SiCl4 pre valve closed
7/29/2011	12:22:27 PM	SiCl4 post valve closed
7/29/2011	12:22:27 PM	Bypass valve closed
7/29/2011	12:22:27 PM	Bubbler valve closed
7/29/2011	12:22:27 PM	Main Vac valve opened
7/29/2011	12:22:27 PM	Helium MFC set to  0.000000
7/29/2011	12:22:27 PM	H2 MFC set to  0.000000
7/29/2011	12:22:27 PM	BCl3 MFC set to  0.000000
7/29/2011	12:22:27 PM	PHl3 MFC set to  0.000000
7/29/2011	12:22:27 PM	SiCl4 MFC set to  0.000000
7/29/2011	12:22:27 PM	Bypass solenoid MFC set to  0.000000
7/29/2011	12:22:27 PM	Tube furnace set to 150
7/29/2011	12:22:57 PM	H2 valve closed
7/29/2011	12:22:57 PM	BCl3 valve closed
7/29/2011	12:22:57 PM	PH3 valve closed
7/29/2011	12:22:57 PM	SiCl4 pre valve closed
7/29/2011	12:22:57 PM	SiCl4 post valve closed
7/29/2011	12:22:57 PM	Bypass valve closed
7/29/2011	12:22:57 PM	Bubbler valve closed
7/29/2011	12:22:57 PM	Helium valve opened
7/29/2011	12:22:57 PM	Main Vac valve opened
7/29/2011	12:22:57 PM	Helium MFC set to  20.000000
7/29/2011	12:22:57 PM	H2 MFC set to  0.000000
7/29/2011	12:22:57 PM	BCl3 MFC set to  0.000000
7/29/2011	12:22:57 PM	PHl3 MFC set to  0.000000
7/29/2011	12:22:57 PM	SiCl4 MFC set to  0.000000
7/29/2011	12:22:57 PM	Bypass solenoid MFC set to  0.000000
7/29/2011	12:22:57 PM	Tube furnace set to 150
7/29/2011	12:23:27 PM	Helium valve closed
7/29/2011	12:23:27 PM	H2 valve closed
7/29/2011	12:23:27 PM	BCl3 valve closed
7/29/2011	12:23:27 PM	PH3 valve closed
7/29/2011	12:23:27 PM	SiCl4 pre valve closed
7/29/2011	12:23:27 PM	SiCl4 post valve closed
7/29/2011	12:23:27 PM	Bypass valve closed
7/29/2011	12:23:27 PM	Bubbler valve closed
7/29/2011	12:23:27 PM	Main Vac valve opened
7/29/2011	12:23:27 PM	Helium MFC set to  0.000000
7/29/2011	12:23:27 PM	H2 MFC set to  0.000000
7/29/2011	12:23:27 PM	BCl3 MFC set to  0.000000
7/29/2011	12:23:27 PM	PHl3 MFC set to  0.000000
7/29/2011	12:23:27 PM	SiCl4 MFC set to  0.000000
7/29/2011	12:23:27 PM	Bypass solenoid MFC set to  0.000000
7/29/2011	12:23:27 PM	Tube furnace set to 150
7/29/2011	12:23:57 PM	H2 valve closed
7/29/2011	12:23:57 PM	BCl3 valve closed
7/29/2011	12:23:57 PM	PH3 valve closed
7/29/2011	12:23:57 PM	SiCl4 pre valve closed
7/29/2011	12:23:57 PM	SiCl4 post valve closed
7/29/2011	12:23:57 PM	Bypass valve closed
7/29/2011	12:23:57 PM	Bubbler valve closed
7/29/2011	12:23:57 PM	Helium valve opened
7/29/2011	12:23:57 PM	Main Vac valve opened
7/29/2011	12:23:57 PM	Helium MFC set to  20.000000
7/29/2011	12:23:57 PM	H2 MFC set to  0.000000
7/29/2011	12:23:57 PM	BCl3 MFC set to  0.000000
7/29/2011	12:23:57 PM	PHl3 MFC set to  0.000000
7/29/2011	12:23:57 PM	SiCl4 MFC set to  0.000000
7/29/2011	12:23:57 PM	Bypass solenoid MFC set to  0.000000
7/29/2011	12:23:57 PM	Tube furnace set to 150
7/29/2011	12:24:27 PM	Helium valve closed
7/29/2011	12:24:27 PM	H2 valve closed
7/29/2011	12:24:27 PM	BCl3 valve closed
7/29/2011	12:24:27 PM	PH3 valve closed
7/29/2011	12:24:27 PM	SiCl4 pre valve closed
7/29/2011	12:24:27 PM	SiCl4 post valve closed
7/29/2011	12:24:27 PM	Bypass valve closed
7/29/2011	12:24:27 PM	Bubbler valve closed
7/29/2011	12:24:27 PM	Main Vac valve opened
7/29/2011	12:24:27 PM	Helium MFC set to  0.000000
7/29/2011	12:24:27 PM	H2 MFC set to  0.000000
7/29/2011	12:24:27 PM	BCl3 MFC set to  0.000000
7/29/2011	12:24:27 PM	PHl3 MFC set to  0.000000
7/29/2011	12:24:27 PM	SiCl4 MFC set to  0.000000
7/29/2011	12:24:27 PM	Bypass solenoid MFC set to  0.000000
7/29/2011	12:24:28 PM	Tube furnace set to 150
7/29/2011	12:24:58 PM	H2 valve closed
7/29/2011	12:24:58 PM	BCl3 valve closed
7/29/2011	12:24:58 PM	PH3 valve closed
7/29/2011	12:24:58 PM	SiCl4 pre valve closed
7/29/2011	12:24:58 PM	SiCl4 post valve closed
7/29/2011	12:24:58 PM	Bypass valve closed
7/29/2011	12:24:58 PM	Bubbler valve closed
7/29/2011	12:24:58 PM	Helium valve opened
7/29/2011	12:24:58 PM	Main Vac valve opened
7/29/2011	12:24:58 PM	Helium MFC set to  20.000000
7/29/2011	12:24:58 PM	H2 MFC set to  0.000000
7/29/2011	12:24:58 PM	BCl3 MFC set to  0.000000
7/29/2011	12:24:58 PM	PHl3 MFC set to  0.000000
7/29/2011	12:24:58 PM	SiCl4 MFC set to  0.000000
7/29/2011	12:24:58 PM	Bypass solenoid MFC set to  0.000000
7/29/2011	12:24:58 PM	Tube furnace set to 150
7/29/2011	12:25:28 PM	Helium valve closed
7/29/2011	12:25:28 PM	H2 valve closed
7/29/2011	12:25:28 PM	BCl3 valve closed
7/29/2011	12:25:28 PM	PH3 valve closed
7/29/2011	12:25:28 PM	SiCl4 pre valve closed
7/29/2011	12:25:28 PM	SiCl4 post valve closed
7/29/2011	12:25:28 PM	Bypass valve closed
7/29/2011	12:25:28 PM	Bubbler valve closed
7/29/2011	12:25:28 PM	Main Vac valve opened
7/29/2011	12:25:28 PM	Helium MFC set to  0.000000
7/29/2011	12:25:28 PM	H2 MFC set to  0.000000
7/29/2011	12:25:28 PM	BCl3 MFC set to  0.000000
7/29/2011	12:25:28 PM	PHl3 MFC set to  0.000000
7/29/2011	12:25:28 PM	SiCl4 MFC set to  0.000000
7/29/2011	12:25:28 PM	Bypass solenoid MFC set to  0.000000
7/29/2011	12:25:28 PM	Tube furnace set to 150
7/29/2011	12:25:29 PM	Run finished at 12:25 PM
7/29/2011	12:37:36 PM	Helium MFC set to  20.000000
7/29/2011	12:37:38 PM	Helium valve opened
7/29/2011	12:50:48 PM	Helium valve closed
7/29/2011	12:50:50 PM	Helium MFC set to  0.000000
7/29/2011	1:04:05 PM	Recipe started at 1:04 PM
7/29/2011	1:04:05 PM	Helium valve closed
7/29/2011	1:04:05 PM	H2 valve closed
7/29/2011	1:04:05 PM	BCl3 valve closed
7/29/2011	1:04:05 PM	PH3 valve closed
7/29/2011	1:04:05 PM	SiCl4 pre valve closed
7/29/2011	1:04:05 PM	SiCl4 post valve closed
7/29/2011	1:04:05 PM	Main Vac valve closed
7/29/2011	1:04:05 PM	Bypass valve closed
7/29/2011	1:04:05 PM	Bubbler valve closed
7/29/2011	1:04:05 PM	Helium MFC set to  0.000000
7/29/2011	1:04:05 PM	H2 MFC set to  0.000000
7/29/2011	1:04:05 PM	BCl3 MFC set to  0.000000
7/29/2011	1:04:05 PM	PHl3 MFC set to  0.000000
7/29/2011	1:04:05 PM	SiCl4 MFC set to  0.000000
7/29/2011	1:04:05 PM	Bypass solenoid MFC set to  0.000000
7/29/2011	1:04:05 PM	Tube furnace set to 0
7/29/2011	1:04:08 PM	Helium valve closed
7/29/2011	1:04:08 PM	BCl3 valve closed
7/29/2011	1:04:08 PM	PH3 valve closed
7/29/2011	1:04:08 PM	SiCl4 pre valve closed
7/29/2011	1:04:08 PM	SiCl4 post valve closed
7/29/2011	1:04:08 PM	Main Vac valve closed
7/29/2011	1:04:08 PM	Bypass valve closed
7/29/2011	1:04:08 PM	Bubbler valve closed
7/29/2011	1:04:08 PM	H2 valve opened
7/29/2011	1:04:08 PM	Helium MFC set to  0.000000
7/29/2011	1:04:08 PM	H2 MFC set to  500.000000
7/29/2011	1:04:08 PM	BCl3 MFC set to  0.000000
7/29/2011	1:04:08 PM	PHl3 MFC set to  0.000000
7/29/2011	1:04:08 PM	SiCl4 MFC set to  0.000000
7/29/2011	1:04:08 PM	Bypass solenoid MFC set to  0.000000
7/29/2011	1:04:09 PM	Tube furnace set to 0
7/29/2011	1:05:13 PM	Helium valve closed
7/29/2011	1:05:13 PM	BCl3 valve closed
7/29/2011	1:05:13 PM	PH3 valve closed
7/29/2011	1:05:13 PM	SiCl4 pre valve closed
7/29/2011	1:05:13 PM	SiCl4 post valve closed
7/29/2011	1:05:13 PM	Main Vac valve closed
7/29/2011	1:05:13 PM	Bypass valve closed
7/29/2011	1:05:13 PM	H2 valve opened
7/29/2011	1:05:13 PM	Bubbler valve opened
7/29/2011	1:05:13 PM	Helium MFC set to  0.000000
7/29/2011	1:05:13 PM	H2 MFC set to  500.000000
7/29/2011	1:05:13 PM	BCl3 MFC set to  0.000000
7/29/2011	1:05:13 PM	PHl3 MFC set to  0.000000
7/29/2011	1:05:13 PM	SiCl4 MFC set to  0.000000
7/29/2011	1:05:13 PM	Bypass solenoid MFC set to  0.000000
7/29/2011	1:05:13 PM	Tube furnace set to 0
7/29/2011	1:05:14 PM	Helium valve closed
7/29/2011	1:05:14 PM	BCl3 valve closed
7/29/2011	1:05:14 PM	PH3 valve closed
7/29/2011	1:05:14 PM	SiCl4 pre valve closed
7/29/2011	1:05:14 PM	SiCl4 post valve closed
7/29/2011	1:05:14 PM	Main Vac valve closed
7/29/2011	1:05:14 PM	Bypass valve closed
7/29/2011	1:05:14 PM	H2 valve opened
7/29/2011	1:05:14 PM	Bubbler valve opened
7/29/2011	1:05:14 PM	Helium MFC set to  0.000000
7/29/2011	1:05:14 PM	H2 MFC set to  500.000000
7/29/2011	1:05:14 PM	BCl3 MFC set to  0.000000
7/29/2011	1:05:14 PM	PHl3 MFC set to  0.000000
7/29/2011	1:05:14 PM	SiCl4 MFC set to  0.000000
7/29/2011	1:05:14 PM	Bypass solenoid MFC set to  0.000000
7/29/2011	1:05:14 PM	Tube furnace set to 1000
7/29/2011	1:25:14 PM	Helium valve closed
7/29/2011	1:25:14 PM	PH3 valve closed
7/29/2011	1:25:14 PM	Main Vac valve closed
7/29/2011	1:25:14 PM	Bypass valve closed
7/29/2011	1:25:14 PM	H2 valve opened
7/29/2011	1:25:14 PM	BCl3 valve opened
7/29/2011	1:25:14 PM	SiCl4 pre valve opened
7/29/2011	1:25:14 PM	SiCl4 post valve opened
7/29/2011	1:25:14 PM	Bubbler valve opened
7/29/2011	1:25:14 PM	Helium MFC set to  0.000000
7/29/2011	1:25:14 PM	H2 MFC set to  500.000000
7/29/2011	1:25:14 PM	BCl3 MFC set to  2.000000
7/29/2011	1:25:14 PM	PHl3 MFC set to  0.000000
7/29/2011	1:25:14 PM	SiCl4 MFC set to  50.000000
7/29/2011	1:25:14 PM	Bypass solenoid MFC set to  0.000000
7/29/2011	1:25:14 PM	Tube furnace set to 1000
7/29/2011	1:45:14 PM	Helium valve closed
7/29/2011	1:45:14 PM	BCl3 valve closed
7/29/2011	1:45:14 PM	PH3 valve closed
7/29/2011	1:45:14 PM	SiCl4 pre valve closed
7/29/2011	1:45:14 PM	SiCl4 post valve closed
7/29/2011	1:45:14 PM	Main Vac valve closed
7/29/2011	1:45:14 PM	Bypass valve closed
7/29/2011	1:45:14 PM	H2 valve opened
7/29/2011	1:45:14 PM	Bubbler valve opened
7/29/2011	1:45:14 PM	Helium MFC set to  0.000000
7/29/2011	1:45:14 PM	H2 MFC set to  500.000000
7/29/2011	1:45:14 PM	BCl3 MFC set to  0.000000
7/29/2011	1:45:14 PM	PHl3 MFC set to  0.000000
7/29/2011	1:45:14 PM	SiCl4 MFC set to  0.000000
7/29/2011	1:45:14 PM	Bypass solenoid MFC set to  0.000000
7/29/2011	1:45:14 PM	Tube furnace set to 750
7/29/2011	1:50:14 PM	H2 valve closed
7/29/2011	1:50:14 PM	BCl3 valve closed
7/29/2011	1:50:14 PM	PH3 valve closed
7/29/2011	1:50:14 PM	SiCl4 pre valve closed
7/29/2011	1:50:14 PM	SiCl4 post valve closed
7/29/2011	1:50:14 PM	Main Vac valve closed
7/29/2011	1:50:14 PM	Bypass valve closed
7/29/2011	1:50:14 PM	Helium valve opened
7/29/2011	1:50:14 PM	Bubbler valve opened
7/29/2011	1:50:14 PM	Helium MFC set to  500.000000
7/29/2011	1:50:14 PM	H2 MFC set to  0.000000
7/29/2011	1:50:14 PM	BCl3 MFC set to  0.000000
7/29/2011	1:50:14 PM	PHl3 MFC set to  0.000000
7/29/2011	1:50:14 PM	SiCl4 MFC set to  0.000000
7/29/2011	1:50:14 PM	Bypass solenoid MFC set to  0.000000
7/29/2011	1:50:14 PM	Tube furnace set to 0
7/29/2011	1:58:32 PM	Run aborted at 1:58 PM
7/29/2011	1:58:32 PM	Helium valve closed
7/29/2011	1:58:32 PM	H2 valve closed
7/29/2011	1:58:32 PM	BCl3 valve closed
7/29/2011	1:58:32 PM	PH3 valve closed
7/29/2011	1:58:32 PM	SiCl4 pre valve closed
7/29/2011	1:58:32 PM	SiCl4 post valve closed
7/29/2011	1:58:32 PM	Bypass valve closed
7/29/2011	1:58:32 PM	Main Vac valve closed
7/29/2011	1:58:32 PM	Bubbler valve closed
7/29/2011	1:58:32 PM	Helium MFC set to  0.000000
7/29/2011	1:58:32 PM	H2 MFC set to  0.000000
7/29/2011	1:58:32 PM	BCl3 MFC set to  0.000000
7/29/2011	1:58:32 PM	PHl3 MFC set to  0.000000
7/29/2011	1:58:32 PM	SiCl4 MFC set to  0.000000
7/29/2011	1:58:32 PM	Tube furnace set to 0
7/29/2011	2:04:15 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/29/2011	2:04:16 PM	Recipe started at 2:04 PM
7/29/2011	2:04:16 PM	Helium valve closed
7/29/2011	2:04:16 PM	H2 valve closed
7/29/2011	2:04:16 PM	BCl3 valve closed
7/29/2011	2:04:16 PM	PH3 valve closed
7/29/2011	2:04:16 PM	SiCl4 pre valve closed
7/29/2011	2:04:16 PM	SiCl4 post valve closed
7/29/2011	2:04:16 PM	Main Vac valve closed
7/29/2011	2:04:16 PM	Bubbler valve closed
7/29/2011	2:04:16 PM	Bypass valve opened
7/29/2011	2:04:16 PM	Helium MFC set to  0.000000
7/29/2011	2:04:16 PM	H2 MFC set to  0.000000
7/29/2011	2:04:16 PM	BCl3 MFC set to  0.000000
7/29/2011	2:04:16 PM	PHl3 MFC set to  0.000000
7/29/2011	2:04:16 PM	SiCl4 MFC set to  0.000000
7/29/2011	2:04:16 PM	Bypass solenoid MFC set to  0.000000
7/29/2011	2:04:17 PM	Tube furnace set to 0
7/29/2011	2:05:21 PM	Helium valve closed
7/29/2011	2:05:21 PM	H2 valve closed
7/29/2011	2:05:21 PM	BCl3 valve closed
7/29/2011	2:05:21 PM	PH3 valve closed
7/29/2011	2:05:21 PM	SiCl4 pre valve closed
7/29/2011	2:05:21 PM	SiCl4 post valve closed
7/29/2011	2:05:21 PM	Main Vac valve closed
7/29/2011	2:05:21 PM	Bubbler valve closed
7/29/2011	2:05:21 PM	Bypass valve opened
7/29/2011	2:05:21 PM	Helium MFC set to  0.000000
7/29/2011	2:05:21 PM	H2 MFC set to  0.000000
7/29/2011	2:05:21 PM	BCl3 MFC set to  0.000000
7/29/2011	2:05:21 PM	PHl3 MFC set to  0.000000
7/29/2011	2:05:21 PM	SiCl4 MFC set to  0.000000
7/29/2011	2:05:21 PM	Bypass solenoid MFC set to  0.000000
7/29/2011	2:05:21 PM	Tube furnace set to 0
7/29/2011	2:06:21 PM	Helium valve closed
7/29/2011	2:06:21 PM	H2 valve closed
7/29/2011	2:06:21 PM	BCl3 valve closed
7/29/2011	2:06:21 PM	PH3 valve closed
7/29/2011	2:06:21 PM	SiCl4 pre valve closed
7/29/2011	2:06:21 PM	SiCl4 post valve closed
7/29/2011	2:06:21 PM	Bypass valve closed
7/29/2011	2:06:21 PM	Bubbler valve closed
7/29/2011	2:06:21 PM	Main Vac valve opened
7/29/2011	2:06:21 PM	Helium MFC set to  0.000000
7/29/2011	2:06:21 PM	H2 MFC set to  0.000000
7/29/2011	2:06:21 PM	BCl3 MFC set to  0.000000
7/29/2011	2:06:21 PM	PHl3 MFC set to  0.000000
7/29/2011	2:06:21 PM	SiCl4 MFC set to  0.000000
7/29/2011	2:06:21 PM	Bypass solenoid MFC set to  0.000000
7/29/2011	2:06:21 PM	Tube furnace set to 0
7/29/2011	2:06:22 PM	Run finished at 2:06 PM
7/29/2011	2:06:22 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/29/2011	2:16:11 PM	Helium MFC set to  2.000000
7/29/2011	2:16:15 PM	Helium MFC set to  20.000000
7/29/2011	2:16:21 PM	Helium valve opened
7/29/2011	2:25:50 PM	Helium valve closed
7/29/2011	2:26:57 PM	Helium MFC set to  20.000000
7/29/2011	2:26:57 PM	Helium valve opened
7/29/2011	2:31:44 PM	Helium valve closed
7/29/2011	2:31:47 PM	Helium MFC set to  0.000000
7/29/2011	2:32:28 PM	Recipe started at 2:32 PM
7/29/2011	2:32:28 PM	Helium valve closed
7/29/2011	2:32:28 PM	H2 valve closed
7/29/2011	2:32:28 PM	BCl3 valve closed
7/29/2011	2:32:28 PM	PH3 valve closed
7/29/2011	2:32:28 PM	SiCl4 pre valve closed
7/29/2011	2:32:28 PM	SiCl4 post valve closed
7/29/2011	2:32:28 PM	Bypass valve closed
7/29/2011	2:32:28 PM	Bubbler valve closed
7/29/2011	2:32:28 PM	Main Vac valve opened
7/29/2011	2:32:28 PM	Helium MFC set to  0.000000
7/29/2011	2:32:28 PM	H2 MFC set to  0.000000
7/29/2011	2:32:28 PM	BCl3 MFC set to  0.000000
7/29/2011	2:32:28 PM	PHl3 MFC set to  0.000000
7/29/2011	2:32:28 PM	SiCl4 MFC set to  0.000000
7/29/2011	2:32:28 PM	Bypass solenoid MFC set to  0.000000
7/29/2011	2:32:28 PM	Tube furnace set to 150
7/29/2011	2:32:58 PM	H2 valve closed
7/29/2011	2:32:58 PM	BCl3 valve closed
7/29/2011	2:32:58 PM	PH3 valve closed
7/29/2011	2:32:58 PM	SiCl4 pre valve closed
7/29/2011	2:32:58 PM	SiCl4 post valve closed
7/29/2011	2:32:58 PM	Bypass valve closed
7/29/2011	2:32:58 PM	Bubbler valve closed
7/29/2011	2:32:58 PM	Helium valve opened
7/29/2011	2:32:58 PM	Main Vac valve opened
7/29/2011	2:32:58 PM	Helium MFC set to  20.000000
7/29/2011	2:32:58 PM	H2 MFC set to  0.000000
7/29/2011	2:32:58 PM	BCl3 MFC set to  0.000000
7/29/2011	2:32:58 PM	PHl3 MFC set to  0.000000
7/29/2011	2:32:58 PM	SiCl4 MFC set to  0.000000
7/29/2011	2:32:58 PM	Bypass solenoid MFC set to  0.000000
7/29/2011	2:32:59 PM	Tube furnace set to 150
7/29/2011	2:33:29 PM	Helium valve closed
7/29/2011	2:33:29 PM	H2 valve closed
7/29/2011	2:33:29 PM	BCl3 valve closed
7/29/2011	2:33:29 PM	PH3 valve closed
7/29/2011	2:33:29 PM	SiCl4 pre valve closed
7/29/2011	2:33:29 PM	SiCl4 post valve closed
7/29/2011	2:33:29 PM	Bypass valve closed
7/29/2011	2:33:29 PM	Bubbler valve closed
7/29/2011	2:33:29 PM	Main Vac valve opened
7/29/2011	2:33:29 PM	Helium MFC set to  0.000000
7/29/2011	2:33:29 PM	H2 MFC set to  0.000000
7/29/2011	2:33:29 PM	BCl3 MFC set to  0.000000
7/29/2011	2:33:29 PM	PHl3 MFC set to  0.000000
7/29/2011	2:33:29 PM	SiCl4 MFC set to  0.000000
7/29/2011	2:33:29 PM	Bypass solenoid MFC set to  0.000000
7/29/2011	2:33:29 PM	Tube furnace set to 150
7/29/2011	2:33:59 PM	H2 valve closed
7/29/2011	2:33:59 PM	BCl3 valve closed
7/29/2011	2:33:59 PM	PH3 valve closed
7/29/2011	2:33:59 PM	SiCl4 pre valve closed
7/29/2011	2:33:59 PM	SiCl4 post valve closed
7/29/2011	2:33:59 PM	Bypass valve closed
7/29/2011	2:33:59 PM	Bubbler valve closed
7/29/2011	2:33:59 PM	Helium valve opened
7/29/2011	2:33:59 PM	Main Vac valve opened
7/29/2011	2:33:59 PM	Helium MFC set to  20.000000
7/29/2011	2:33:59 PM	H2 MFC set to  0.000000
7/29/2011	2:33:59 PM	BCl3 MFC set to  0.000000
7/29/2011	2:33:59 PM	PHl3 MFC set to  0.000000
7/29/2011	2:33:59 PM	SiCl4 MFC set to  0.000000
7/29/2011	2:33:59 PM	Bypass solenoid MFC set to  0.000000
7/29/2011	2:33:59 PM	Tube furnace set to 150
7/29/2011	2:34:29 PM	Helium valve closed
7/29/2011	2:34:29 PM	H2 valve closed
7/29/2011	2:34:29 PM	BCl3 valve closed
7/29/2011	2:34:29 PM	PH3 valve closed
7/29/2011	2:34:29 PM	SiCl4 pre valve closed
7/29/2011	2:34:29 PM	SiCl4 post valve closed
7/29/2011	2:34:29 PM	Bypass valve closed
7/29/2011	2:34:29 PM	Bubbler valve closed
7/29/2011	2:34:29 PM	Main Vac valve opened
7/29/2011	2:34:29 PM	Helium MFC set to  0.000000
7/29/2011	2:34:29 PM	H2 MFC set to  0.000000
7/29/2011	2:34:29 PM	BCl3 MFC set to  0.000000
7/29/2011	2:34:29 PM	PHl3 MFC set to  0.000000
7/29/2011	2:34:29 PM	SiCl4 MFC set to  0.000000
7/29/2011	2:34:29 PM	Bypass solenoid MFC set to  0.000000
7/29/2011	2:34:29 PM	Tube furnace set to 150
7/29/2011	2:34:59 PM	H2 valve closed
7/29/2011	2:34:59 PM	BCl3 valve closed
7/29/2011	2:34:59 PM	PH3 valve closed
7/29/2011	2:34:59 PM	SiCl4 pre valve closed
7/29/2011	2:34:59 PM	SiCl4 post valve closed
7/29/2011	2:34:59 PM	Bypass valve closed
7/29/2011	2:34:59 PM	Bubbler valve closed
7/29/2011	2:34:59 PM	Helium valve opened
7/29/2011	2:34:59 PM	Main Vac valve opened
7/29/2011	2:34:59 PM	Helium MFC set to  20.000000
7/29/2011	2:34:59 PM	H2 MFC set to  0.000000
7/29/2011	2:34:59 PM	BCl3 MFC set to  0.000000
7/29/2011	2:34:59 PM	PHl3 MFC set to  0.000000
7/29/2011	2:34:59 PM	SiCl4 MFC set to  0.000000
7/29/2011	2:34:59 PM	Bypass solenoid MFC set to  0.000000
7/29/2011	2:34:59 PM	Tube furnace set to 150
7/29/2011	2:35:29 PM	Helium valve closed
7/29/2011	2:35:29 PM	H2 valve closed
7/29/2011	2:35:29 PM	BCl3 valve closed
7/29/2011	2:35:29 PM	PH3 valve closed
7/29/2011	2:35:29 PM	SiCl4 pre valve closed
7/29/2011	2:35:29 PM	SiCl4 post valve closed
7/29/2011	2:35:29 PM	Bypass valve closed
7/29/2011	2:35:29 PM	Bubbler valve closed
7/29/2011	2:35:29 PM	Main Vac valve opened
7/29/2011	2:35:29 PM	Helium MFC set to  0.000000
7/29/2011	2:35:29 PM	H2 MFC set to  0.000000
7/29/2011	2:35:29 PM	BCl3 MFC set to  0.000000
7/29/2011	2:35:29 PM	PHl3 MFC set to  0.000000
7/29/2011	2:35:29 PM	SiCl4 MFC set to  0.000000
7/29/2011	2:35:29 PM	Bypass solenoid MFC set to  0.000000
7/29/2011	2:35:30 PM	Tube furnace set to 150
7/29/2011	2:36:00 PM	H2 valve closed
7/29/2011	2:36:00 PM	BCl3 valve closed
7/29/2011	2:36:00 PM	PH3 valve closed
7/29/2011	2:36:00 PM	SiCl4 pre valve closed
7/29/2011	2:36:00 PM	SiCl4 post valve closed
7/29/2011	2:36:00 PM	Bypass valve closed
7/29/2011	2:36:00 PM	Bubbler valve closed
7/29/2011	2:36:00 PM	Helium valve opened
7/29/2011	2:36:00 PM	Main Vac valve opened
7/29/2011	2:36:00 PM	Helium MFC set to  20.000000
7/29/2011	2:36:00 PM	H2 MFC set to  0.000000
7/29/2011	2:36:00 PM	BCl3 MFC set to  0.000000
7/29/2011	2:36:00 PM	PHl3 MFC set to  0.000000
7/29/2011	2:36:00 PM	SiCl4 MFC set to  0.000000
7/29/2011	2:36:00 PM	Bypass solenoid MFC set to  0.000000
7/29/2011	2:36:00 PM	Tube furnace set to 150
7/29/2011	2:36:30 PM	Helium valve closed
7/29/2011	2:36:30 PM	H2 valve closed
7/29/2011	2:36:30 PM	BCl3 valve closed
7/29/2011	2:36:30 PM	PH3 valve closed
7/29/2011	2:36:30 PM	SiCl4 pre valve closed
7/29/2011	2:36:30 PM	SiCl4 post valve closed
7/29/2011	2:36:30 PM	Bypass valve closed
7/29/2011	2:36:30 PM	Bubbler valve closed
7/29/2011	2:36:30 PM	Main Vac valve opened
7/29/2011	2:36:30 PM	Helium MFC set to  0.000000
7/29/2011	2:36:30 PM	H2 MFC set to  0.000000
7/29/2011	2:36:30 PM	BCl3 MFC set to  0.000000
7/29/2011	2:36:30 PM	PHl3 MFC set to  0.000000
7/29/2011	2:36:30 PM	SiCl4 MFC set to  0.000000
7/29/2011	2:36:30 PM	Bypass solenoid MFC set to  0.000000
7/29/2011	2:36:30 PM	Tube furnace set to 150
7/29/2011	2:37:00 PM	H2 valve closed
7/29/2011	2:37:00 PM	BCl3 valve closed
7/29/2011	2:37:00 PM	PH3 valve closed
7/29/2011	2:37:00 PM	SiCl4 pre valve closed
7/29/2011	2:37:00 PM	SiCl4 post valve closed
7/29/2011	2:37:00 PM	Bypass valve closed
7/29/2011	2:37:00 PM	Bubbler valve closed
7/29/2011	2:37:00 PM	Helium valve opened
7/29/2011	2:37:00 PM	Main Vac valve opened
7/29/2011	2:37:00 PM	Helium MFC set to  20.000000
7/29/2011	2:37:00 PM	H2 MFC set to  0.000000
7/29/2011	2:37:00 PM	BCl3 MFC set to  0.000000
7/29/2011	2:37:00 PM	PHl3 MFC set to  0.000000
7/29/2011	2:37:00 PM	SiCl4 MFC set to  0.000000
7/29/2011	2:37:00 PM	Bypass solenoid MFC set to  0.000000
7/29/2011	2:37:00 PM	Tube furnace set to 150
7/29/2011	2:37:30 PM	Helium valve closed
7/29/2011	2:37:30 PM	H2 valve closed
7/29/2011	2:37:30 PM	BCl3 valve closed
7/29/2011	2:37:30 PM	PH3 valve closed
7/29/2011	2:37:30 PM	SiCl4 pre valve closed
7/29/2011	2:37:30 PM	SiCl4 post valve closed
7/29/2011	2:37:30 PM	Bypass valve closed
7/29/2011	2:37:30 PM	Bubbler valve closed
7/29/2011	2:37:30 PM	Main Vac valve opened
7/29/2011	2:37:30 PM	Helium MFC set to  0.000000
7/29/2011	2:37:30 PM	H2 MFC set to  0.000000
7/29/2011	2:37:30 PM	BCl3 MFC set to  0.000000
7/29/2011	2:37:30 PM	PHl3 MFC set to  0.000000
7/29/2011	2:37:30 PM	SiCl4 MFC set to  0.000000
7/29/2011	2:37:30 PM	Bypass solenoid MFC set to  0.000000
7/29/2011	2:37:30 PM	Tube furnace set to 150
7/29/2011	2:38:00 PM	H2 valve closed
7/29/2011	2:38:00 PM	BCl3 valve closed
7/29/2011	2:38:00 PM	PH3 valve closed
7/29/2011	2:38:00 PM	SiCl4 pre valve closed
7/29/2011	2:38:00 PM	SiCl4 post valve closed
7/29/2011	2:38:00 PM	Bypass valve closed
7/29/2011	2:38:00 PM	Bubbler valve closed
7/29/2011	2:38:00 PM	Helium valve opened
7/29/2011	2:38:00 PM	Main Vac valve opened
7/29/2011	2:38:00 PM	Helium MFC set to  20.000000
7/29/2011	2:38:00 PM	H2 MFC set to  0.000000
7/29/2011	2:38:00 PM	BCl3 MFC set to  0.000000
7/29/2011	2:38:00 PM	PHl3 MFC set to  0.000000
7/29/2011	2:38:00 PM	SiCl4 MFC set to  0.000000
7/29/2011	2:38:00 PM	Bypass solenoid MFC set to  0.000000
7/29/2011	2:38:00 PM	Tube furnace set to 150
7/29/2011	2:38:31 PM	Helium valve closed
7/29/2011	2:38:31 PM	H2 valve closed
7/29/2011	2:38:31 PM	BCl3 valve closed
7/29/2011	2:38:31 PM	PH3 valve closed
7/29/2011	2:38:31 PM	SiCl4 pre valve closed
7/29/2011	2:38:31 PM	SiCl4 post valve closed
7/29/2011	2:38:31 PM	Bypass valve closed
7/29/2011	2:38:31 PM	Bubbler valve closed
7/29/2011	2:38:31 PM	Main Vac valve opened
7/29/2011	2:38:31 PM	Helium MFC set to  0.000000
7/29/2011	2:38:31 PM	H2 MFC set to  0.000000
7/29/2011	2:38:31 PM	BCl3 MFC set to  0.000000
7/29/2011	2:38:31 PM	PHl3 MFC set to  0.000000
7/29/2011	2:38:31 PM	SiCl4 MFC set to  0.000000
7/29/2011	2:38:31 PM	Bypass solenoid MFC set to  0.000000
7/29/2011	2:38:31 PM	Tube furnace set to 150
7/29/2011	2:39:01 PM	H2 valve closed
7/29/2011	2:39:01 PM	BCl3 valve closed
7/29/2011	2:39:01 PM	PH3 valve closed
7/29/2011	2:39:01 PM	SiCl4 pre valve closed
7/29/2011	2:39:01 PM	SiCl4 post valve closed
7/29/2011	2:39:01 PM	Bypass valve closed
7/29/2011	2:39:01 PM	Bubbler valve closed
7/29/2011	2:39:01 PM	Helium valve opened
7/29/2011	2:39:01 PM	Main Vac valve opened
7/29/2011	2:39:01 PM	Helium MFC set to  20.000000
7/29/2011	2:39:01 PM	H2 MFC set to  0.000000
7/29/2011	2:39:01 PM	BCl3 MFC set to  0.000000
7/29/2011	2:39:01 PM	PHl3 MFC set to  0.000000
7/29/2011	2:39:01 PM	SiCl4 MFC set to  0.000000
7/29/2011	2:39:01 PM	Bypass solenoid MFC set to  0.000000
7/29/2011	2:39:01 PM	Tube furnace set to 150
7/29/2011	2:39:31 PM	Helium valve closed
7/29/2011	2:39:31 PM	H2 valve closed
7/29/2011	2:39:31 PM	BCl3 valve closed
7/29/2011	2:39:31 PM	PH3 valve closed
7/29/2011	2:39:31 PM	SiCl4 pre valve closed
7/29/2011	2:39:31 PM	SiCl4 post valve closed
7/29/2011	2:39:31 PM	Bypass valve closed
7/29/2011	2:39:31 PM	Bubbler valve closed
7/29/2011	2:39:31 PM	Main Vac valve opened
7/29/2011	2:39:31 PM	Helium MFC set to  0.000000
7/29/2011	2:39:31 PM	H2 MFC set to  0.000000
7/29/2011	2:39:31 PM	BCl3 MFC set to  0.000000
7/29/2011	2:39:31 PM	PHl3 MFC set to  0.000000
7/29/2011	2:39:31 PM	SiCl4 MFC set to  0.000000
7/29/2011	2:39:31 PM	Bypass solenoid MFC set to  0.000000
7/29/2011	2:39:31 PM	Tube furnace set to 150
7/29/2011	2:40:01 PM	H2 valve closed
7/29/2011	2:40:01 PM	BCl3 valve closed
7/29/2011	2:40:01 PM	PH3 valve closed
7/29/2011	2:40:01 PM	SiCl4 pre valve closed
7/29/2011	2:40:01 PM	SiCl4 post valve closed
7/29/2011	2:40:01 PM	Bypass valve closed
7/29/2011	2:40:01 PM	Bubbler valve closed
7/29/2011	2:40:01 PM	Helium valve opened
7/29/2011	2:40:01 PM	Main Vac valve opened
7/29/2011	2:40:01 PM	Helium MFC set to  20.000000
7/29/2011	2:40:01 PM	H2 MFC set to  0.000000
7/29/2011	2:40:01 PM	BCl3 MFC set to  0.000000
7/29/2011	2:40:01 PM	PHl3 MFC set to  0.000000
7/29/2011	2:40:01 PM	SiCl4 MFC set to  0.000000
7/29/2011	2:40:01 PM	Bypass solenoid MFC set to  0.000000
7/29/2011	2:40:01 PM	Tube furnace set to 150
7/29/2011	2:40:31 PM	Helium valve closed
7/29/2011	2:40:31 PM	H2 valve closed
7/29/2011	2:40:31 PM	BCl3 valve closed
7/29/2011	2:40:31 PM	PH3 valve closed
7/29/2011	2:40:31 PM	SiCl4 pre valve closed
7/29/2011	2:40:31 PM	SiCl4 post valve closed
7/29/2011	2:40:31 PM	Bypass valve closed
7/29/2011	2:40:31 PM	Bubbler valve closed
7/29/2011	2:40:31 PM	Main Vac valve opened
7/29/2011	2:40:31 PM	Helium MFC set to  0.000000
7/29/2011	2:40:31 PM	H2 MFC set to  0.000000
7/29/2011	2:40:31 PM	BCl3 MFC set to  0.000000
7/29/2011	2:40:31 PM	PHl3 MFC set to  0.000000
7/29/2011	2:40:31 PM	SiCl4 MFC set to  0.000000
7/29/2011	2:40:31 PM	Bypass solenoid MFC set to  0.000000
7/29/2011	2:40:31 PM	Tube furnace set to 150
7/29/2011	2:41:02 PM	H2 valve closed
7/29/2011	2:41:02 PM	BCl3 valve closed
7/29/2011	2:41:02 PM	PH3 valve closed
7/29/2011	2:41:02 PM	SiCl4 pre valve closed
7/29/2011	2:41:02 PM	SiCl4 post valve closed
7/29/2011	2:41:02 PM	Bypass valve closed
7/29/2011	2:41:02 PM	Bubbler valve closed
7/29/2011	2:41:02 PM	Helium valve opened
7/29/2011	2:41:02 PM	Main Vac valve opened
7/29/2011	2:41:02 PM	Helium MFC set to  20.000000
7/29/2011	2:41:02 PM	H2 MFC set to  0.000000
7/29/2011	2:41:02 PM	BCl3 MFC set to  0.000000
7/29/2011	2:41:02 PM	PHl3 MFC set to  0.000000
7/29/2011	2:41:02 PM	SiCl4 MFC set to  0.000000
7/29/2011	2:41:02 PM	Bypass solenoid MFC set to  0.000000
7/29/2011	2:41:02 PM	Tube furnace set to 150
7/29/2011	2:41:32 PM	Helium valve closed
7/29/2011	2:41:32 PM	H2 valve closed
7/29/2011	2:41:32 PM	BCl3 valve closed
7/29/2011	2:41:32 PM	PH3 valve closed
7/29/2011	2:41:32 PM	SiCl4 pre valve closed
7/29/2011	2:41:32 PM	SiCl4 post valve closed
7/29/2011	2:41:32 PM	Bypass valve closed
7/29/2011	2:41:32 PM	Bubbler valve closed
7/29/2011	2:41:32 PM	Main Vac valve opened
7/29/2011	2:41:32 PM	Helium MFC set to  0.000000
7/29/2011	2:41:32 PM	H2 MFC set to  0.000000
7/29/2011	2:41:32 PM	BCl3 MFC set to  0.000000
7/29/2011	2:41:32 PM	PHl3 MFC set to  0.000000
7/29/2011	2:41:32 PM	SiCl4 MFC set to  0.000000
7/29/2011	2:41:32 PM	Bypass solenoid MFC set to  0.000000
7/29/2011	2:41:32 PM	Tube furnace set to 150
7/29/2011	2:42:02 PM	H2 valve closed
7/29/2011	2:42:02 PM	BCl3 valve closed
7/29/2011	2:42:02 PM	PH3 valve closed
7/29/2011	2:42:02 PM	SiCl4 pre valve closed
7/29/2011	2:42:02 PM	SiCl4 post valve closed
7/29/2011	2:42:02 PM	Bypass valve closed
7/29/2011	2:42:02 PM	Bubbler valve closed
7/29/2011	2:42:02 PM	Helium valve opened
7/29/2011	2:42:02 PM	Main Vac valve opened
7/29/2011	2:42:02 PM	Helium MFC set to  20.000000
7/29/2011	2:42:02 PM	H2 MFC set to  0.000000
7/29/2011	2:42:02 PM	BCl3 MFC set to  0.000000
7/29/2011	2:42:02 PM	PHl3 MFC set to  0.000000
7/29/2011	2:42:02 PM	SiCl4 MFC set to  0.000000
7/29/2011	2:42:02 PM	Bypass solenoid MFC set to  0.000000
7/29/2011	2:42:02 PM	Tube furnace set to 150
7/29/2011	2:42:32 PM	Helium valve closed
7/29/2011	2:42:32 PM	H2 valve closed
7/29/2011	2:42:32 PM	BCl3 valve closed
7/29/2011	2:42:32 PM	PH3 valve closed
7/29/2011	2:42:32 PM	SiCl4 pre valve closed
7/29/2011	2:42:32 PM	SiCl4 post valve closed
7/29/2011	2:42:32 PM	Bypass valve closed
7/29/2011	2:42:32 PM	Bubbler valve closed
7/29/2011	2:42:32 PM	Main Vac valve opened
7/29/2011	2:42:32 PM	Helium MFC set to  0.000000
7/29/2011	2:42:32 PM	H2 MFC set to  0.000000
7/29/2011	2:42:32 PM	BCl3 MFC set to  0.000000
7/29/2011	2:42:32 PM	PHl3 MFC set to  0.000000
7/29/2011	2:42:32 PM	SiCl4 MFC set to  0.000000
7/29/2011	2:42:32 PM	Bypass solenoid MFC set to  0.000000
7/29/2011	2:42:32 PM	Tube furnace set to 150
7/29/2011	2:42:33 PM	Run finished at 2:42 PM
7/29/2011	2:43:30 PM	Helium MFC set to  20.000000
7/29/2011	2:43:31 PM	Helium valve opened
7/29/2011	2:44:25 PM	Helium valve closed
7/29/2011	2:44:27 PM	Helium MFC set to  0.000000
7/29/2011	2:45:06 PM	Recipe started at 2:45 PM
7/29/2011	2:45:06 PM	Helium valve closed
7/29/2011	2:45:06 PM	H2 valve closed
7/29/2011	2:45:06 PM	BCl3 valve closed
7/29/2011	2:45:06 PM	PH3 valve closed
7/29/2011	2:45:06 PM	SiCl4 pre valve closed
7/29/2011	2:45:06 PM	SiCl4 post valve closed
7/29/2011	2:45:06 PM	Main Vac valve closed
7/29/2011	2:45:06 PM	Bypass valve closed
7/29/2011	2:45:06 PM	Bubbler valve closed
7/29/2011	2:45:06 PM	Helium MFC set to  0.000000
7/29/2011	2:45:06 PM	H2 MFC set to  0.000000
7/29/2011	2:45:06 PM	BCl3 MFC set to  0.000000
7/29/2011	2:45:06 PM	PHl3 MFC set to  0.000000
7/29/2011	2:45:06 PM	SiCl4 MFC set to  0.000000
7/29/2011	2:45:06 PM	Bypass solenoid MFC set to  0.000000
7/29/2011	2:45:06 PM	Tube furnace set to 0
7/29/2011	2:45:09 PM	Helium valve closed
7/29/2011	2:45:09 PM	BCl3 valve closed
7/29/2011	2:45:09 PM	PH3 valve closed
7/29/2011	2:45:09 PM	SiCl4 pre valve closed
7/29/2011	2:45:09 PM	SiCl4 post valve closed
7/29/2011	2:45:09 PM	Main Vac valve closed
7/29/2011	2:45:09 PM	Bypass valve closed
7/29/2011	2:45:09 PM	Bubbler valve closed
7/29/2011	2:45:09 PM	H2 valve opened
7/29/2011	2:45:09 PM	Helium MFC set to  0.000000
7/29/2011	2:45:09 PM	H2 MFC set to  500.000000
7/29/2011	2:45:09 PM	BCl3 MFC set to  0.000000
7/29/2011	2:45:09 PM	PHl3 MFC set to  0.000000
7/29/2011	2:45:09 PM	SiCl4 MFC set to  0.000000
7/29/2011	2:45:09 PM	Bypass solenoid MFC set to  0.000000
7/29/2011	2:45:09 PM	Tube furnace set to 0
7/29/2011	2:46:11 PM	Helium valve closed
7/29/2011	2:46:11 PM	BCl3 valve closed
7/29/2011	2:46:11 PM	PH3 valve closed
7/29/2011	2:46:11 PM	SiCl4 pre valve closed
7/29/2011	2:46:11 PM	SiCl4 post valve closed
7/29/2011	2:46:11 PM	Main Vac valve closed
7/29/2011	2:46:11 PM	Bypass valve closed
7/29/2011	2:46:11 PM	H2 valve opened
7/29/2011	2:46:11 PM	Bubbler valve opened
7/29/2011	2:46:11 PM	Helium MFC set to  0.000000
7/29/2011	2:46:11 PM	H2 MFC set to  500.000000
7/29/2011	2:46:11 PM	BCl3 MFC set to  0.000000
7/29/2011	2:46:11 PM	PHl3 MFC set to  0.000000
7/29/2011	2:46:11 PM	SiCl4 MFC set to  0.000000
7/29/2011	2:46:11 PM	Bypass solenoid MFC set to  0.000000
7/29/2011	2:46:12 PM	Tube furnace set to 0
7/29/2011	2:46:13 PM	Helium valve closed
7/29/2011	2:46:13 PM	BCl3 valve closed
7/29/2011	2:46:13 PM	PH3 valve closed
7/29/2011	2:46:13 PM	SiCl4 pre valve closed
7/29/2011	2:46:13 PM	SiCl4 post valve closed
7/29/2011	2:46:13 PM	Main Vac valve closed
7/29/2011	2:46:13 PM	Bypass valve closed
7/29/2011	2:46:13 PM	H2 valve opened
7/29/2011	2:46:13 PM	Bubbler valve opened
7/29/2011	2:46:13 PM	Helium MFC set to  0.000000
7/29/2011	2:46:13 PM	H2 MFC set to  500.000000
7/29/2011	2:46:13 PM	BCl3 MFC set to  0.000000
7/29/2011	2:46:13 PM	PHl3 MFC set to  0.000000
7/29/2011	2:46:13 PM	SiCl4 MFC set to  0.000000
7/29/2011	2:46:13 PM	Bypass solenoid MFC set to  0.000000
7/29/2011	2:46:13 PM	Tube furnace set to 1000
7/29/2011	3:06:13 PM	Helium valve closed
7/29/2011	3:06:13 PM	PH3 valve closed
7/29/2011	3:06:13 PM	Main Vac valve closed
7/29/2011	3:06:13 PM	Bypass valve closed
7/29/2011	3:06:13 PM	H2 valve opened
7/29/2011	3:06:13 PM	BCl3 valve opened
7/29/2011	3:06:13 PM	SiCl4 pre valve opened
7/29/2011	3:06:13 PM	SiCl4 post valve opened
7/29/2011	3:06:13 PM	Bubbler valve opened
7/29/2011	3:06:13 PM	Helium MFC set to  0.000000
7/29/2011	3:06:13 PM	H2 MFC set to  500.000000
7/29/2011	3:06:13 PM	BCl3 MFC set to  2.000000
7/29/2011	3:06:13 PM	PHl3 MFC set to  0.000000
7/29/2011	3:06:13 PM	SiCl4 MFC set to  50.000000
7/29/2011	3:06:13 PM	Bypass solenoid MFC set to  0.000000
7/29/2011	3:06:13 PM	Tube furnace set to 1000
7/29/2011	3:22:53 PM	Helium valve closed
7/29/2011	3:22:53 PM	BCl3 valve closed
7/29/2011	3:22:53 PM	PH3 valve closed
7/29/2011	3:22:53 PM	SiCl4 pre valve closed
7/29/2011	3:22:53 PM	SiCl4 post valve closed
7/29/2011	3:22:53 PM	Main Vac valve closed
7/29/2011	3:22:53 PM	Bypass valve closed
7/29/2011	3:22:53 PM	H2 valve opened
7/29/2011	3:22:53 PM	Bubbler valve opened
7/29/2011	3:22:53 PM	Helium MFC set to  0.000000
7/29/2011	3:22:53 PM	H2 MFC set to  500.000000
7/29/2011	3:22:53 PM	BCl3 MFC set to  0.000000
7/29/2011	3:22:53 PM	PHl3 MFC set to  0.000000
7/29/2011	3:22:53 PM	SiCl4 MFC set to  0.000000
7/29/2011	3:22:53 PM	Bypass solenoid MFC set to  0.000000
7/29/2011	3:22:53 PM	Tube furnace set to 750
7/29/2011	3:27:53 PM	H2 valve closed
7/29/2011	3:27:53 PM	BCl3 valve closed
7/29/2011	3:27:53 PM	PH3 valve closed
7/29/2011	3:27:53 PM	SiCl4 pre valve closed
7/29/2011	3:27:53 PM	SiCl4 post valve closed
7/29/2011	3:27:53 PM	Main Vac valve closed
7/29/2011	3:27:53 PM	Bypass valve closed
7/29/2011	3:27:53 PM	Helium valve opened
7/29/2011	3:27:53 PM	Bubbler valve opened
7/29/2011	3:27:53 PM	Helium MFC set to  500.000000
7/29/2011	3:27:53 PM	H2 MFC set to  0.000000
7/29/2011	3:27:53 PM	BCl3 MFC set to  0.000000
7/29/2011	3:27:53 PM	PHl3 MFC set to  0.000000
7/29/2011	3:27:53 PM	SiCl4 MFC set to  0.000000
7/29/2011	3:27:53 PM	Bypass solenoid MFC set to  0.000000
7/29/2011	3:27:53 PM	Tube furnace set to 0
7/29/2011	3:37:26 PM	Run aborted at 3:37 PM
7/29/2011	3:37:26 PM	Helium valve closed
7/29/2011	3:37:26 PM	H2 valve closed
7/29/2011	3:37:26 PM	BCl3 valve closed
7/29/2011	3:37:26 PM	PH3 valve closed
7/29/2011	3:37:26 PM	SiCl4 pre valve closed
7/29/2011	3:37:26 PM	SiCl4 post valve closed
7/29/2011	3:37:26 PM	Bypass valve closed
7/29/2011	3:37:26 PM	Main Vac valve closed
7/29/2011	3:37:26 PM	Bubbler valve closed
7/29/2011	3:37:26 PM	Helium MFC set to  0.000000
7/29/2011	3:37:26 PM	H2 MFC set to  0.000000
7/29/2011	3:37:26 PM	BCl3 MFC set to  0.000000
7/29/2011	3:37:26 PM	PHl3 MFC set to  0.000000
7/29/2011	3:37:26 PM	SiCl4 MFC set to  0.000000
7/29/2011	3:37:27 PM	Tube furnace set to 0
7/29/2011	3:37:32 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/29/2011	3:37:33 PM	Recipe started at 3:37 PM
7/29/2011	3:37:33 PM	Helium valve closed
7/29/2011	3:37:33 PM	H2 valve closed
7/29/2011	3:37:33 PM	BCl3 valve closed
7/29/2011	3:37:33 PM	PH3 valve closed
7/29/2011	3:37:33 PM	SiCl4 pre valve closed
7/29/2011	3:37:33 PM	SiCl4 post valve closed
7/29/2011	3:37:33 PM	Main Vac valve closed
7/29/2011	3:37:33 PM	Bypass valve closed
7/29/2011	3:37:33 PM	Bubbler valve closed
7/29/2011	3:37:33 PM	Helium MFC set to  0.000000
7/29/2011	3:37:33 PM	H2 MFC set to  0.000000
7/29/2011	3:37:33 PM	BCl3 MFC set to  0.000000
7/29/2011	3:37:33 PM	PHl3 MFC set to  0.000000
7/29/2011	3:37:33 PM	SiCl4 MFC set to  0.000000
7/29/2011	3:37:33 PM	Bypass solenoid MFC set to  0.000000
7/29/2011	3:37:33 PM	Tube furnace set to 0
7/29/2011	3:37:36 PM	H2 valve closed
7/29/2011	3:37:36 PM	BCl3 valve closed
7/29/2011	3:37:36 PM	PH3 valve closed
7/29/2011	3:37:36 PM	SiCl4 pre valve closed
7/29/2011	3:37:36 PM	SiCl4 post valve closed
7/29/2011	3:37:36 PM	Main Vac valve closed
7/29/2011	3:37:36 PM	Bypass valve closed
7/29/2011	3:37:36 PM	Bubbler valve closed
7/29/2011	3:37:36 PM	Helium valve opened
7/29/2011	3:37:36 PM	Helium MFC set to  500.000000
7/29/2011	3:37:36 PM	H2 MFC set to  0.000000
7/29/2011	3:37:36 PM	BCl3 MFC set to  0.000000
7/29/2011	3:37:36 PM	PHl3 MFC set to  0.000000
7/29/2011	3:37:36 PM	SiCl4 MFC set to  0.000000
7/29/2011	3:37:36 PM	Bypass solenoid MFC set to  0.000000
7/29/2011	3:37:36 PM	Tube furnace set to 0
7/29/2011	3:37:36 PM	Helium valve closed
7/29/2011	3:37:36 PM	H2 valve closed
7/29/2011	3:37:36 PM	BCl3 valve closed
7/29/2011	3:37:36 PM	PH3 valve closed
7/29/2011	3:37:36 PM	SiCl4 pre valve closed
7/29/2011	3:37:36 PM	SiCl4 post valve closed
7/29/2011	3:37:36 PM	Main Vac valve closed
7/29/2011	3:37:36 PM	Bypass valve closed
7/29/2011	3:37:36 PM	Bubbler valve closed
7/29/2011	3:37:36 PM	Helium MFC set to  0.000000
7/29/2011	3:37:36 PM	H2 MFC set to  0.000000
7/29/2011	3:37:36 PM	BCl3 MFC set to  0.000000
7/29/2011	3:37:36 PM	PHl3 MFC set to  0.000000
7/29/2011	3:37:36 PM	SiCl4 MFC set to  0.000000
7/29/2011	3:37:36 PM	Bypass solenoid MFC set to  0.000000
7/29/2011	3:37:37 PM	Tube furnace set to 0
7/29/2011	3:37:38 PM	Run finished at 3:37 PM
7/29/2011	3:37:38 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/29/2011	3:44:05 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/29/2011	3:44:06 PM	Recipe started at 3:44 PM
7/29/2011	3:44:06 PM	Helium valve closed
7/29/2011	3:44:06 PM	H2 valve closed
7/29/2011	3:44:06 PM	BCl3 valve closed
7/29/2011	3:44:06 PM	PH3 valve closed
7/29/2011	3:44:06 PM	SiCl4 pre valve closed
7/29/2011	3:44:06 PM	SiCl4 post valve closed
7/29/2011	3:44:06 PM	Main Vac valve closed
7/29/2011	3:44:06 PM	Bubbler valve closed
7/29/2011	3:44:06 PM	Bypass valve opened
7/29/2011	3:44:06 PM	Helium MFC set to  0.000000
7/29/2011	3:44:06 PM	H2 MFC set to  0.000000
7/29/2011	3:44:06 PM	BCl3 MFC set to  0.000000
7/29/2011	3:44:06 PM	PHl3 MFC set to  0.000000
7/29/2011	3:44:06 PM	SiCl4 MFC set to  0.000000
7/29/2011	3:44:06 PM	Bypass solenoid MFC set to  0.000000
7/29/2011	3:44:06 PM	Tube furnace set to 0
7/29/2011	3:45:12 PM	Helium valve closed
7/29/2011	3:45:12 PM	H2 valve closed
7/29/2011	3:45:12 PM	BCl3 valve closed
7/29/2011	3:45:12 PM	PH3 valve closed
7/29/2011	3:45:12 PM	SiCl4 pre valve closed
7/29/2011	3:45:12 PM	SiCl4 post valve closed
7/29/2011	3:45:12 PM	Main Vac valve closed
7/29/2011	3:45:12 PM	Bubbler valve closed
7/29/2011	3:45:12 PM	Bypass valve opened
7/29/2011	3:45:12 PM	Helium MFC set to  0.000000
7/29/2011	3:45:12 PM	H2 MFC set to  0.000000
7/29/2011	3:45:12 PM	BCl3 MFC set to  0.000000
7/29/2011	3:45:12 PM	PHl3 MFC set to  0.000000
7/29/2011	3:45:12 PM	SiCl4 MFC set to  0.000000
7/29/2011	3:45:12 PM	Bypass solenoid MFC set to  0.000000
7/29/2011	3:45:12 PM	Tube furnace set to 0
7/29/2011	3:46:12 PM	Helium valve closed
7/29/2011	3:46:12 PM	H2 valve closed
7/29/2011	3:46:12 PM	BCl3 valve closed
7/29/2011	3:46:12 PM	PH3 valve closed
7/29/2011	3:46:12 PM	SiCl4 pre valve closed
7/29/2011	3:46:12 PM	SiCl4 post valve closed
7/29/2011	3:46:12 PM	Bypass valve closed
7/29/2011	3:46:12 PM	Bubbler valve closed
7/29/2011	3:46:12 PM	Main Vac valve opened
7/29/2011	3:46:12 PM	Helium MFC set to  0.000000
7/29/2011	3:46:12 PM	H2 MFC set to  0.000000
7/29/2011	3:46:12 PM	BCl3 MFC set to  0.000000
7/29/2011	3:46:12 PM	PHl3 MFC set to  0.000000
7/29/2011	3:46:12 PM	SiCl4 MFC set to  0.000000
7/29/2011	3:46:12 PM	Bypass solenoid MFC set to  0.000000
7/29/2011	3:46:13 PM	Tube furnace set to 0
7/29/2011	3:46:14 PM	Run finished at 3:46 PM
7/29/2011	3:46:14 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/29/2011	3:46:53 PM	Helium MFC set to  20.000000
7/29/2011	3:46:55 PM	Helium valve opened
7/29/2011	3:51:30 PM	Helium valve closed
7/29/2011	3:56:49 PM	Helium valve opened
7/29/2011	3:58:26 PM	Helium valve closed
7/29/2011	3:59:54 PM	Recipe started at 3:59 PM
7/29/2011	3:59:54 PM	Helium valve closed
7/29/2011	3:59:54 PM	H2 valve closed
7/29/2011	3:59:54 PM	BCl3 valve closed
7/29/2011	3:59:54 PM	PH3 valve closed
7/29/2011	3:59:54 PM	SiCl4 pre valve closed
7/29/2011	3:59:54 PM	SiCl4 post valve closed
7/29/2011	3:59:54 PM	Bypass valve closed
7/29/2011	3:59:54 PM	Bubbler valve closed
7/29/2011	3:59:54 PM	Main Vac valve opened
7/29/2011	3:59:54 PM	Helium MFC set to  0.000000
7/29/2011	3:59:54 PM	H2 MFC set to  0.000000
7/29/2011	3:59:54 PM	BCl3 MFC set to  0.000000
7/29/2011	3:59:54 PM	PHl3 MFC set to  0.000000
7/29/2011	3:59:54 PM	SiCl4 MFC set to  0.000000
7/29/2011	3:59:54 PM	Bypass solenoid MFC set to  0.000000
7/29/2011	3:59:54 PM	Tube furnace set to 150
7/29/2011	4:00:24 PM	H2 valve closed
7/29/2011	4:00:24 PM	BCl3 valve closed
7/29/2011	4:00:24 PM	PH3 valve closed
7/29/2011	4:00:24 PM	SiCl4 pre valve closed
7/29/2011	4:00:24 PM	SiCl4 post valve closed
7/29/2011	4:00:24 PM	Bypass valve closed
7/29/2011	4:00:24 PM	Bubbler valve closed
7/29/2011	4:00:24 PM	Helium valve opened
7/29/2011	4:00:24 PM	Main Vac valve opened
7/29/2011	4:00:24 PM	Helium MFC set to  20.000000
7/29/2011	4:00:24 PM	H2 MFC set to  0.000000
7/29/2011	4:00:24 PM	BCl3 MFC set to  0.000000
7/29/2011	4:00:24 PM	PHl3 MFC set to  0.000000
7/29/2011	4:00:24 PM	SiCl4 MFC set to  0.000000
7/29/2011	4:00:24 PM	Bypass solenoid MFC set to  0.000000
7/29/2011	4:00:24 PM	Tube furnace set to 150
7/29/2011	4:00:54 PM	Helium valve closed
7/29/2011	4:00:54 PM	H2 valve closed
7/29/2011	4:00:54 PM	BCl3 valve closed
7/29/2011	4:00:54 PM	PH3 valve closed
7/29/2011	4:00:54 PM	SiCl4 pre valve closed
7/29/2011	4:00:54 PM	SiCl4 post valve closed
7/29/2011	4:00:54 PM	Bypass valve closed
7/29/2011	4:00:54 PM	Bubbler valve closed
7/29/2011	4:00:54 PM	Main Vac valve opened
7/29/2011	4:00:54 PM	Helium MFC set to  0.000000
7/29/2011	4:00:54 PM	H2 MFC set to  0.000000
7/29/2011	4:00:54 PM	BCl3 MFC set to  0.000000
7/29/2011	4:00:54 PM	PHl3 MFC set to  0.000000
7/29/2011	4:00:54 PM	SiCl4 MFC set to  0.000000
7/29/2011	4:00:54 PM	Bypass solenoid MFC set to  0.000000
7/29/2011	4:00:54 PM	Tube furnace set to 150
7/29/2011	4:01:24 PM	H2 valve closed
7/29/2011	4:01:24 PM	BCl3 valve closed
7/29/2011	4:01:24 PM	PH3 valve closed
7/29/2011	4:01:24 PM	SiCl4 pre valve closed
7/29/2011	4:01:24 PM	SiCl4 post valve closed
7/29/2011	4:01:24 PM	Bypass valve closed
7/29/2011	4:01:24 PM	Bubbler valve closed
7/29/2011	4:01:24 PM	Helium valve opened
7/29/2011	4:01:24 PM	Main Vac valve opened
7/29/2011	4:01:24 PM	Helium MFC set to  20.000000
7/29/2011	4:01:24 PM	H2 MFC set to  0.000000
7/29/2011	4:01:24 PM	BCl3 MFC set to  0.000000
7/29/2011	4:01:24 PM	PHl3 MFC set to  0.000000
7/29/2011	4:01:24 PM	SiCl4 MFC set to  0.000000
7/29/2011	4:01:24 PM	Bypass solenoid MFC set to  0.000000
7/29/2011	4:01:24 PM	Tube furnace set to 150
7/29/2011	4:01:54 PM	Helium valve closed
7/29/2011	4:01:54 PM	H2 valve closed
7/29/2011	4:01:54 PM	BCl3 valve closed
7/29/2011	4:01:54 PM	PH3 valve closed
7/29/2011	4:01:54 PM	SiCl4 pre valve closed
7/29/2011	4:01:54 PM	SiCl4 post valve closed
7/29/2011	4:01:54 PM	Bypass valve closed
7/29/2011	4:01:54 PM	Bubbler valve closed
7/29/2011	4:01:54 PM	Main Vac valve opened
7/29/2011	4:01:54 PM	Helium MFC set to  0.000000
7/29/2011	4:01:54 PM	H2 MFC set to  0.000000
7/29/2011	4:01:54 PM	BCl3 MFC set to  0.000000
7/29/2011	4:01:54 PM	PHl3 MFC set to  0.000000
7/29/2011	4:01:54 PM	SiCl4 MFC set to  0.000000
7/29/2011	4:01:54 PM	Bypass solenoid MFC set to  0.000000
7/29/2011	4:01:54 PM	Tube furnace set to 150
7/29/2011	4:02:25 PM	H2 valve closed
7/29/2011	4:02:25 PM	BCl3 valve closed
7/29/2011	4:02:25 PM	PH3 valve closed
7/29/2011	4:02:25 PM	SiCl4 pre valve closed
7/29/2011	4:02:25 PM	SiCl4 post valve closed
7/29/2011	4:02:25 PM	Bypass valve closed
7/29/2011	4:02:25 PM	Bubbler valve closed
7/29/2011	4:02:25 PM	Helium valve opened
7/29/2011	4:02:25 PM	Main Vac valve opened
7/29/2011	4:02:25 PM	Helium MFC set to  20.000000
7/29/2011	4:02:25 PM	H2 MFC set to  0.000000
7/29/2011	4:02:25 PM	BCl3 MFC set to  0.000000
7/29/2011	4:02:25 PM	PHl3 MFC set to  0.000000
7/29/2011	4:02:25 PM	SiCl4 MFC set to  0.000000
7/29/2011	4:02:25 PM	Bypass solenoid MFC set to  0.000000
7/29/2011	4:02:25 PM	Tube furnace set to 150
7/29/2011	4:02:55 PM	Helium valve closed
7/29/2011	4:02:55 PM	H2 valve closed
7/29/2011	4:02:55 PM	BCl3 valve closed
7/29/2011	4:02:55 PM	PH3 valve closed
7/29/2011	4:02:55 PM	SiCl4 pre valve closed
7/29/2011	4:02:55 PM	SiCl4 post valve closed
7/29/2011	4:02:55 PM	Bypass valve closed
7/29/2011	4:02:55 PM	Bubbler valve closed
7/29/2011	4:02:55 PM	Main Vac valve opened
7/29/2011	4:02:55 PM	Helium MFC set to  0.000000
7/29/2011	4:02:55 PM	H2 MFC set to  0.000000
7/29/2011	4:02:55 PM	BCl3 MFC set to  0.000000
7/29/2011	4:02:55 PM	PHl3 MFC set to  0.000000
7/29/2011	4:02:55 PM	SiCl4 MFC set to  0.000000
7/29/2011	4:02:55 PM	Bypass solenoid MFC set to  0.000000
7/29/2011	4:02:55 PM	Tube furnace set to 150
7/29/2011	4:03:25 PM	H2 valve closed
7/29/2011	4:03:25 PM	BCl3 valve closed
7/29/2011	4:03:25 PM	PH3 valve closed
7/29/2011	4:03:25 PM	SiCl4 pre valve closed
7/29/2011	4:03:25 PM	SiCl4 post valve closed
7/29/2011	4:03:25 PM	Bypass valve closed
7/29/2011	4:03:25 PM	Bubbler valve closed
7/29/2011	4:03:25 PM	Helium valve opened
7/29/2011	4:03:25 PM	Main Vac valve opened
7/29/2011	4:03:25 PM	Helium MFC set to  20.000000
7/29/2011	4:03:25 PM	H2 MFC set to  0.000000
7/29/2011	4:03:25 PM	BCl3 MFC set to  0.000000
7/29/2011	4:03:25 PM	PHl3 MFC set to  0.000000
7/29/2011	4:03:25 PM	SiCl4 MFC set to  0.000000
7/29/2011	4:03:25 PM	Bypass solenoid MFC set to  0.000000
7/29/2011	4:03:25 PM	Tube furnace set to 150
7/29/2011	4:03:55 PM	Helium valve closed
7/29/2011	4:03:55 PM	H2 valve closed
7/29/2011	4:03:55 PM	BCl3 valve closed
7/29/2011	4:03:55 PM	PH3 valve closed
7/29/2011	4:03:55 PM	SiCl4 pre valve closed
7/29/2011	4:03:55 PM	SiCl4 post valve closed
7/29/2011	4:03:55 PM	Bypass valve closed
7/29/2011	4:03:55 PM	Bubbler valve closed
7/29/2011	4:03:55 PM	Main Vac valve opened
7/29/2011	4:03:55 PM	Helium MFC set to  0.000000
7/29/2011	4:03:55 PM	H2 MFC set to  0.000000
7/29/2011	4:03:55 PM	BCl3 MFC set to  0.000000
7/29/2011	4:03:55 PM	PHl3 MFC set to  0.000000
7/29/2011	4:03:55 PM	SiCl4 MFC set to  0.000000
7/29/2011	4:03:55 PM	Bypass solenoid MFC set to  0.000000
7/29/2011	4:03:55 PM	Tube furnace set to 150
7/29/2011	4:04:25 PM	H2 valve closed
7/29/2011	4:04:25 PM	BCl3 valve closed
7/29/2011	4:04:25 PM	PH3 valve closed
7/29/2011	4:04:25 PM	SiCl4 pre valve closed
7/29/2011	4:04:25 PM	SiCl4 post valve closed
7/29/2011	4:04:25 PM	Bypass valve closed
7/29/2011	4:04:25 PM	Bubbler valve closed
7/29/2011	4:04:25 PM	Helium valve opened
7/29/2011	4:04:25 PM	Main Vac valve opened
7/29/2011	4:04:25 PM	Helium MFC set to  20.000000
7/29/2011	4:04:25 PM	H2 MFC set to  0.000000
7/29/2011	4:04:25 PM	BCl3 MFC set to  0.000000
7/29/2011	4:04:25 PM	PHl3 MFC set to  0.000000
7/29/2011	4:04:25 PM	SiCl4 MFC set to  0.000000
7/29/2011	4:04:25 PM	Bypass solenoid MFC set to  0.000000
7/29/2011	4:04:26 PM	Tube furnace set to 150
7/29/2011	4:04:56 PM	Helium valve closed
7/29/2011	4:04:56 PM	H2 valve closed
7/29/2011	4:04:56 PM	BCl3 valve closed
7/29/2011	4:04:56 PM	PH3 valve closed
7/29/2011	4:04:56 PM	SiCl4 pre valve closed
7/29/2011	4:04:56 PM	SiCl4 post valve closed
7/29/2011	4:04:56 PM	Bypass valve closed
7/29/2011	4:04:56 PM	Bubbler valve closed
7/29/2011	4:04:56 PM	Main Vac valve opened
7/29/2011	4:04:56 PM	Helium MFC set to  0.000000
7/29/2011	4:04:56 PM	H2 MFC set to  0.000000
7/29/2011	4:04:56 PM	BCl3 MFC set to  0.000000
7/29/2011	4:04:56 PM	PHl3 MFC set to  0.000000
7/29/2011	4:04:56 PM	SiCl4 MFC set to  0.000000
7/29/2011	4:04:56 PM	Bypass solenoid MFC set to  0.000000
7/29/2011	4:04:56 PM	Tube furnace set to 150
7/29/2011	4:05:26 PM	H2 valve closed
7/29/2011	4:05:26 PM	BCl3 valve closed
7/29/2011	4:05:26 PM	PH3 valve closed
7/29/2011	4:05:26 PM	SiCl4 pre valve closed
7/29/2011	4:05:26 PM	SiCl4 post valve closed
7/29/2011	4:05:26 PM	Bypass valve closed
7/29/2011	4:05:26 PM	Bubbler valve closed
7/29/2011	4:05:26 PM	Helium valve opened
7/29/2011	4:05:26 PM	Main Vac valve opened
7/29/2011	4:05:26 PM	Helium MFC set to  20.000000
7/29/2011	4:05:26 PM	H2 MFC set to  0.000000
7/29/2011	4:05:26 PM	BCl3 MFC set to  0.000000
7/29/2011	4:05:26 PM	PHl3 MFC set to  0.000000
7/29/2011	4:05:26 PM	SiCl4 MFC set to  0.000000
7/29/2011	4:05:26 PM	Bypass solenoid MFC set to  0.000000
7/29/2011	4:05:26 PM	Tube furnace set to 150
7/29/2011	4:05:56 PM	Helium valve closed
7/29/2011	4:05:56 PM	H2 valve closed
7/29/2011	4:05:56 PM	BCl3 valve closed
7/29/2011	4:05:56 PM	PH3 valve closed
7/29/2011	4:05:56 PM	SiCl4 pre valve closed
7/29/2011	4:05:56 PM	SiCl4 post valve closed
7/29/2011	4:05:56 PM	Bypass valve closed
7/29/2011	4:05:56 PM	Bubbler valve closed
7/29/2011	4:05:56 PM	Main Vac valve opened
7/29/2011	4:05:56 PM	Helium MFC set to  0.000000
7/29/2011	4:05:56 PM	H2 MFC set to  0.000000
7/29/2011	4:05:56 PM	BCl3 MFC set to  0.000000
7/29/2011	4:05:56 PM	PHl3 MFC set to  0.000000
7/29/2011	4:05:56 PM	SiCl4 MFC set to  0.000000
7/29/2011	4:05:56 PM	Bypass solenoid MFC set to  0.000000
7/29/2011	4:05:56 PM	Tube furnace set to 150
7/29/2011	4:06:26 PM	H2 valve closed
7/29/2011	4:06:26 PM	BCl3 valve closed
7/29/2011	4:06:26 PM	PH3 valve closed
7/29/2011	4:06:26 PM	SiCl4 pre valve closed
7/29/2011	4:06:26 PM	SiCl4 post valve closed
7/29/2011	4:06:26 PM	Bypass valve closed
7/29/2011	4:06:26 PM	Bubbler valve closed
7/29/2011	4:06:26 PM	Helium valve opened
7/29/2011	4:06:26 PM	Main Vac valve opened
7/29/2011	4:06:26 PM	Helium MFC set to  20.000000
7/29/2011	4:06:26 PM	H2 MFC set to  0.000000
7/29/2011	4:06:26 PM	BCl3 MFC set to  0.000000
7/29/2011	4:06:26 PM	PHl3 MFC set to  0.000000
7/29/2011	4:06:26 PM	SiCl4 MFC set to  0.000000
7/29/2011	4:06:26 PM	Bypass solenoid MFC set to  0.000000
7/29/2011	4:06:26 PM	Tube furnace set to 150
7/29/2011	4:06:56 PM	Helium valve closed
7/29/2011	4:06:56 PM	H2 valve closed
7/29/2011	4:06:56 PM	BCl3 valve closed
7/29/2011	4:06:56 PM	PH3 valve closed
7/29/2011	4:06:56 PM	SiCl4 pre valve closed
7/29/2011	4:06:56 PM	SiCl4 post valve closed
7/29/2011	4:06:56 PM	Bypass valve closed
7/29/2011	4:06:56 PM	Bubbler valve closed
7/29/2011	4:06:56 PM	Main Vac valve opened
7/29/2011	4:06:56 PM	Helium MFC set to  0.000000
7/29/2011	4:06:56 PM	H2 MFC set to  0.000000
7/29/2011	4:06:56 PM	BCl3 MFC set to  0.000000
7/29/2011	4:06:56 PM	PHl3 MFC set to  0.000000
7/29/2011	4:06:56 PM	SiCl4 MFC set to  0.000000
7/29/2011	4:06:56 PM	Bypass solenoid MFC set to  0.000000
7/29/2011	4:06:57 PM	Tube furnace set to 150
7/29/2011	4:07:27 PM	H2 valve closed
7/29/2011	4:07:27 PM	BCl3 valve closed
7/29/2011	4:07:27 PM	PH3 valve closed
7/29/2011	4:07:27 PM	SiCl4 pre valve closed
7/29/2011	4:07:27 PM	SiCl4 post valve closed
7/29/2011	4:07:27 PM	Bypass valve closed
7/29/2011	4:07:27 PM	Bubbler valve closed
7/29/2011	4:07:27 PM	Helium valve opened
7/29/2011	4:07:27 PM	Main Vac valve opened
7/29/2011	4:07:27 PM	Helium MFC set to  20.000000
7/29/2011	4:07:27 PM	H2 MFC set to  0.000000
7/29/2011	4:07:27 PM	BCl3 MFC set to  0.000000
7/29/2011	4:07:27 PM	PHl3 MFC set to  0.000000
7/29/2011	4:07:27 PM	SiCl4 MFC set to  0.000000
7/29/2011	4:07:27 PM	Bypass solenoid MFC set to  0.000000
7/29/2011	4:07:27 PM	Tube furnace set to 150
7/29/2011	4:07:57 PM	Helium valve closed
7/29/2011	4:07:57 PM	H2 valve closed
7/29/2011	4:07:57 PM	BCl3 valve closed
7/29/2011	4:07:57 PM	PH3 valve closed
7/29/2011	4:07:57 PM	SiCl4 pre valve closed
7/29/2011	4:07:57 PM	SiCl4 post valve closed
7/29/2011	4:07:57 PM	Bypass valve closed
7/29/2011	4:07:57 PM	Bubbler valve closed
7/29/2011	4:07:57 PM	Main Vac valve opened
7/29/2011	4:07:57 PM	Helium MFC set to  0.000000
7/29/2011	4:07:57 PM	H2 MFC set to  0.000000
7/29/2011	4:07:57 PM	BCl3 MFC set to  0.000000
7/29/2011	4:07:57 PM	PHl3 MFC set to  0.000000
7/29/2011	4:07:57 PM	SiCl4 MFC set to  0.000000
7/29/2011	4:07:57 PM	Bypass solenoid MFC set to  0.000000
7/29/2011	4:07:57 PM	Tube furnace set to 150
7/29/2011	4:08:27 PM	H2 valve closed
7/29/2011	4:08:27 PM	BCl3 valve closed
7/29/2011	4:08:27 PM	PH3 valve closed
7/29/2011	4:08:27 PM	SiCl4 pre valve closed
7/29/2011	4:08:27 PM	SiCl4 post valve closed
7/29/2011	4:08:27 PM	Bypass valve closed
7/29/2011	4:08:27 PM	Bubbler valve closed
7/29/2011	4:08:27 PM	Helium valve opened
7/29/2011	4:08:27 PM	Main Vac valve opened
7/29/2011	4:08:27 PM	Helium MFC set to  20.000000
7/29/2011	4:08:27 PM	H2 MFC set to  0.000000
7/29/2011	4:08:27 PM	BCl3 MFC set to  0.000000
7/29/2011	4:08:27 PM	PHl3 MFC set to  0.000000
7/29/2011	4:08:27 PM	SiCl4 MFC set to  0.000000
7/29/2011	4:08:27 PM	Bypass solenoid MFC set to  0.000000
7/29/2011	4:08:27 PM	Tube furnace set to 150
7/29/2011	4:08:57 PM	Helium valve closed
7/29/2011	4:08:57 PM	H2 valve closed
7/29/2011	4:08:57 PM	BCl3 valve closed
7/29/2011	4:08:57 PM	PH3 valve closed
7/29/2011	4:08:57 PM	SiCl4 pre valve closed
7/29/2011	4:08:57 PM	SiCl4 post valve closed
7/29/2011	4:08:57 PM	Bypass valve closed
7/29/2011	4:08:57 PM	Bubbler valve closed
7/29/2011	4:08:57 PM	Main Vac valve opened
7/29/2011	4:08:57 PM	Helium MFC set to  0.000000
7/29/2011	4:08:57 PM	H2 MFC set to  0.000000
7/29/2011	4:08:57 PM	BCl3 MFC set to  0.000000
7/29/2011	4:08:57 PM	PHl3 MFC set to  0.000000
7/29/2011	4:08:57 PM	SiCl4 MFC set to  0.000000
7/29/2011	4:08:57 PM	Bypass solenoid MFC set to  0.000000
7/29/2011	4:08:57 PM	Tube furnace set to 150
7/29/2011	4:09:27 PM	H2 valve closed
7/29/2011	4:09:27 PM	BCl3 valve closed
7/29/2011	4:09:27 PM	PH3 valve closed
7/29/2011	4:09:27 PM	SiCl4 pre valve closed
7/29/2011	4:09:27 PM	SiCl4 post valve closed
7/29/2011	4:09:27 PM	Bypass valve closed
7/29/2011	4:09:27 PM	Bubbler valve closed
7/29/2011	4:09:27 PM	Helium valve opened
7/29/2011	4:09:27 PM	Main Vac valve opened
7/29/2011	4:09:27 PM	Helium MFC set to  20.000000
7/29/2011	4:09:27 PM	H2 MFC set to  0.000000
7/29/2011	4:09:27 PM	BCl3 MFC set to  0.000000
7/29/2011	4:09:27 PM	PHl3 MFC set to  0.000000
7/29/2011	4:09:27 PM	SiCl4 MFC set to  0.000000
7/29/2011	4:09:27 PM	Bypass solenoid MFC set to  0.000000
7/29/2011	4:09:27 PM	Tube furnace set to 150
7/29/2011	4:09:58 PM	Helium valve closed
7/29/2011	4:09:58 PM	H2 valve closed
7/29/2011	4:09:58 PM	BCl3 valve closed
7/29/2011	4:09:58 PM	PH3 valve closed
7/29/2011	4:09:58 PM	SiCl4 pre valve closed
7/29/2011	4:09:58 PM	SiCl4 post valve closed
7/29/2011	4:09:58 PM	Bypass valve closed
7/29/2011	4:09:58 PM	Bubbler valve closed
7/29/2011	4:09:58 PM	Main Vac valve opened
7/29/2011	4:09:58 PM	Helium MFC set to  0.000000
7/29/2011	4:09:58 PM	H2 MFC set to  0.000000
7/29/2011	4:09:58 PM	BCl3 MFC set to  0.000000
7/29/2011	4:09:58 PM	PHl3 MFC set to  0.000000
7/29/2011	4:09:58 PM	SiCl4 MFC set to  0.000000
7/29/2011	4:09:58 PM	Bypass solenoid MFC set to  0.000000
7/29/2011	4:09:58 PM	Tube furnace set to 150
7/29/2011	4:09:59 PM	Run finished at 4:09 PM
7/29/2011	4:10:30 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
7/29/2011	4:10:42 PM	Recipe started at 4:10 PM
7/29/2011	4:10:42 PM	Helium valve closed
7/29/2011	4:10:42 PM	H2 valve closed
7/29/2011	4:10:42 PM	BCl3 valve closed
7/29/2011	4:10:42 PM	PH3 valve closed
7/29/2011	4:10:42 PM	SiCl4 pre valve closed
7/29/2011	4:10:42 PM	SiCl4 post valve closed
7/29/2011	4:10:42 PM	Main Vac valve closed
7/29/2011	4:10:42 PM	Bubbler valve closed
7/29/2011	4:10:42 PM	Bypass valve opened
7/29/2011	4:10:42 PM	Helium MFC set to  0.000000
7/29/2011	4:10:42 PM	H2 MFC set to  0.000000
7/29/2011	4:10:42 PM	BCl3 MFC set to  0.000000
7/29/2011	4:10:42 PM	PHl3 MFC set to  0.000000
7/29/2011	4:10:42 PM	SiCl4 MFC set to  0.000000
7/29/2011	4:10:42 PM	Bypass solenoid MFC set to  0.000000
7/29/2011	4:10:42 PM	Tube furnace set to 0
7/29/2011	4:10:43 PM	Run aborted at 4:10 PM
7/29/2011	4:10:43 PM	Helium valve closed
7/29/2011	4:10:43 PM	H2 valve closed
7/29/2011	4:10:43 PM	BCl3 valve closed
7/29/2011	4:10:43 PM	PH3 valve closed
7/29/2011	4:10:43 PM	SiCl4 pre valve closed
7/29/2011	4:10:43 PM	SiCl4 post valve closed
7/29/2011	4:10:43 PM	Bypass valve closed
7/29/2011	4:10:43 PM	Main Vac valve closed
7/29/2011	4:10:43 PM	Bubbler valve closed
7/29/2011	4:10:43 PM	Helium MFC set to  0.000000
7/29/2011	4:10:43 PM	H2 MFC set to  0.000000
7/29/2011	4:10:43 PM	BCl3 MFC set to  0.000000
7/29/2011	4:10:43 PM	PHl3 MFC set to  0.000000
7/29/2011	4:10:43 PM	SiCl4 MFC set to  0.000000
7/29/2011	4:10:43 PM	Tube furnace set to 0
7/29/2011	4:10:43 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
7/29/2011	4:10:45 PM	Main Vac valve opened
7/29/2011	4:10:58 PM	Recipe started at 4:10 PM
7/29/2011	4:10:58 PM	Helium valve closed
7/29/2011	4:10:58 PM	H2 valve closed
7/29/2011	4:10:58 PM	BCl3 valve closed
7/29/2011	4:10:58 PM	PH3 valve closed
7/29/2011	4:10:58 PM	SiCl4 pre valve closed
7/29/2011	4:10:58 PM	SiCl4 post valve closed
7/29/2011	4:10:58 PM	Bypass valve closed
7/29/2011	4:10:58 PM	Bubbler valve closed
7/29/2011	4:10:58 PM	Main Vac valve opened
7/29/2011	4:10:58 PM	Helium MFC set to  0.000000
7/29/2011	4:10:58 PM	H2 MFC set to  0.000000
7/29/2011	4:10:58 PM	BCl3 MFC set to  0.000000
7/29/2011	4:10:58 PM	PHl3 MFC set to  0.000000
7/29/2011	4:10:58 PM	SiCl4 MFC set to  0.000000
7/29/2011	4:10:58 PM	Bypass solenoid MFC set to  0.000000
7/29/2011	4:10:58 PM	Tube furnace set to 150
7/29/2011	4:11:28 PM	H2 valve closed
7/29/2011	4:11:28 PM	BCl3 valve closed
7/29/2011	4:11:28 PM	PH3 valve closed
7/29/2011	4:11:28 PM	SiCl4 pre valve closed
7/29/2011	4:11:28 PM	SiCl4 post valve closed
7/29/2011	4:11:28 PM	Bypass valve closed
7/29/2011	4:11:28 PM	Bubbler valve closed
7/29/2011	4:11:28 PM	Helium valve opened
7/29/2011	4:11:28 PM	Main Vac valve opened
7/29/2011	4:11:28 PM	Helium MFC set to  20.000000
7/29/2011	4:11:28 PM	H2 MFC set to  0.000000
7/29/2011	4:11:28 PM	BCl3 MFC set to  0.000000
7/29/2011	4:11:28 PM	PHl3 MFC set to  0.000000
7/29/2011	4:11:28 PM	SiCl4 MFC set to  0.000000
7/29/2011	4:11:28 PM	Bypass solenoid MFC set to  0.000000
7/29/2011	4:11:28 PM	Tube furnace set to 150
7/29/2011	4:11:58 PM	Helium valve closed
7/29/2011	4:11:58 PM	H2 valve closed
7/29/2011	4:11:58 PM	BCl3 valve closed
7/29/2011	4:11:58 PM	PH3 valve closed
7/29/2011	4:11:58 PM	SiCl4 pre valve closed
7/29/2011	4:11:58 PM	SiCl4 post valve closed
7/29/2011	4:11:58 PM	Bypass valve closed
7/29/2011	4:11:58 PM	Bubbler valve closed
7/29/2011	4:11:58 PM	Main Vac valve opened
7/29/2011	4:11:58 PM	Helium MFC set to  0.000000
7/29/2011	4:11:58 PM	H2 MFC set to  0.000000
7/29/2011	4:11:58 PM	BCl3 MFC set to  0.000000
7/29/2011	4:11:58 PM	PHl3 MFC set to  0.000000
7/29/2011	4:11:58 PM	SiCl4 MFC set to  0.000000
7/29/2011	4:11:58 PM	Bypass solenoid MFC set to  0.000000
7/29/2011	4:11:58 PM	Tube furnace set to 150
7/29/2011	4:12:29 PM	H2 valve closed
7/29/2011	4:12:29 PM	BCl3 valve closed
7/29/2011	4:12:29 PM	PH3 valve closed
7/29/2011	4:12:29 PM	SiCl4 pre valve closed
7/29/2011	4:12:29 PM	SiCl4 post valve closed
7/29/2011	4:12:29 PM	Bypass valve closed
7/29/2011	4:12:29 PM	Bubbler valve closed
7/29/2011	4:12:29 PM	Helium valve opened
7/29/2011	4:12:29 PM	Main Vac valve opened
7/29/2011	4:12:29 PM	Helium MFC set to  20.000000
7/29/2011	4:12:29 PM	H2 MFC set to  0.000000
7/29/2011	4:12:29 PM	BCl3 MFC set to  0.000000
7/29/2011	4:12:29 PM	PHl3 MFC set to  0.000000
7/29/2011	4:12:29 PM	SiCl4 MFC set to  0.000000
7/29/2011	4:12:29 PM	Bypass solenoid MFC set to  0.000000
7/29/2011	4:12:29 PM	Tube furnace set to 150
7/29/2011	4:12:59 PM	Helium valve closed
7/29/2011	4:12:59 PM	H2 valve closed
7/29/2011	4:12:59 PM	BCl3 valve closed
7/29/2011	4:12:59 PM	PH3 valve closed
7/29/2011	4:12:59 PM	SiCl4 pre valve closed
7/29/2011	4:12:59 PM	SiCl4 post valve closed
7/29/2011	4:12:59 PM	Bypass valve closed
7/29/2011	4:12:59 PM	Bubbler valve closed
7/29/2011	4:12:59 PM	Main Vac valve opened
7/29/2011	4:12:59 PM	Helium MFC set to  0.000000
7/29/2011	4:12:59 PM	H2 MFC set to  0.000000
7/29/2011	4:12:59 PM	BCl3 MFC set to  0.000000
7/29/2011	4:12:59 PM	PHl3 MFC set to  0.000000
7/29/2011	4:12:59 PM	SiCl4 MFC set to  0.000000
7/29/2011	4:12:59 PM	Bypass solenoid MFC set to  0.000000
7/29/2011	4:12:59 PM	Tube furnace set to 150
7/29/2011	4:13:29 PM	H2 valve closed
7/29/2011	4:13:29 PM	BCl3 valve closed
7/29/2011	4:13:29 PM	PH3 valve closed
7/29/2011	4:13:29 PM	SiCl4 pre valve closed
7/29/2011	4:13:29 PM	SiCl4 post valve closed
7/29/2011	4:13:29 PM	Bypass valve closed
7/29/2011	4:13:29 PM	Bubbler valve closed
7/29/2011	4:13:29 PM	Helium valve opened
7/29/2011	4:13:29 PM	Main Vac valve opened
7/29/2011	4:13:29 PM	Helium MFC set to  20.000000
7/29/2011	4:13:29 PM	H2 MFC set to  0.000000
7/29/2011	4:13:29 PM	BCl3 MFC set to  0.000000
7/29/2011	4:13:29 PM	PHl3 MFC set to  0.000000
7/29/2011	4:13:29 PM	SiCl4 MFC set to  0.000000
7/29/2011	4:13:29 PM	Bypass solenoid MFC set to  0.000000
7/29/2011	4:13:29 PM	Tube furnace set to 150
7/29/2011	4:13:59 PM	Helium valve closed
7/29/2011	4:13:59 PM	H2 valve closed
7/29/2011	4:13:59 PM	BCl3 valve closed
7/29/2011	4:13:59 PM	PH3 valve closed
7/29/2011	4:13:59 PM	SiCl4 pre valve closed
7/29/2011	4:13:59 PM	SiCl4 post valve closed
7/29/2011	4:13:59 PM	Bypass valve closed
7/29/2011	4:13:59 PM	Bubbler valve closed
7/29/2011	4:13:59 PM	Main Vac valve opened
7/29/2011	4:13:59 PM	Helium MFC set to  0.000000
7/29/2011	4:13:59 PM	H2 MFC set to  0.000000
7/29/2011	4:13:59 PM	BCl3 MFC set to  0.000000
7/29/2011	4:13:59 PM	PHl3 MFC set to  0.000000
7/29/2011	4:13:59 PM	SiCl4 MFC set to  0.000000
7/29/2011	4:13:59 PM	Bypass solenoid MFC set to  0.000000
7/29/2011	4:13:59 PM	Tube furnace set to 150
7/29/2011	4:14:29 PM	H2 valve closed
7/29/2011	4:14:29 PM	BCl3 valve closed
7/29/2011	4:14:29 PM	PH3 valve closed
7/29/2011	4:14:29 PM	SiCl4 pre valve closed
7/29/2011	4:14:29 PM	SiCl4 post valve closed
7/29/2011	4:14:29 PM	Bypass valve closed
7/29/2011	4:14:29 PM	Bubbler valve closed
7/29/2011	4:14:29 PM	Helium valve opened
7/29/2011	4:14:29 PM	Main Vac valve opened
7/29/2011	4:14:29 PM	Helium MFC set to  20.000000
7/29/2011	4:14:29 PM	H2 MFC set to  0.000000
7/29/2011	4:14:29 PM	BCl3 MFC set to  0.000000
7/29/2011	4:14:29 PM	PHl3 MFC set to  0.000000
7/29/2011	4:14:29 PM	SiCl4 MFC set to  0.000000
7/29/2011	4:14:29 PM	Bypass solenoid MFC set to  0.000000
7/29/2011	4:14:30 PM	Tube furnace set to 150
7/29/2011	4:15:00 PM	Helium valve closed
7/29/2011	4:15:00 PM	H2 valve closed
7/29/2011	4:15:00 PM	BCl3 valve closed
7/29/2011	4:15:00 PM	PH3 valve closed
7/29/2011	4:15:00 PM	SiCl4 pre valve closed
7/29/2011	4:15:00 PM	SiCl4 post valve closed
7/29/2011	4:15:00 PM	Bypass valve closed
7/29/2011	4:15:00 PM	Bubbler valve closed
7/29/2011	4:15:00 PM	Main Vac valve opened
7/29/2011	4:15:00 PM	Helium MFC set to  0.000000
7/29/2011	4:15:00 PM	H2 MFC set to  0.000000
7/29/2011	4:15:00 PM	BCl3 MFC set to  0.000000
7/29/2011	4:15:00 PM	PHl3 MFC set to  0.000000
7/29/2011	4:15:00 PM	SiCl4 MFC set to  0.000000
7/29/2011	4:15:00 PM	Bypass solenoid MFC set to  0.000000
7/29/2011	4:15:00 PM	Tube furnace set to 150
7/29/2011	4:15:30 PM	H2 valve closed
7/29/2011	4:15:30 PM	BCl3 valve closed
7/29/2011	4:15:30 PM	PH3 valve closed
7/29/2011	4:15:30 PM	SiCl4 pre valve closed
7/29/2011	4:15:30 PM	SiCl4 post valve closed
7/29/2011	4:15:30 PM	Bypass valve closed
7/29/2011	4:15:30 PM	Bubbler valve closed
7/29/2011	4:15:30 PM	Helium valve opened
7/29/2011	4:15:30 PM	Main Vac valve opened
7/29/2011	4:15:30 PM	Helium MFC set to  20.000000
7/29/2011	4:15:30 PM	H2 MFC set to  0.000000
7/29/2011	4:15:30 PM	BCl3 MFC set to  0.000000
7/29/2011	4:15:30 PM	PHl3 MFC set to  0.000000
7/29/2011	4:15:30 PM	SiCl4 MFC set to  0.000000
7/29/2011	4:15:30 PM	Bypass solenoid MFC set to  0.000000
7/29/2011	4:15:30 PM	Tube furnace set to 150
7/29/2011	4:16:00 PM	Helium valve closed
7/29/2011	4:16:00 PM	H2 valve closed
7/29/2011	4:16:00 PM	BCl3 valve closed
7/29/2011	4:16:00 PM	PH3 valve closed
7/29/2011	4:16:00 PM	SiCl4 pre valve closed
7/29/2011	4:16:00 PM	SiCl4 post valve closed
7/29/2011	4:16:00 PM	Bypass valve closed
7/29/2011	4:16:00 PM	Bubbler valve closed
7/29/2011	4:16:00 PM	Main Vac valve opened
7/29/2011	4:16:00 PM	Helium MFC set to  0.000000
7/29/2011	4:16:00 PM	H2 MFC set to  0.000000
7/29/2011	4:16:00 PM	BCl3 MFC set to  0.000000
7/29/2011	4:16:00 PM	PHl3 MFC set to  0.000000
7/29/2011	4:16:00 PM	SiCl4 MFC set to  0.000000
7/29/2011	4:16:00 PM	Bypass solenoid MFC set to  0.000000
7/29/2011	4:16:00 PM	Tube furnace set to 150
7/29/2011	4:16:30 PM	H2 valve closed
7/29/2011	4:16:30 PM	BCl3 valve closed
7/29/2011	4:16:30 PM	PH3 valve closed
7/29/2011	4:16:30 PM	SiCl4 pre valve closed
7/29/2011	4:16:30 PM	SiCl4 post valve closed
7/29/2011	4:16:30 PM	Bypass valve closed
7/29/2011	4:16:30 PM	Bubbler valve closed
7/29/2011	4:16:30 PM	Helium valve opened
7/29/2011	4:16:30 PM	Main Vac valve opened
7/29/2011	4:16:30 PM	Helium MFC set to  20.000000
7/29/2011	4:16:30 PM	H2 MFC set to  0.000000
7/29/2011	4:16:30 PM	BCl3 MFC set to  0.000000
7/29/2011	4:16:30 PM	PHl3 MFC set to  0.000000
7/29/2011	4:16:30 PM	SiCl4 MFC set to  0.000000
7/29/2011	4:16:30 PM	Bypass solenoid MFC set to  0.000000
7/29/2011	4:16:30 PM	Tube furnace set to 150
7/29/2011	4:17:00 PM	Helium valve closed
7/29/2011	4:17:00 PM	H2 valve closed
7/29/2011	4:17:00 PM	BCl3 valve closed
7/29/2011	4:17:00 PM	PH3 valve closed
7/29/2011	4:17:00 PM	SiCl4 pre valve closed
7/29/2011	4:17:00 PM	SiCl4 post valve closed
7/29/2011	4:17:00 PM	Bypass valve closed
7/29/2011	4:17:00 PM	Bubbler valve closed
7/29/2011	4:17:00 PM	Main Vac valve opened
7/29/2011	4:17:00 PM	Helium MFC set to  0.000000
7/29/2011	4:17:00 PM	H2 MFC set to  0.000000
7/29/2011	4:17:00 PM	BCl3 MFC set to  0.000000
7/29/2011	4:17:00 PM	PHl3 MFC set to  0.000000
7/29/2011	4:17:00 PM	SiCl4 MFC set to  0.000000
7/29/2011	4:17:00 PM	Bypass solenoid MFC set to  0.000000
7/29/2011	4:17:01 PM	Tube furnace set to 150
7/29/2011	4:17:31 PM	H2 valve closed
7/29/2011	4:17:31 PM	BCl3 valve closed
7/29/2011	4:17:31 PM	PH3 valve closed
7/29/2011	4:17:31 PM	SiCl4 pre valve closed
7/29/2011	4:17:31 PM	SiCl4 post valve closed
7/29/2011	4:17:31 PM	Bypass valve closed
7/29/2011	4:17:31 PM	Bubbler valve closed
7/29/2011	4:17:31 PM	Helium valve opened
7/29/2011	4:17:31 PM	Main Vac valve opened
7/29/2011	4:17:31 PM	Helium MFC set to  20.000000
7/29/2011	4:17:31 PM	H2 MFC set to  0.000000
7/29/2011	4:17:31 PM	BCl3 MFC set to  0.000000
7/29/2011	4:17:31 PM	PHl3 MFC set to  0.000000
7/29/2011	4:17:31 PM	SiCl4 MFC set to  0.000000
7/29/2011	4:17:31 PM	Bypass solenoid MFC set to  0.000000
7/29/2011	4:17:31 PM	Tube furnace set to 150
7/29/2011	4:18:01 PM	Helium valve closed
7/29/2011	4:18:01 PM	H2 valve closed
7/29/2011	4:18:01 PM	BCl3 valve closed
7/29/2011	4:18:01 PM	PH3 valve closed
7/29/2011	4:18:01 PM	SiCl4 pre valve closed
7/29/2011	4:18:01 PM	SiCl4 post valve closed
7/29/2011	4:18:01 PM	Bypass valve closed
7/29/2011	4:18:01 PM	Bubbler valve closed
7/29/2011	4:18:01 PM	Main Vac valve opened
7/29/2011	4:18:01 PM	Helium MFC set to  0.000000
7/29/2011	4:18:01 PM	H2 MFC set to  0.000000
7/29/2011	4:18:01 PM	BCl3 MFC set to  0.000000
7/29/2011	4:18:01 PM	PHl3 MFC set to  0.000000
7/29/2011	4:18:01 PM	SiCl4 MFC set to  0.000000
7/29/2011	4:18:01 PM	Bypass solenoid MFC set to  0.000000
7/29/2011	4:18:01 PM	Tube furnace set to 150
7/29/2011	4:18:31 PM	H2 valve closed
7/29/2011	4:18:31 PM	BCl3 valve closed
7/29/2011	4:18:31 PM	PH3 valve closed
7/29/2011	4:18:31 PM	SiCl4 pre valve closed
7/29/2011	4:18:31 PM	SiCl4 post valve closed
7/29/2011	4:18:31 PM	Bypass valve closed
7/29/2011	4:18:31 PM	Bubbler valve closed
7/29/2011	4:18:31 PM	Helium valve opened
7/29/2011	4:18:31 PM	Main Vac valve opened
7/29/2011	4:18:31 PM	Helium MFC set to  20.000000
7/29/2011	4:18:31 PM	H2 MFC set to  0.000000
7/29/2011	4:18:31 PM	BCl3 MFC set to  0.000000
7/29/2011	4:18:31 PM	PHl3 MFC set to  0.000000
7/29/2011	4:18:31 PM	SiCl4 MFC set to  0.000000
7/29/2011	4:18:31 PM	Bypass solenoid MFC set to  0.000000
7/29/2011	4:18:31 PM	Tube furnace set to 150
7/29/2011	4:19:01 PM	Helium valve closed
7/29/2011	4:19:01 PM	H2 valve closed
7/29/2011	4:19:01 PM	BCl3 valve closed
7/29/2011	4:19:01 PM	PH3 valve closed
7/29/2011	4:19:01 PM	SiCl4 pre valve closed
7/29/2011	4:19:01 PM	SiCl4 post valve closed
7/29/2011	4:19:01 PM	Bypass valve closed
7/29/2011	4:19:01 PM	Bubbler valve closed
7/29/2011	4:19:01 PM	Main Vac valve opened
7/29/2011	4:19:01 PM	Helium MFC set to  0.000000
7/29/2011	4:19:01 PM	H2 MFC set to  0.000000
7/29/2011	4:19:01 PM	BCl3 MFC set to  0.000000
7/29/2011	4:19:01 PM	PHl3 MFC set to  0.000000
7/29/2011	4:19:01 PM	SiCl4 MFC set to  0.000000
7/29/2011	4:19:01 PM	Bypass solenoid MFC set to  0.000000
7/29/2011	4:19:02 PM	Tube furnace set to 150
7/29/2011	4:19:32 PM	H2 valve closed
7/29/2011	4:19:32 PM	BCl3 valve closed
7/29/2011	4:19:32 PM	PH3 valve closed
7/29/2011	4:19:32 PM	SiCl4 pre valve closed
7/29/2011	4:19:32 PM	SiCl4 post valve closed
7/29/2011	4:19:32 PM	Bypass valve closed
7/29/2011	4:19:32 PM	Bubbler valve closed
7/29/2011	4:19:32 PM	Helium valve opened
7/29/2011	4:19:32 PM	Main Vac valve opened
7/29/2011	4:19:32 PM	Helium MFC set to  20.000000
7/29/2011	4:19:32 PM	H2 MFC set to  0.000000
7/29/2011	4:19:32 PM	BCl3 MFC set to  0.000000
7/29/2011	4:19:32 PM	PHl3 MFC set to  0.000000
7/29/2011	4:19:32 PM	SiCl4 MFC set to  0.000000
7/29/2011	4:19:32 PM	Bypass solenoid MFC set to  0.000000
7/29/2011	4:19:32 PM	Tube furnace set to 150
7/29/2011	4:20:02 PM	Helium valve closed
7/29/2011	4:20:02 PM	H2 valve closed
7/29/2011	4:20:02 PM	BCl3 valve closed
7/29/2011	4:20:02 PM	PH3 valve closed
7/29/2011	4:20:02 PM	SiCl4 pre valve closed
7/29/2011	4:20:02 PM	SiCl4 post valve closed
7/29/2011	4:20:02 PM	Bypass valve closed
7/29/2011	4:20:02 PM	Bubbler valve closed
7/29/2011	4:20:02 PM	Main Vac valve opened
7/29/2011	4:20:02 PM	Helium MFC set to  0.000000
7/29/2011	4:20:02 PM	H2 MFC set to  0.000000
7/29/2011	4:20:02 PM	BCl3 MFC set to  0.000000
7/29/2011	4:20:02 PM	PHl3 MFC set to  0.000000
7/29/2011	4:20:02 PM	SiCl4 MFC set to  0.000000
7/29/2011	4:20:02 PM	Bypass solenoid MFC set to  0.000000
7/29/2011	4:20:02 PM	Tube furnace set to 150
7/29/2011	4:20:32 PM	H2 valve closed
7/29/2011	4:20:32 PM	BCl3 valve closed
7/29/2011	4:20:32 PM	PH3 valve closed
7/29/2011	4:20:32 PM	SiCl4 pre valve closed
7/29/2011	4:20:32 PM	SiCl4 post valve closed
7/29/2011	4:20:32 PM	Bypass valve closed
7/29/2011	4:20:32 PM	Bubbler valve closed
7/29/2011	4:20:32 PM	Helium valve opened
7/29/2011	4:20:32 PM	Main Vac valve opened
7/29/2011	4:20:32 PM	Helium MFC set to  20.000000
7/29/2011	4:20:32 PM	H2 MFC set to  0.000000
7/29/2011	4:20:32 PM	BCl3 MFC set to  0.000000
7/29/2011	4:20:32 PM	PHl3 MFC set to  0.000000
7/29/2011	4:20:32 PM	SiCl4 MFC set to  0.000000
7/29/2011	4:20:32 PM	Bypass solenoid MFC set to  0.000000
7/29/2011	4:20:32 PM	Tube furnace set to 150
7/29/2011	4:21:02 PM	Helium valve closed
7/29/2011	4:21:02 PM	H2 valve closed
7/29/2011	4:21:02 PM	BCl3 valve closed
7/29/2011	4:21:02 PM	PH3 valve closed
7/29/2011	4:21:02 PM	SiCl4 pre valve closed
7/29/2011	4:21:02 PM	SiCl4 post valve closed
7/29/2011	4:21:02 PM	Bypass valve closed
7/29/2011	4:21:02 PM	Bubbler valve closed
7/29/2011	4:21:02 PM	Main Vac valve opened
7/29/2011	4:21:02 PM	Helium MFC set to  0.000000
7/29/2011	4:21:02 PM	H2 MFC set to  0.000000
7/29/2011	4:21:02 PM	BCl3 MFC set to  0.000000
7/29/2011	4:21:02 PM	PHl3 MFC set to  0.000000
7/29/2011	4:21:02 PM	SiCl4 MFC set to  0.000000
7/29/2011	4:21:02 PM	Bypass solenoid MFC set to  0.000000
7/29/2011	4:21:02 PM	Tube furnace set to 150
7/29/2011	4:21:03 PM	Run finished at 4:21 PM
7/29/2011	4:33:33 PM	Helium MFC set to  20.000000
7/29/2011	4:33:34 PM	Helium valve opened
7/29/2011	4:40:54 PM	Helium valve closed
7/29/2011	4:40:57 PM	Helium MFC set to  0.000000
7/29/2011	4:41:47 PM	Recipe started at 4:41 PM
7/29/2011	4:41:47 PM	Helium valve closed
7/29/2011	4:41:47 PM	H2 valve closed
7/29/2011	4:41:47 PM	BCl3 valve closed
7/29/2011	4:41:47 PM	PH3 valve closed
7/29/2011	4:41:47 PM	SiCl4 pre valve closed
7/29/2011	4:41:47 PM	SiCl4 post valve closed
7/29/2011	4:41:47 PM	Main Vac valve closed
7/29/2011	4:41:47 PM	Bypass valve closed
7/29/2011	4:41:47 PM	Bubbler valve closed
7/29/2011	4:41:47 PM	Helium MFC set to  0.000000
7/29/2011	4:41:47 PM	H2 MFC set to  0.000000
7/29/2011	4:41:47 PM	BCl3 MFC set to  0.000000
7/29/2011	4:41:47 PM	PHl3 MFC set to  0.000000
7/29/2011	4:41:47 PM	SiCl4 MFC set to  0.000000
7/29/2011	4:41:47 PM	Bypass solenoid MFC set to  0.000000
7/29/2011	4:41:48 PM	Tube furnace set to 0
7/29/2011	4:41:51 PM	Helium valve closed
7/29/2011	4:41:51 PM	BCl3 valve closed
7/29/2011	4:41:51 PM	PH3 valve closed
7/29/2011	4:41:51 PM	SiCl4 pre valve closed
7/29/2011	4:41:51 PM	SiCl4 post valve closed
7/29/2011	4:41:51 PM	Main Vac valve closed
7/29/2011	4:41:51 PM	Bypass valve closed
7/29/2011	4:41:51 PM	Bubbler valve closed
7/29/2011	4:41:51 PM	H2 valve opened
7/29/2011	4:41:51 PM	Helium MFC set to  0.000000
7/29/2011	4:41:51 PM	H2 MFC set to  500.000000
7/29/2011	4:41:51 PM	BCl3 MFC set to  0.000000
7/29/2011	4:41:51 PM	PHl3 MFC set to  0.000000
7/29/2011	4:41:51 PM	SiCl4 MFC set to  0.000000
7/29/2011	4:41:51 PM	Bypass solenoid MFC set to  0.000000
7/29/2011	4:41:51 PM	Tube furnace set to 0
7/29/2011	4:42:54 PM	Helium valve closed
7/29/2011	4:42:54 PM	BCl3 valve closed
7/29/2011	4:42:54 PM	PH3 valve closed
7/29/2011	4:42:54 PM	SiCl4 pre valve closed
7/29/2011	4:42:54 PM	SiCl4 post valve closed
7/29/2011	4:42:54 PM	Main Vac valve closed
7/29/2011	4:42:54 PM	Bypass valve closed
7/29/2011	4:42:54 PM	H2 valve opened
7/29/2011	4:42:54 PM	Bubbler valve opened
7/29/2011	4:42:54 PM	Helium MFC set to  0.000000
7/29/2011	4:42:54 PM	H2 MFC set to  500.000000
7/29/2011	4:42:54 PM	BCl3 MFC set to  0.000000
7/29/2011	4:42:54 PM	PHl3 MFC set to  0.000000
7/29/2011	4:42:54 PM	SiCl4 MFC set to  0.000000
7/29/2011	4:42:54 PM	Bypass solenoid MFC set to  0.000000
7/29/2011	4:42:54 PM	Tube furnace set to 0
7/29/2011	4:42:55 PM	Helium valve closed
7/29/2011	4:42:55 PM	BCl3 valve closed
7/29/2011	4:42:55 PM	PH3 valve closed
7/29/2011	4:42:55 PM	SiCl4 pre valve closed
7/29/2011	4:42:55 PM	SiCl4 post valve closed
7/29/2011	4:42:55 PM	Main Vac valve closed
7/29/2011	4:42:55 PM	Bypass valve closed
7/29/2011	4:42:55 PM	H2 valve opened
7/29/2011	4:42:55 PM	Bubbler valve opened
7/29/2011	4:42:55 PM	Helium MFC set to  0.000000
7/29/2011	4:42:55 PM	H2 MFC set to  500.000000
7/29/2011	4:42:55 PM	BCl3 MFC set to  0.000000
7/29/2011	4:42:55 PM	PHl3 MFC set to  0.000000
7/29/2011	4:42:55 PM	SiCl4 MFC set to  0.000000
7/29/2011	4:42:55 PM	Bypass solenoid MFC set to  0.000000
7/29/2011	4:42:55 PM	Tube furnace set to 1000
7/29/2011	5:02:55 PM	Helium valve closed
7/29/2011	5:02:55 PM	PH3 valve closed
7/29/2011	5:02:55 PM	Main Vac valve closed
7/29/2011	5:02:55 PM	Bypass valve closed
7/29/2011	5:02:55 PM	H2 valve opened
7/29/2011	5:02:55 PM	BCl3 valve opened
7/29/2011	5:02:55 PM	SiCl4 pre valve opened
7/29/2011	5:02:55 PM	SiCl4 post valve opened
7/29/2011	5:02:55 PM	Bubbler valve opened
7/29/2011	5:02:55 PM	Helium MFC set to  0.000000
7/29/2011	5:02:55 PM	H2 MFC set to  500.000000
7/29/2011	5:02:55 PM	BCl3 MFC set to  2.000000
7/29/2011	5:02:55 PM	PHl3 MFC set to  0.000000
7/29/2011	5:02:55 PM	SiCl4 MFC set to  50.000000
7/29/2011	5:02:55 PM	Bypass solenoid MFC set to  0.000000
7/29/2011	5:02:55 PM	Tube furnace set to 1000
7/29/2011	5:19:35 PM	Helium valve closed
7/29/2011	5:19:35 PM	BCl3 valve closed
7/29/2011	5:19:35 PM	PH3 valve closed
7/29/2011	5:19:35 PM	SiCl4 pre valve closed
7/29/2011	5:19:35 PM	SiCl4 post valve closed
7/29/2011	5:19:35 PM	Main Vac valve closed
7/29/2011	5:19:35 PM	Bypass valve closed
7/29/2011	5:19:35 PM	H2 valve opened
7/29/2011	5:19:35 PM	Bubbler valve opened
7/29/2011	5:19:35 PM	Helium MFC set to  0.000000
7/29/2011	5:19:35 PM	H2 MFC set to  500.000000
7/29/2011	5:19:35 PM	BCl3 MFC set to  0.000000
7/29/2011	5:19:35 PM	PHl3 MFC set to  0.000000
7/29/2011	5:19:35 PM	SiCl4 MFC set to  0.000000
7/29/2011	5:19:35 PM	Bypass solenoid MFC set to  0.000000
7/29/2011	5:19:36 PM	Tube furnace set to 750
7/29/2011	5:24:36 PM	H2 valve closed
7/29/2011	5:24:36 PM	BCl3 valve closed
7/29/2011	5:24:36 PM	PH3 valve closed
7/29/2011	5:24:36 PM	SiCl4 pre valve closed
7/29/2011	5:24:36 PM	SiCl4 post valve closed
7/29/2011	5:24:36 PM	Main Vac valve closed
7/29/2011	5:24:36 PM	Bypass valve closed
7/29/2011	5:24:36 PM	Helium valve opened
7/29/2011	5:24:36 PM	Bubbler valve opened
7/29/2011	5:24:36 PM	Helium MFC set to  500.000000
7/29/2011	5:24:36 PM	H2 MFC set to  0.000000
7/29/2011	5:24:36 PM	BCl3 MFC set to  0.000000
7/29/2011	5:24:36 PM	PHl3 MFC set to  0.000000
7/29/2011	5:24:36 PM	SiCl4 MFC set to  0.000000
7/29/2011	5:24:36 PM	Bypass solenoid MFC set to  0.000000
7/29/2011	5:24:36 PM	Tube furnace set to 0
7/29/2011	5:31:22 PM	Run aborted at 5:31 PM
7/29/2011	5:31:22 PM	Helium valve closed
7/29/2011	5:31:22 PM	H2 valve closed
7/29/2011	5:31:22 PM	BCl3 valve closed
7/29/2011	5:31:22 PM	PH3 valve closed
7/29/2011	5:31:22 PM	SiCl4 pre valve closed
7/29/2011	5:31:22 PM	SiCl4 post valve closed
7/29/2011	5:31:22 PM	Bypass valve closed
7/29/2011	5:31:22 PM	Main Vac valve closed
7/29/2011	5:31:22 PM	Bubbler valve closed
7/29/2011	5:31:22 PM	Helium MFC set to  0.000000
7/29/2011	5:31:22 PM	H2 MFC set to  0.000000
7/29/2011	5:31:22 PM	BCl3 MFC set to  0.000000
7/29/2011	5:31:22 PM	PHl3 MFC set to  0.000000
7/29/2011	5:31:22 PM	SiCl4 MFC set to  0.000000
7/29/2011	5:31:22 PM	Tube furnace set to 0
7/29/2011	5:31:23 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/29/2011	5:31:24 PM	Recipe started at 5:31 PM
7/29/2011	5:31:24 PM	Helium valve closed
7/29/2011	5:31:24 PM	H2 valve closed
7/29/2011	5:31:24 PM	BCl3 valve closed
7/29/2011	5:31:24 PM	PH3 valve closed
7/29/2011	5:31:24 PM	SiCl4 pre valve closed
7/29/2011	5:31:24 PM	SiCl4 post valve closed
7/29/2011	5:31:24 PM	Main Vac valve closed
7/29/2011	5:31:24 PM	Bypass valve closed
7/29/2011	5:31:24 PM	Bubbler valve closed
7/29/2011	5:31:24 PM	Helium MFC set to  0.000000
7/29/2011	5:31:24 PM	H2 MFC set to  0.000000
7/29/2011	5:31:24 PM	BCl3 MFC set to  0.000000
7/29/2011	5:31:24 PM	PHl3 MFC set to  0.000000
7/29/2011	5:31:24 PM	SiCl4 MFC set to  0.000000
7/29/2011	5:31:24 PM	Bypass solenoid MFC set to  0.000000
7/29/2011	5:31:24 PM	Tube furnace set to 0
7/29/2011	5:31:27 PM	H2 valve closed
7/29/2011	5:31:27 PM	BCl3 valve closed
7/29/2011	5:31:27 PM	PH3 valve closed
7/29/2011	5:31:27 PM	SiCl4 pre valve closed
7/29/2011	5:31:27 PM	SiCl4 post valve closed
7/29/2011	5:31:27 PM	Main Vac valve closed
7/29/2011	5:31:27 PM	Bypass valve closed
7/29/2011	5:31:27 PM	Bubbler valve closed
7/29/2011	5:31:27 PM	Helium valve opened
7/29/2011	5:31:27 PM	Helium MFC set to  500.000000
7/29/2011	5:31:27 PM	H2 MFC set to  0.000000
7/29/2011	5:31:27 PM	BCl3 MFC set to  0.000000
7/29/2011	5:31:27 PM	PHl3 MFC set to  0.000000
7/29/2011	5:31:27 PM	SiCl4 MFC set to  0.000000
7/29/2011	5:31:27 PM	Bypass solenoid MFC set to  0.000000
7/29/2011	5:31:28 PM	Tube furnace set to 0
7/29/2011	5:31:28 PM	Helium valve closed
7/29/2011	5:31:28 PM	H2 valve closed
7/29/2011	5:31:28 PM	BCl3 valve closed
7/29/2011	5:31:28 PM	PH3 valve closed
7/29/2011	5:31:28 PM	SiCl4 pre valve closed
7/29/2011	5:31:28 PM	SiCl4 post valve closed
7/29/2011	5:31:28 PM	Main Vac valve closed
7/29/2011	5:31:28 PM	Bypass valve closed
7/29/2011	5:31:28 PM	Bubbler valve closed
7/29/2011	5:31:28 PM	Helium MFC set to  0.000000
7/29/2011	5:31:28 PM	H2 MFC set to  0.000000
7/29/2011	5:31:28 PM	BCl3 MFC set to  0.000000
7/29/2011	5:31:28 PM	PHl3 MFC set to  0.000000
7/29/2011	5:31:28 PM	SiCl4 MFC set to  0.000000
7/29/2011	5:31:28 PM	Bypass solenoid MFC set to  0.000000
7/29/2011	5:31:28 PM	Tube furnace set to 0
7/29/2011	5:31:29 PM	Run finished at 5:31 PM
7/29/2011	5:31:29 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/29/2011	5:41:06 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/29/2011	5:41:07 PM	Recipe started at 5:41 PM
7/29/2011	5:41:07 PM	Helium valve closed
7/29/2011	5:41:07 PM	H2 valve closed
7/29/2011	5:41:07 PM	BCl3 valve closed
7/29/2011	5:41:07 PM	PH3 valve closed
7/29/2011	5:41:07 PM	SiCl4 pre valve closed
7/29/2011	5:41:07 PM	SiCl4 post valve closed
7/29/2011	5:41:07 PM	Main Vac valve closed
7/29/2011	5:41:07 PM	Bubbler valve closed
7/29/2011	5:41:07 PM	Bypass valve opened
7/29/2011	5:41:07 PM	Helium MFC set to  0.000000
7/29/2011	5:41:07 PM	H2 MFC set to  0.000000
7/29/2011	5:41:07 PM	BCl3 MFC set to  0.000000
7/29/2011	5:41:07 PM	PHl3 MFC set to  0.000000
7/29/2011	5:41:07 PM	SiCl4 MFC set to  0.000000
7/29/2011	5:41:07 PM	Bypass solenoid MFC set to  0.000000
7/29/2011	5:41:07 PM	Tube furnace set to 0
7/29/2011	5:41:32 PM	Run aborted at 5:41 PM
7/29/2011	5:41:32 PM	Helium valve closed
7/29/2011	5:41:32 PM	H2 valve closed
7/29/2011	5:41:32 PM	BCl3 valve closed
7/29/2011	5:41:32 PM	PH3 valve closed
7/29/2011	5:41:32 PM	SiCl4 pre valve closed
7/29/2011	5:41:32 PM	SiCl4 post valve closed
7/29/2011	5:41:32 PM	Bypass valve closed
7/29/2011	5:41:32 PM	Main Vac valve closed
7/29/2011	5:41:32 PM	Bubbler valve closed
7/29/2011	5:41:32 PM	Helium MFC set to  0.000000
7/29/2011	5:41:32 PM	H2 MFC set to  0.000000
7/29/2011	5:41:32 PM	BCl3 MFC set to  0.000000
7/29/2011	5:41:32 PM	PHl3 MFC set to  0.000000
7/29/2011	5:41:32 PM	SiCl4 MFC set to  0.000000
7/29/2011	5:41:32 PM	Tube furnace set to 0
7/29/2011	5:41:32 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/29/2011	5:41:48 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/29/2011	5:41:49 PM	Recipe started at 5:41 PM
7/29/2011	5:41:49 PM	Helium valve closed
7/29/2011	5:41:49 PM	H2 valve closed
7/29/2011	5:41:49 PM	BCl3 valve closed
7/29/2011	5:41:49 PM	PH3 valve closed
7/29/2011	5:41:49 PM	SiCl4 pre valve closed
7/29/2011	5:41:49 PM	SiCl4 post valve closed
7/29/2011	5:41:49 PM	Main Vac valve closed
7/29/2011	5:41:49 PM	Bubbler valve closed
7/29/2011	5:41:49 PM	Bypass valve opened
7/29/2011	5:41:49 PM	Helium MFC set to  0.000000
7/29/2011	5:41:49 PM	H2 MFC set to  0.000000
7/29/2011	5:41:49 PM	BCl3 MFC set to  0.000000
7/29/2011	5:41:49 PM	PHl3 MFC set to  0.000000
7/29/2011	5:41:49 PM	SiCl4 MFC set to  0.000000
7/29/2011	5:41:49 PM	Bypass solenoid MFC set to  0.000000
7/29/2011	5:41:49 PM	Tube furnace set to 0
7/29/2011	5:42:34 PM	Run aborted at 5:42 PM
7/29/2011	5:42:34 PM	Helium valve closed
7/29/2011	5:42:34 PM	H2 valve closed
7/29/2011	5:42:34 PM	BCl3 valve closed
7/29/2011	5:42:34 PM	PH3 valve closed
7/29/2011	5:42:34 PM	SiCl4 pre valve closed
7/29/2011	5:42:34 PM	SiCl4 post valve closed
7/29/2011	5:42:34 PM	Bypass valve closed
7/29/2011	5:42:34 PM	Main Vac valve closed
7/29/2011	5:42:34 PM	Bubbler valve closed
7/29/2011	5:42:34 PM	Helium MFC set to  0.000000
7/29/2011	5:42:34 PM	H2 MFC set to  0.000000
7/29/2011	5:42:34 PM	BCl3 MFC set to  0.000000
7/29/2011	5:42:34 PM	PHl3 MFC set to  0.000000
7/29/2011	5:42:34 PM	SiCl4 MFC set to  0.000000
7/29/2011	5:42:34 PM	Tube furnace set to 0
7/29/2011	5:42:34 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/29/2011	5:42:42 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/29/2011	5:42:43 PM	Recipe started at 5:42 PM
7/29/2011	5:42:43 PM	Helium valve closed
7/29/2011	5:42:43 PM	H2 valve closed
7/29/2011	5:42:43 PM	BCl3 valve closed
7/29/2011	5:42:43 PM	PH3 valve closed
7/29/2011	5:42:43 PM	SiCl4 pre valve closed
7/29/2011	5:42:43 PM	SiCl4 post valve closed
7/29/2011	5:42:43 PM	Main Vac valve closed
7/29/2011	5:42:43 PM	Bubbler valve closed
7/29/2011	5:42:43 PM	Bypass valve opened
7/29/2011	5:42:43 PM	Helium MFC set to  0.000000
7/29/2011	5:42:43 PM	H2 MFC set to  0.000000
7/29/2011	5:42:43 PM	BCl3 MFC set to  0.000000
7/29/2011	5:42:43 PM	PHl3 MFC set to  0.000000
7/29/2011	5:42:43 PM	SiCl4 MFC set to  0.000000
7/29/2011	5:42:43 PM	Bypass solenoid MFC set to  0.000000
7/29/2011	5:42:43 PM	Tube furnace set to 0
7/29/2011	5:50:54 PM	Helium valve closed
7/29/2011	5:50:54 PM	H2 valve closed
7/29/2011	5:50:54 PM	BCl3 valve closed
7/29/2011	5:50:54 PM	PH3 valve closed
7/29/2011	5:50:54 PM	SiCl4 pre valve closed
7/29/2011	5:50:54 PM	SiCl4 post valve closed
7/29/2011	5:50:54 PM	Main Vac valve closed
7/29/2011	5:50:54 PM	Bubbler valve closed
7/29/2011	5:50:54 PM	Bypass valve opened
7/29/2011	5:50:54 PM	Helium MFC set to  0.000000
7/29/2011	5:50:54 PM	H2 MFC set to  0.000000
7/29/2011	5:50:54 PM	BCl3 MFC set to  0.000000
7/29/2011	5:50:54 PM	PHl3 MFC set to  0.000000
7/29/2011	5:50:54 PM	SiCl4 MFC set to  0.000000
7/29/2011	5:50:54 PM	Bypass solenoid MFC set to  0.000000
7/29/2011	5:50:54 PM	Tube furnace set to 0
7/29/2011	5:51:54 PM	Helium valve closed
7/29/2011	5:51:54 PM	H2 valve closed
7/29/2011	5:51:54 PM	BCl3 valve closed
7/29/2011	5:51:54 PM	PH3 valve closed
7/29/2011	5:51:54 PM	SiCl4 pre valve closed
7/29/2011	5:51:54 PM	SiCl4 post valve closed
7/29/2011	5:51:54 PM	Bypass valve closed
7/29/2011	5:51:54 PM	Bubbler valve closed
7/29/2011	5:51:54 PM	Main Vac valve opened
7/29/2011	5:51:54 PM	Helium MFC set to  0.000000
7/29/2011	5:51:54 PM	H2 MFC set to  0.000000
7/29/2011	5:51:54 PM	BCl3 MFC set to  0.000000
7/29/2011	5:51:54 PM	PHl3 MFC set to  0.000000
7/29/2011	5:51:54 PM	SiCl4 MFC set to  0.000000
7/29/2011	5:51:54 PM	Bypass solenoid MFC set to  0.000000
7/29/2011	5:51:54 PM	Tube furnace set to 0
7/29/2011	5:51:55 PM	Run finished at 5:51 PM
7/29/2011	5:51:55 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/29/2011	5:54:21 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/29/2011	5:54:22 PM	Recipe started at 5:54 PM
7/29/2011	5:54:22 PM	Helium valve closed
7/29/2011	5:54:22 PM	H2 valve closed
7/29/2011	5:54:22 PM	BCl3 valve closed
7/29/2011	5:54:22 PM	PH3 valve closed
7/29/2011	5:54:22 PM	SiCl4 pre valve closed
7/29/2011	5:54:22 PM	SiCl4 post valve closed
7/29/2011	5:54:22 PM	Main Vac valve closed
7/29/2011	5:54:22 PM	Bubbler valve closed
7/29/2011	5:54:22 PM	Bypass valve opened
7/29/2011	5:54:22 PM	Helium MFC set to  0.000000
7/29/2011	5:54:22 PM	H2 MFC set to  0.000000
7/29/2011	5:54:22 PM	BCl3 MFC set to  0.000000
7/29/2011	5:54:22 PM	PHl3 MFC set to  0.000000
7/29/2011	5:54:22 PM	SiCl4 MFC set to  0.000000
7/29/2011	5:54:22 PM	Bypass solenoid MFC set to  0.000000
7/29/2011	5:54:22 PM	Tube furnace set to 0
7/29/2011	5:54:22 PM	Helium valve closed
7/29/2011	5:54:22 PM	H2 valve closed
7/29/2011	5:54:22 PM	BCl3 valve closed
7/29/2011	5:54:22 PM	PH3 valve closed
7/29/2011	5:54:22 PM	SiCl4 pre valve closed
7/29/2011	5:54:22 PM	SiCl4 post valve closed
7/29/2011	5:54:22 PM	Main Vac valve closed
7/29/2011	5:54:22 PM	Bubbler valve closed
7/29/2011	5:54:22 PM	Bypass valve opened
7/29/2011	5:54:22 PM	Helium MFC set to  0.000000
7/29/2011	5:54:22 PM	H2 MFC set to  0.000000
7/29/2011	5:54:22 PM	BCl3 MFC set to  0.000000
7/29/2011	5:54:22 PM	PHl3 MFC set to  0.000000
7/29/2011	5:54:22 PM	SiCl4 MFC set to  0.000000
7/29/2011	5:54:22 PM	Bypass solenoid MFC set to  0.000000
7/29/2011	5:54:22 PM	Tube furnace set to 0
7/29/2011	5:55:22 PM	Helium valve closed
7/29/2011	5:55:22 PM	H2 valve closed
7/29/2011	5:55:22 PM	BCl3 valve closed
7/29/2011	5:55:22 PM	PH3 valve closed
7/29/2011	5:55:22 PM	SiCl4 pre valve closed
7/29/2011	5:55:22 PM	SiCl4 post valve closed
7/29/2011	5:55:22 PM	Bypass valve closed
7/29/2011	5:55:22 PM	Bubbler valve closed
7/29/2011	5:55:22 PM	Main Vac valve opened
7/29/2011	5:55:22 PM	Helium MFC set to  0.000000
7/29/2011	5:55:22 PM	H2 MFC set to  0.000000
7/29/2011	5:55:22 PM	BCl3 MFC set to  0.000000
7/29/2011	5:55:22 PM	PHl3 MFC set to  0.000000
7/29/2011	5:55:22 PM	SiCl4 MFC set to  0.000000
7/29/2011	5:55:22 PM	Bypass solenoid MFC set to  0.000000
7/29/2011	5:55:23 PM	Tube furnace set to 0
7/29/2011	5:55:24 PM	Run finished at 5:55 PM
7/29/2011	5:55:24 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/29/2011	5:58:40 PM	Helium MFC set to  20.000000
7/29/2011	5:58:42 PM	Helium valve opened
7/29/2011	6:10:08 PM	Helium valve closed
7/29/2011	6:10:13 PM	Helium MFC set to  20.000000
7/29/2011	6:10:38 PM	Recipe started at 6:10 PM
7/29/2011	6:10:38 PM	Helium valve closed
7/29/2011	6:10:38 PM	H2 valve closed
7/29/2011	6:10:38 PM	BCl3 valve closed
7/29/2011	6:10:38 PM	PH3 valve closed
7/29/2011	6:10:38 PM	SiCl4 pre valve closed
7/29/2011	6:10:38 PM	SiCl4 post valve closed
7/29/2011	6:10:38 PM	Bypass valve closed
7/29/2011	6:10:38 PM	Bubbler valve closed
7/29/2011	6:10:38 PM	Main Vac valve opened
7/29/2011	6:10:38 PM	Helium MFC set to  0.000000
7/29/2011	6:10:38 PM	H2 MFC set to  0.000000
7/29/2011	6:10:38 PM	BCl3 MFC set to  0.000000
7/29/2011	6:10:38 PM	PHl3 MFC set to  0.000000
7/29/2011	6:10:38 PM	SiCl4 MFC set to  0.000000
7/29/2011	6:10:38 PM	Bypass solenoid MFC set to  0.000000
7/29/2011	6:10:38 PM	Tube furnace set to 150
7/29/2011	6:11:08 PM	H2 valve closed
7/29/2011	6:11:08 PM	BCl3 valve closed
7/29/2011	6:11:08 PM	PH3 valve closed
7/29/2011	6:11:08 PM	SiCl4 pre valve closed
7/29/2011	6:11:08 PM	SiCl4 post valve closed
7/29/2011	6:11:08 PM	Bypass valve closed
7/29/2011	6:11:08 PM	Bubbler valve closed
7/29/2011	6:11:08 PM	Helium valve opened
7/29/2011	6:11:08 PM	Main Vac valve opened
7/29/2011	6:11:08 PM	Helium MFC set to  20.000000
7/29/2011	6:11:08 PM	H2 MFC set to  0.000000
7/29/2011	6:11:08 PM	BCl3 MFC set to  0.000000
7/29/2011	6:11:08 PM	PHl3 MFC set to  0.000000
7/29/2011	6:11:08 PM	SiCl4 MFC set to  0.000000
7/29/2011	6:11:08 PM	Bypass solenoid MFC set to  0.000000
7/29/2011	6:11:08 PM	Tube furnace set to 150
7/29/2011	6:11:38 PM	Helium valve closed
7/29/2011	6:11:38 PM	H2 valve closed
7/29/2011	6:11:38 PM	BCl3 valve closed
7/29/2011	6:11:38 PM	PH3 valve closed
7/29/2011	6:11:38 PM	SiCl4 pre valve closed
7/29/2011	6:11:38 PM	SiCl4 post valve closed
7/29/2011	6:11:38 PM	Bypass valve closed
7/29/2011	6:11:38 PM	Bubbler valve closed
7/29/2011	6:11:38 PM	Main Vac valve opened
7/29/2011	6:11:38 PM	Helium MFC set to  0.000000
7/29/2011	6:11:38 PM	H2 MFC set to  0.000000
7/29/2011	6:11:38 PM	BCl3 MFC set to  0.000000
7/29/2011	6:11:38 PM	PHl3 MFC set to  0.000000
7/29/2011	6:11:38 PM	SiCl4 MFC set to  0.000000
7/29/2011	6:11:38 PM	Bypass solenoid MFC set to  0.000000
7/29/2011	6:11:38 PM	Tube furnace set to 150
7/29/2011	6:12:08 PM	H2 valve closed
7/29/2011	6:12:08 PM	BCl3 valve closed
7/29/2011	6:12:08 PM	PH3 valve closed
7/29/2011	6:12:08 PM	SiCl4 pre valve closed
7/29/2011	6:12:08 PM	SiCl4 post valve closed
7/29/2011	6:12:08 PM	Bypass valve closed
7/29/2011	6:12:08 PM	Bubbler valve closed
7/29/2011	6:12:08 PM	Helium valve opened
7/29/2011	6:12:08 PM	Main Vac valve opened
7/29/2011	6:12:08 PM	Helium MFC set to  20.000000
7/29/2011	6:12:08 PM	H2 MFC set to  0.000000
7/29/2011	6:12:08 PM	BCl3 MFC set to  0.000000
7/29/2011	6:12:08 PM	PHl3 MFC set to  0.000000
7/29/2011	6:12:08 PM	SiCl4 MFC set to  0.000000
7/29/2011	6:12:08 PM	Bypass solenoid MFC set to  0.000000
7/29/2011	6:12:08 PM	Tube furnace set to 150
7/29/2011	6:12:38 PM	Helium valve closed
7/29/2011	6:12:38 PM	H2 valve closed
7/29/2011	6:12:38 PM	BCl3 valve closed
7/29/2011	6:12:38 PM	PH3 valve closed
7/29/2011	6:12:38 PM	SiCl4 pre valve closed
7/29/2011	6:12:38 PM	SiCl4 post valve closed
7/29/2011	6:12:38 PM	Bypass valve closed
7/29/2011	6:12:38 PM	Bubbler valve closed
7/29/2011	6:12:38 PM	Main Vac valve opened
7/29/2011	6:12:38 PM	Helium MFC set to  0.000000
7/29/2011	6:12:38 PM	H2 MFC set to  0.000000
7/29/2011	6:12:38 PM	BCl3 MFC set to  0.000000
7/29/2011	6:12:38 PM	PHl3 MFC set to  0.000000
7/29/2011	6:12:38 PM	SiCl4 MFC set to  0.000000
7/29/2011	6:12:38 PM	Bypass solenoid MFC set to  0.000000
7/29/2011	6:12:39 PM	Tube furnace set to 150
7/29/2011	6:13:09 PM	H2 valve closed
7/29/2011	6:13:09 PM	BCl3 valve closed
7/29/2011	6:13:09 PM	PH3 valve closed
7/29/2011	6:13:09 PM	SiCl4 pre valve closed
7/29/2011	6:13:09 PM	SiCl4 post valve closed
7/29/2011	6:13:09 PM	Bypass valve closed
7/29/2011	6:13:09 PM	Bubbler valve closed
7/29/2011	6:13:09 PM	Helium valve opened
7/29/2011	6:13:09 PM	Main Vac valve opened
7/29/2011	6:13:09 PM	Helium MFC set to  20.000000
7/29/2011	6:13:09 PM	H2 MFC set to  0.000000
7/29/2011	6:13:09 PM	BCl3 MFC set to  0.000000
7/29/2011	6:13:09 PM	PHl3 MFC set to  0.000000
7/29/2011	6:13:09 PM	SiCl4 MFC set to  0.000000
7/29/2011	6:13:09 PM	Bypass solenoid MFC set to  0.000000
7/29/2011	6:13:09 PM	Tube furnace set to 150
7/29/2011	6:13:39 PM	Helium valve closed
7/29/2011	6:13:39 PM	H2 valve closed
7/29/2011	6:13:39 PM	BCl3 valve closed
7/29/2011	6:13:39 PM	PH3 valve closed
7/29/2011	6:13:39 PM	SiCl4 pre valve closed
7/29/2011	6:13:39 PM	SiCl4 post valve closed
7/29/2011	6:13:39 PM	Bypass valve closed
7/29/2011	6:13:39 PM	Bubbler valve closed
7/29/2011	6:13:39 PM	Main Vac valve opened
7/29/2011	6:13:39 PM	Helium MFC set to  0.000000
7/29/2011	6:13:39 PM	H2 MFC set to  0.000000
7/29/2011	6:13:39 PM	BCl3 MFC set to  0.000000
7/29/2011	6:13:39 PM	PHl3 MFC set to  0.000000
7/29/2011	6:13:39 PM	SiCl4 MFC set to  0.000000
7/29/2011	6:13:39 PM	Bypass solenoid MFC set to  0.000000
7/29/2011	6:13:39 PM	Tube furnace set to 150
7/29/2011	6:14:09 PM	H2 valve closed
7/29/2011	6:14:09 PM	BCl3 valve closed
7/29/2011	6:14:09 PM	PH3 valve closed
7/29/2011	6:14:09 PM	SiCl4 pre valve closed
7/29/2011	6:14:09 PM	SiCl4 post valve closed
7/29/2011	6:14:09 PM	Bypass valve closed
7/29/2011	6:14:09 PM	Bubbler valve closed
7/29/2011	6:14:09 PM	Helium valve opened
7/29/2011	6:14:09 PM	Main Vac valve opened
7/29/2011	6:14:09 PM	Helium MFC set to  20.000000
7/29/2011	6:14:09 PM	H2 MFC set to  0.000000
7/29/2011	6:14:09 PM	BCl3 MFC set to  0.000000
7/29/2011	6:14:09 PM	PHl3 MFC set to  0.000000
7/29/2011	6:14:09 PM	SiCl4 MFC set to  0.000000
7/29/2011	6:14:09 PM	Bypass solenoid MFC set to  0.000000
7/29/2011	6:14:09 PM	Tube furnace set to 150
7/29/2011	6:14:39 PM	Helium valve closed
7/29/2011	6:14:39 PM	H2 valve closed
7/29/2011	6:14:39 PM	BCl3 valve closed
7/29/2011	6:14:39 PM	PH3 valve closed
7/29/2011	6:14:39 PM	SiCl4 pre valve closed
7/29/2011	6:14:39 PM	SiCl4 post valve closed
7/29/2011	6:14:39 PM	Bypass valve closed
7/29/2011	6:14:39 PM	Bubbler valve closed
7/29/2011	6:14:39 PM	Main Vac valve opened
7/29/2011	6:14:39 PM	Helium MFC set to  0.000000
7/29/2011	6:14:39 PM	H2 MFC set to  0.000000
7/29/2011	6:14:39 PM	BCl3 MFC set to  0.000000
7/29/2011	6:14:39 PM	PHl3 MFC set to  0.000000
7/29/2011	6:14:39 PM	SiCl4 MFC set to  0.000000
7/29/2011	6:14:39 PM	Bypass solenoid MFC set to  0.000000
7/29/2011	6:14:39 PM	Tube furnace set to 150
7/29/2011	6:15:09 PM	H2 valve closed
7/29/2011	6:15:09 PM	BCl3 valve closed
7/29/2011	6:15:09 PM	PH3 valve closed
7/29/2011	6:15:09 PM	SiCl4 pre valve closed
7/29/2011	6:15:09 PM	SiCl4 post valve closed
7/29/2011	6:15:09 PM	Bypass valve closed
7/29/2011	6:15:09 PM	Bubbler valve closed
7/29/2011	6:15:09 PM	Helium valve opened
7/29/2011	6:15:09 PM	Main Vac valve opened
7/29/2011	6:15:09 PM	Helium MFC set to  20.000000
7/29/2011	6:15:09 PM	H2 MFC set to  0.000000
7/29/2011	6:15:09 PM	BCl3 MFC set to  0.000000
7/29/2011	6:15:09 PM	PHl3 MFC set to  0.000000
7/29/2011	6:15:09 PM	SiCl4 MFC set to  0.000000
7/29/2011	6:15:09 PM	Bypass solenoid MFC set to  0.000000
7/29/2011	6:15:10 PM	Tube furnace set to 150
7/29/2011	6:15:40 PM	Helium valve closed
7/29/2011	6:15:40 PM	H2 valve closed
7/29/2011	6:15:40 PM	BCl3 valve closed
7/29/2011	6:15:40 PM	PH3 valve closed
7/29/2011	6:15:40 PM	SiCl4 pre valve closed
7/29/2011	6:15:40 PM	SiCl4 post valve closed
7/29/2011	6:15:40 PM	Bypass valve closed
7/29/2011	6:15:40 PM	Bubbler valve closed
7/29/2011	6:15:40 PM	Main Vac valve opened
7/29/2011	6:15:40 PM	Helium MFC set to  0.000000
7/29/2011	6:15:40 PM	H2 MFC set to  0.000000
7/29/2011	6:15:40 PM	BCl3 MFC set to  0.000000
7/29/2011	6:15:40 PM	PHl3 MFC set to  0.000000
7/29/2011	6:15:40 PM	SiCl4 MFC set to  0.000000
7/29/2011	6:15:40 PM	Bypass solenoid MFC set to  0.000000
7/29/2011	6:15:40 PM	Tube furnace set to 150
7/29/2011	6:16:10 PM	H2 valve closed
7/29/2011	6:16:10 PM	BCl3 valve closed
7/29/2011	6:16:10 PM	PH3 valve closed
7/29/2011	6:16:10 PM	SiCl4 pre valve closed
7/29/2011	6:16:10 PM	SiCl4 post valve closed
7/29/2011	6:16:10 PM	Bypass valve closed
7/29/2011	6:16:10 PM	Bubbler valve closed
7/29/2011	6:16:10 PM	Helium valve opened
7/29/2011	6:16:10 PM	Main Vac valve opened
7/29/2011	6:16:10 PM	Helium MFC set to  20.000000
7/29/2011	6:16:10 PM	H2 MFC set to  0.000000
7/29/2011	6:16:10 PM	BCl3 MFC set to  0.000000
7/29/2011	6:16:10 PM	PHl3 MFC set to  0.000000
7/29/2011	6:16:10 PM	SiCl4 MFC set to  0.000000
7/29/2011	6:16:10 PM	Bypass solenoid MFC set to  0.000000
7/29/2011	6:16:10 PM	Tube furnace set to 150
7/29/2011	6:16:40 PM	Helium valve closed
7/29/2011	6:16:40 PM	H2 valve closed
7/29/2011	6:16:40 PM	BCl3 valve closed
7/29/2011	6:16:40 PM	PH3 valve closed
7/29/2011	6:16:40 PM	SiCl4 pre valve closed
7/29/2011	6:16:40 PM	SiCl4 post valve closed
7/29/2011	6:16:40 PM	Bypass valve closed
7/29/2011	6:16:40 PM	Bubbler valve closed
7/29/2011	6:16:40 PM	Main Vac valve opened
7/29/2011	6:16:40 PM	Helium MFC set to  0.000000
7/29/2011	6:16:40 PM	H2 MFC set to  0.000000
7/29/2011	6:16:40 PM	BCl3 MFC set to  0.000000
7/29/2011	6:16:40 PM	PHl3 MFC set to  0.000000
7/29/2011	6:16:40 PM	SiCl4 MFC set to  0.000000
7/29/2011	6:16:40 PM	Bypass solenoid MFC set to  0.000000
7/29/2011	6:16:40 PM	Tube furnace set to 150
7/29/2011	6:17:10 PM	H2 valve closed
7/29/2011	6:17:10 PM	BCl3 valve closed
7/29/2011	6:17:10 PM	PH3 valve closed
7/29/2011	6:17:10 PM	SiCl4 pre valve closed
7/29/2011	6:17:10 PM	SiCl4 post valve closed
7/29/2011	6:17:10 PM	Bypass valve closed
7/29/2011	6:17:10 PM	Bubbler valve closed
7/29/2011	6:17:10 PM	Helium valve opened
7/29/2011	6:17:10 PM	Main Vac valve opened
7/29/2011	6:17:10 PM	Helium MFC set to  20.000000
7/29/2011	6:17:10 PM	H2 MFC set to  0.000000
7/29/2011	6:17:10 PM	BCl3 MFC set to  0.000000
7/29/2011	6:17:10 PM	PHl3 MFC set to  0.000000
7/29/2011	6:17:10 PM	SiCl4 MFC set to  0.000000
7/29/2011	6:17:10 PM	Bypass solenoid MFC set to  0.000000
7/29/2011	6:17:10 PM	Tube furnace set to 150
7/29/2011	6:17:40 PM	Helium valve closed
7/29/2011	6:17:40 PM	H2 valve closed
7/29/2011	6:17:40 PM	BCl3 valve closed
7/29/2011	6:17:41 PM	PH3 valve closed
7/29/2011	6:17:41 PM	SiCl4 pre valve closed
7/29/2011	6:17:41 PM	SiCl4 post valve closed
7/29/2011	6:17:41 PM	Bypass valve closed
7/29/2011	6:17:41 PM	Bubbler valve closed
7/29/2011	6:17:41 PM	Main Vac valve opened
7/29/2011	6:17:41 PM	Helium MFC set to  0.000000
7/29/2011	6:17:41 PM	H2 MFC set to  0.000000
7/29/2011	6:17:41 PM	BCl3 MFC set to  0.000000
7/29/2011	6:17:41 PM	PHl3 MFC set to  0.000000
7/29/2011	6:17:41 PM	SiCl4 MFC set to  0.000000
7/29/2011	6:17:41 PM	Bypass solenoid MFC set to  0.000000
7/29/2011	6:17:41 PM	Tube furnace set to 150
7/29/2011	6:18:11 PM	H2 valve closed
7/29/2011	6:18:11 PM	BCl3 valve closed
7/29/2011	6:18:11 PM	PH3 valve closed
7/29/2011	6:18:11 PM	SiCl4 pre valve closed
7/29/2011	6:18:11 PM	SiCl4 post valve closed
7/29/2011	6:18:11 PM	Bypass valve closed
7/29/2011	6:18:11 PM	Bubbler valve closed
7/29/2011	6:18:11 PM	Helium valve opened
7/29/2011	6:18:11 PM	Main Vac valve opened
7/29/2011	6:18:11 PM	Helium MFC set to  20.000000
7/29/2011	6:18:11 PM	H2 MFC set to  0.000000
7/29/2011	6:18:11 PM	BCl3 MFC set to  0.000000
7/29/2011	6:18:11 PM	PHl3 MFC set to  0.000000
7/29/2011	6:18:11 PM	SiCl4 MFC set to  0.000000
7/29/2011	6:18:11 PM	Bypass solenoid MFC set to  0.000000
7/29/2011	6:18:11 PM	Tube furnace set to 150
7/29/2011	6:18:41 PM	Helium valve closed
7/29/2011	6:18:41 PM	H2 valve closed
7/29/2011	6:18:41 PM	BCl3 valve closed
7/29/2011	6:18:41 PM	PH3 valve closed
7/29/2011	6:18:41 PM	SiCl4 pre valve closed
7/29/2011	6:18:41 PM	SiCl4 post valve closed
7/29/2011	6:18:41 PM	Bypass valve closed
7/29/2011	6:18:41 PM	Bubbler valve closed
7/29/2011	6:18:41 PM	Main Vac valve opened
7/29/2011	6:18:41 PM	Helium MFC set to  0.000000
7/29/2011	6:18:41 PM	H2 MFC set to  0.000000
7/29/2011	6:18:41 PM	BCl3 MFC set to  0.000000
7/29/2011	6:18:41 PM	PHl3 MFC set to  0.000000
7/29/2011	6:18:41 PM	SiCl4 MFC set to  0.000000
7/29/2011	6:18:41 PM	Bypass solenoid MFC set to  0.000000
7/29/2011	6:18:41 PM	Tube furnace set to 150
7/29/2011	6:19:11 PM	H2 valve closed
7/29/2011	6:19:11 PM	BCl3 valve closed
7/29/2011	6:19:11 PM	PH3 valve closed
7/29/2011	6:19:11 PM	SiCl4 pre valve closed
7/29/2011	6:19:11 PM	SiCl4 post valve closed
7/29/2011	6:19:11 PM	Bypass valve closed
7/29/2011	6:19:11 PM	Bubbler valve closed
7/29/2011	6:19:11 PM	Helium valve opened
7/29/2011	6:19:11 PM	Main Vac valve opened
7/29/2011	6:19:11 PM	Helium MFC set to  20.000000
7/29/2011	6:19:11 PM	H2 MFC set to  0.000000
7/29/2011	6:19:11 PM	BCl3 MFC set to  0.000000
7/29/2011	6:19:11 PM	PHl3 MFC set to  0.000000
7/29/2011	6:19:11 PM	SiCl4 MFC set to  0.000000
7/29/2011	6:19:11 PM	Bypass solenoid MFC set to  0.000000
7/29/2011	6:19:11 PM	Tube furnace set to 150
7/29/2011	6:19:41 PM	Helium valve closed
7/29/2011	6:19:41 PM	H2 valve closed
7/29/2011	6:19:41 PM	BCl3 valve closed
7/29/2011	6:19:41 PM	PH3 valve closed
7/29/2011	6:19:41 PM	SiCl4 pre valve closed
7/29/2011	6:19:41 PM	SiCl4 post valve closed
7/29/2011	6:19:41 PM	Bypass valve closed
7/29/2011	6:19:41 PM	Bubbler valve closed
7/29/2011	6:19:41 PM	Main Vac valve opened
7/29/2011	6:19:41 PM	Helium MFC set to  0.000000
7/29/2011	6:19:41 PM	H2 MFC set to  0.000000
7/29/2011	6:19:41 PM	BCl3 MFC set to  0.000000
7/29/2011	6:19:41 PM	PHl3 MFC set to  0.000000
7/29/2011	6:19:41 PM	SiCl4 MFC set to  0.000000
7/29/2011	6:19:41 PM	Bypass solenoid MFC set to  0.000000
7/29/2011	6:19:42 PM	Tube furnace set to 150
7/29/2011	6:20:12 PM	H2 valve closed
7/29/2011	6:20:12 PM	BCl3 valve closed
7/29/2011	6:20:12 PM	PH3 valve closed
7/29/2011	6:20:12 PM	SiCl4 pre valve closed
7/29/2011	6:20:12 PM	SiCl4 post valve closed
7/29/2011	6:20:12 PM	Bypass valve closed
7/29/2011	6:20:12 PM	Bubbler valve closed
7/29/2011	6:20:12 PM	Helium valve opened
7/29/2011	6:20:12 PM	Main Vac valve opened
7/29/2011	6:20:12 PM	Helium MFC set to  20.000000
7/29/2011	6:20:12 PM	H2 MFC set to  0.000000
7/29/2011	6:20:12 PM	BCl3 MFC set to  0.000000
7/29/2011	6:20:12 PM	PHl3 MFC set to  0.000000
7/29/2011	6:20:12 PM	SiCl4 MFC set to  0.000000
7/29/2011	6:20:12 PM	Bypass solenoid MFC set to  0.000000
7/29/2011	6:20:12 PM	Tube furnace set to 150
7/29/2011	6:20:42 PM	Helium valve closed
7/29/2011	6:20:42 PM	H2 valve closed
7/29/2011	6:20:42 PM	BCl3 valve closed
7/29/2011	6:20:42 PM	PH3 valve closed
7/29/2011	6:20:42 PM	SiCl4 pre valve closed
7/29/2011	6:20:42 PM	SiCl4 post valve closed
7/29/2011	6:20:42 PM	Bypass valve closed
7/29/2011	6:20:42 PM	Bubbler valve closed
7/29/2011	6:20:42 PM	Main Vac valve opened
7/29/2011	6:20:42 PM	Helium MFC set to  0.000000
7/29/2011	6:20:42 PM	H2 MFC set to  0.000000
7/29/2011	6:20:42 PM	BCl3 MFC set to  0.000000
7/29/2011	6:20:42 PM	PHl3 MFC set to  0.000000
7/29/2011	6:20:42 PM	SiCl4 MFC set to  0.000000
7/29/2011	6:20:42 PM	Bypass solenoid MFC set to  0.000000
7/29/2011	6:20:42 PM	Tube furnace set to 150
7/29/2011	6:20:43 PM	Run finished at 6:20 PM
7/29/2011	6:23:22 PM	Recipe started at 6:23 PM
7/29/2011	6:23:22 PM	Helium valve closed
7/29/2011	6:23:22 PM	H2 valve closed
7/29/2011	6:23:22 PM	BCl3 valve closed
7/29/2011	6:23:22 PM	PH3 valve closed
7/29/2011	6:23:22 PM	SiCl4 pre valve closed
7/29/2011	6:23:22 PM	SiCl4 post valve closed
7/29/2011	6:23:22 PM	Bypass valve closed
7/29/2011	6:23:22 PM	Bubbler valve closed
7/29/2011	6:23:22 PM	Main Vac valve opened
7/29/2011	6:23:22 PM	Helium MFC set to  0.000000
7/29/2011	6:23:22 PM	H2 MFC set to  0.000000
7/29/2011	6:23:22 PM	BCl3 MFC set to  0.000000
7/29/2011	6:23:22 PM	PHl3 MFC set to  0.000000
7/29/2011	6:23:22 PM	SiCl4 MFC set to  0.000000
7/29/2011	6:23:22 PM	Bypass solenoid MFC set to  0.000000
7/29/2011	6:23:22 PM	Tube furnace set to 150
7/29/2011	6:23:52 PM	H2 valve closed
7/29/2011	6:23:52 PM	BCl3 valve closed
7/29/2011	6:23:52 PM	PH3 valve closed
7/29/2011	6:23:52 PM	SiCl4 pre valve closed
7/29/2011	6:23:52 PM	SiCl4 post valve closed
7/29/2011	6:23:52 PM	Bypass valve closed
7/29/2011	6:23:52 PM	Bubbler valve closed
7/29/2011	6:23:52 PM	Helium valve opened
7/29/2011	6:23:52 PM	Main Vac valve opened
7/29/2011	6:23:52 PM	Helium MFC set to  20.000000
7/29/2011	6:23:52 PM	H2 MFC set to  0.000000
7/29/2011	6:23:52 PM	BCl3 MFC set to  0.000000
7/29/2011	6:23:52 PM	PHl3 MFC set to  0.000000
7/29/2011	6:23:52 PM	SiCl4 MFC set to  0.000000
7/29/2011	6:23:52 PM	Bypass solenoid MFC set to  0.000000
7/29/2011	6:23:52 PM	Tube furnace set to 150
7/29/2011	6:24:22 PM	Helium valve closed
7/29/2011	6:24:22 PM	H2 valve closed
7/29/2011	6:24:22 PM	BCl3 valve closed
7/29/2011	6:24:22 PM	PH3 valve closed
7/29/2011	6:24:22 PM	SiCl4 pre valve closed
7/29/2011	6:24:22 PM	SiCl4 post valve closed
7/29/2011	6:24:22 PM	Bypass valve closed
7/29/2011	6:24:22 PM	Bubbler valve closed
7/29/2011	6:24:22 PM	Main Vac valve opened
7/29/2011	6:24:22 PM	Helium MFC set to  0.000000
7/29/2011	6:24:22 PM	H2 MFC set to  0.000000
7/29/2011	6:24:22 PM	BCl3 MFC set to  0.000000
7/29/2011	6:24:22 PM	PHl3 MFC set to  0.000000
7/29/2011	6:24:22 PM	SiCl4 MFC set to  0.000000
7/29/2011	6:24:22 PM	Bypass solenoid MFC set to  0.000000
7/29/2011	6:24:22 PM	Tube furnace set to 150
7/29/2011	6:24:52 PM	H2 valve closed
7/29/2011	6:24:52 PM	BCl3 valve closed
7/29/2011	6:24:52 PM	PH3 valve closed
7/29/2011	6:24:52 PM	SiCl4 pre valve closed
7/29/2011	6:24:52 PM	SiCl4 post valve closed
7/29/2011	6:24:52 PM	Bypass valve closed
7/29/2011	6:24:52 PM	Bubbler valve closed
7/29/2011	6:24:52 PM	Helium valve opened
7/29/2011	6:24:52 PM	Main Vac valve opened
7/29/2011	6:24:52 PM	Helium MFC set to  20.000000
7/29/2011	6:24:52 PM	H2 MFC set to  0.000000
7/29/2011	6:24:52 PM	BCl3 MFC set to  0.000000
7/29/2011	6:24:52 PM	PHl3 MFC set to  0.000000
7/29/2011	6:24:52 PM	SiCl4 MFC set to  0.000000
7/29/2011	6:24:52 PM	Bypass solenoid MFC set to  0.000000
7/29/2011	6:24:53 PM	Tube furnace set to 150
7/29/2011	6:25:23 PM	Helium valve closed
7/29/2011	6:25:23 PM	H2 valve closed
7/29/2011	6:25:23 PM	BCl3 valve closed
7/29/2011	6:25:23 PM	PH3 valve closed
7/29/2011	6:25:23 PM	SiCl4 pre valve closed
7/29/2011	6:25:23 PM	SiCl4 post valve closed
7/29/2011	6:25:23 PM	Bypass valve closed
7/29/2011	6:25:23 PM	Bubbler valve closed
7/29/2011	6:25:23 PM	Main Vac valve opened
7/29/2011	6:25:23 PM	Helium MFC set to  0.000000
7/29/2011	6:25:23 PM	H2 MFC set to  0.000000
7/29/2011	6:25:23 PM	BCl3 MFC set to  0.000000
7/29/2011	6:25:23 PM	PHl3 MFC set to  0.000000
7/29/2011	6:25:23 PM	SiCl4 MFC set to  0.000000
7/29/2011	6:25:23 PM	Bypass solenoid MFC set to  0.000000
7/29/2011	6:25:23 PM	Tube furnace set to 150
7/29/2011	6:25:53 PM	H2 valve closed
7/29/2011	6:25:53 PM	BCl3 valve closed
7/29/2011	6:25:53 PM	PH3 valve closed
7/29/2011	6:25:53 PM	SiCl4 pre valve closed
7/29/2011	6:25:53 PM	SiCl4 post valve closed
7/29/2011	6:25:53 PM	Bypass valve closed
7/29/2011	6:25:53 PM	Bubbler valve closed
7/29/2011	6:25:53 PM	Helium valve opened
7/29/2011	6:25:53 PM	Main Vac valve opened
7/29/2011	6:25:53 PM	Helium MFC set to  20.000000
7/29/2011	6:25:53 PM	H2 MFC set to  0.000000
7/29/2011	6:25:53 PM	BCl3 MFC set to  0.000000
7/29/2011	6:25:53 PM	PHl3 MFC set to  0.000000
7/29/2011	6:25:53 PM	SiCl4 MFC set to  0.000000
7/29/2011	6:25:53 PM	Bypass solenoid MFC set to  0.000000
7/29/2011	6:25:53 PM	Tube furnace set to 150
7/29/2011	6:26:23 PM	Helium valve closed
7/29/2011	6:26:23 PM	H2 valve closed
7/29/2011	6:26:23 PM	BCl3 valve closed
7/29/2011	6:26:23 PM	PH3 valve closed
7/29/2011	6:26:23 PM	SiCl4 pre valve closed
7/29/2011	6:26:23 PM	SiCl4 post valve closed
7/29/2011	6:26:23 PM	Bypass valve closed
7/29/2011	6:26:23 PM	Bubbler valve closed
7/29/2011	6:26:23 PM	Main Vac valve opened
7/29/2011	6:26:23 PM	Helium MFC set to  0.000000
7/29/2011	6:26:23 PM	H2 MFC set to  0.000000
7/29/2011	6:26:23 PM	BCl3 MFC set to  0.000000
7/29/2011	6:26:23 PM	PHl3 MFC set to  0.000000
7/29/2011	6:26:23 PM	SiCl4 MFC set to  0.000000
7/29/2011	6:26:23 PM	Bypass solenoid MFC set to  0.000000
7/29/2011	6:26:23 PM	Tube furnace set to 150
7/29/2011	6:26:53 PM	H2 valve closed
7/29/2011	6:26:53 PM	BCl3 valve closed
7/29/2011	6:26:53 PM	PH3 valve closed
7/29/2011	6:26:53 PM	SiCl4 pre valve closed
7/29/2011	6:26:53 PM	SiCl4 post valve closed
7/29/2011	6:26:53 PM	Bypass valve closed
7/29/2011	6:26:53 PM	Bubbler valve closed
7/29/2011	6:26:53 PM	Helium valve opened
7/29/2011	6:26:53 PM	Main Vac valve opened
7/29/2011	6:26:53 PM	Helium MFC set to  20.000000
7/29/2011	6:26:53 PM	H2 MFC set to  0.000000
7/29/2011	6:26:53 PM	BCl3 MFC set to  0.000000
7/29/2011	6:26:53 PM	PHl3 MFC set to  0.000000
7/29/2011	6:26:53 PM	SiCl4 MFC set to  0.000000
7/29/2011	6:26:53 PM	Bypass solenoid MFC set to  0.000000
7/29/2011	6:26:53 PM	Tube furnace set to 150
7/29/2011	6:27:24 PM	Helium valve closed
7/29/2011	6:27:24 PM	H2 valve closed
7/29/2011	6:27:24 PM	BCl3 valve closed
7/29/2011	6:27:24 PM	PH3 valve closed
7/29/2011	6:27:24 PM	SiCl4 pre valve closed
7/29/2011	6:27:24 PM	SiCl4 post valve closed
7/29/2011	6:27:24 PM	Bypass valve closed
7/29/2011	6:27:24 PM	Bubbler valve closed
7/29/2011	6:27:24 PM	Main Vac valve opened
7/29/2011	6:27:24 PM	Helium MFC set to  0.000000
7/29/2011	6:27:24 PM	H2 MFC set to  0.000000
7/29/2011	6:27:24 PM	BCl3 MFC set to  0.000000
7/29/2011	6:27:24 PM	PHl3 MFC set to  0.000000
7/29/2011	6:27:24 PM	SiCl4 MFC set to  0.000000
7/29/2011	6:27:24 PM	Bypass solenoid MFC set to  0.000000
7/29/2011	6:27:24 PM	Tube furnace set to 150
7/29/2011	6:27:54 PM	H2 valve closed
7/29/2011	6:27:54 PM	BCl3 valve closed
7/29/2011	6:27:54 PM	PH3 valve closed
7/29/2011	6:27:54 PM	SiCl4 pre valve closed
7/29/2011	6:27:54 PM	SiCl4 post valve closed
7/29/2011	6:27:54 PM	Bypass valve closed
7/29/2011	6:27:54 PM	Bubbler valve closed
7/29/2011	6:27:54 PM	Helium valve opened
7/29/2011	6:27:54 PM	Main Vac valve opened
7/29/2011	6:27:54 PM	Helium MFC set to  20.000000
7/29/2011	6:27:54 PM	H2 MFC set to  0.000000
7/29/2011	6:27:54 PM	BCl3 MFC set to  0.000000
7/29/2011	6:27:54 PM	PHl3 MFC set to  0.000000
7/29/2011	6:27:54 PM	SiCl4 MFC set to  0.000000
7/29/2011	6:27:54 PM	Bypass solenoid MFC set to  0.000000
7/29/2011	6:27:54 PM	Tube furnace set to 150
7/29/2011	6:28:24 PM	Helium valve closed
7/29/2011	6:28:24 PM	H2 valve closed
7/29/2011	6:28:24 PM	BCl3 valve closed
7/29/2011	6:28:24 PM	PH3 valve closed
7/29/2011	6:28:24 PM	SiCl4 pre valve closed
7/29/2011	6:28:24 PM	SiCl4 post valve closed
7/29/2011	6:28:24 PM	Bypass valve closed
7/29/2011	6:28:24 PM	Bubbler valve closed
7/29/2011	6:28:24 PM	Main Vac valve opened
7/29/2011	6:28:24 PM	Helium MFC set to  0.000000
7/29/2011	6:28:24 PM	H2 MFC set to  0.000000
7/29/2011	6:28:24 PM	BCl3 MFC set to  0.000000
7/29/2011	6:28:24 PM	PHl3 MFC set to  0.000000
7/29/2011	6:28:24 PM	SiCl4 MFC set to  0.000000
7/29/2011	6:28:24 PM	Bypass solenoid MFC set to  0.000000
7/29/2011	6:28:24 PM	Tube furnace set to 150
7/29/2011	6:28:54 PM	H2 valve closed
7/29/2011	6:28:54 PM	BCl3 valve closed
7/29/2011	6:28:54 PM	PH3 valve closed
7/29/2011	6:28:54 PM	SiCl4 pre valve closed
7/29/2011	6:28:54 PM	SiCl4 post valve closed
7/29/2011	6:28:54 PM	Bypass valve closed
7/29/2011	6:28:54 PM	Bubbler valve closed
7/29/2011	6:28:54 PM	Helium valve opened
7/29/2011	6:28:54 PM	Main Vac valve opened
7/29/2011	6:28:54 PM	Helium MFC set to  20.000000
7/29/2011	6:28:54 PM	H2 MFC set to  0.000000
7/29/2011	6:28:54 PM	BCl3 MFC set to  0.000000
7/29/2011	6:28:54 PM	PHl3 MFC set to  0.000000
7/29/2011	6:28:54 PM	SiCl4 MFC set to  0.000000
7/29/2011	6:28:54 PM	Bypass solenoid MFC set to  0.000000
7/29/2011	6:28:54 PM	Tube furnace set to 150
7/29/2011	6:29:24 PM	Helium valve closed
7/29/2011	6:29:24 PM	H2 valve closed
7/29/2011	6:29:24 PM	BCl3 valve closed
7/29/2011	6:29:24 PM	PH3 valve closed
7/29/2011	6:29:24 PM	SiCl4 pre valve closed
7/29/2011	6:29:24 PM	SiCl4 post valve closed
7/29/2011	6:29:24 PM	Bypass valve closed
7/29/2011	6:29:24 PM	Bubbler valve closed
7/29/2011	6:29:24 PM	Main Vac valve opened
7/29/2011	6:29:24 PM	Helium MFC set to  0.000000
7/29/2011	6:29:24 PM	H2 MFC set to  0.000000
7/29/2011	6:29:24 PM	BCl3 MFC set to  0.000000
7/29/2011	6:29:24 PM	PHl3 MFC set to  0.000000
7/29/2011	6:29:24 PM	SiCl4 MFC set to  0.000000
7/29/2011	6:29:24 PM	Bypass solenoid MFC set to  0.000000
7/29/2011	6:29:25 PM	Tube furnace set to 150
7/29/2011	6:29:55 PM	H2 valve closed
7/29/2011	6:29:55 PM	BCl3 valve closed
7/29/2011	6:29:55 PM	PH3 valve closed
7/29/2011	6:29:55 PM	SiCl4 pre valve closed
7/29/2011	6:29:55 PM	SiCl4 post valve closed
7/29/2011	6:29:55 PM	Bypass valve closed
7/29/2011	6:29:55 PM	Bubbler valve closed
7/29/2011	6:29:55 PM	Helium valve opened
7/29/2011	6:29:55 PM	Main Vac valve opened
7/29/2011	6:29:55 PM	Helium MFC set to  20.000000
7/29/2011	6:29:55 PM	H2 MFC set to  0.000000
7/29/2011	6:29:55 PM	BCl3 MFC set to  0.000000
7/29/2011	6:29:55 PM	PHl3 MFC set to  0.000000
7/29/2011	6:29:55 PM	SiCl4 MFC set to  0.000000
7/29/2011	6:29:55 PM	Bypass solenoid MFC set to  0.000000
7/29/2011	6:29:55 PM	Tube furnace set to 150
7/29/2011	6:30:25 PM	Helium valve closed
7/29/2011	6:30:25 PM	H2 valve closed
7/29/2011	6:30:25 PM	BCl3 valve closed
7/29/2011	6:30:25 PM	PH3 valve closed
7/29/2011	6:30:25 PM	SiCl4 pre valve closed
7/29/2011	6:30:25 PM	SiCl4 post valve closed
7/29/2011	6:30:25 PM	Bypass valve closed
7/29/2011	6:30:25 PM	Bubbler valve closed
7/29/2011	6:30:25 PM	Main Vac valve opened
7/29/2011	6:30:25 PM	Helium MFC set to  0.000000
7/29/2011	6:30:25 PM	H2 MFC set to  0.000000
7/29/2011	6:30:25 PM	BCl3 MFC set to  0.000000
7/29/2011	6:30:25 PM	PHl3 MFC set to  0.000000
7/29/2011	6:30:25 PM	SiCl4 MFC set to  0.000000
7/29/2011	6:30:25 PM	Bypass solenoid MFC set to  0.000000
7/29/2011	6:30:25 PM	Tube furnace set to 150
7/29/2011	6:30:55 PM	H2 valve closed
7/29/2011	6:30:55 PM	BCl3 valve closed
7/29/2011	6:30:55 PM	PH3 valve closed
7/29/2011	6:30:55 PM	SiCl4 pre valve closed
7/29/2011	6:30:55 PM	SiCl4 post valve closed
7/29/2011	6:30:55 PM	Bypass valve closed
7/29/2011	6:30:55 PM	Bubbler valve closed
7/29/2011	6:30:55 PM	Helium valve opened
7/29/2011	6:30:55 PM	Main Vac valve opened
7/29/2011	6:30:55 PM	Helium MFC set to  20.000000
7/29/2011	6:30:55 PM	H2 MFC set to  0.000000
7/29/2011	6:30:55 PM	BCl3 MFC set to  0.000000
7/29/2011	6:30:55 PM	PHl3 MFC set to  0.000000
7/29/2011	6:30:55 PM	SiCl4 MFC set to  0.000000
7/29/2011	6:30:55 PM	Bypass solenoid MFC set to  0.000000
7/29/2011	6:30:55 PM	Tube furnace set to 150
7/29/2011	6:31:25 PM	Helium valve closed
7/29/2011	6:31:25 PM	H2 valve closed
7/29/2011	6:31:25 PM	BCl3 valve closed
7/29/2011	6:31:25 PM	PH3 valve closed
7/29/2011	6:31:25 PM	SiCl4 pre valve closed
7/29/2011	6:31:25 PM	SiCl4 post valve closed
7/29/2011	6:31:25 PM	Bypass valve closed
7/29/2011	6:31:25 PM	Bubbler valve closed
7/29/2011	6:31:25 PM	Main Vac valve opened
7/29/2011	6:31:25 PM	Helium MFC set to  0.000000
7/29/2011	6:31:25 PM	H2 MFC set to  0.000000
7/29/2011	6:31:25 PM	BCl3 MFC set to  0.000000
7/29/2011	6:31:25 PM	PHl3 MFC set to  0.000000
7/29/2011	6:31:25 PM	SiCl4 MFC set to  0.000000
7/29/2011	6:31:25 PM	Bypass solenoid MFC set to  0.000000
7/29/2011	6:31:25 PM	Tube furnace set to 150
7/29/2011	6:31:55 PM	H2 valve closed
7/29/2011	6:31:55 PM	BCl3 valve closed
7/29/2011	6:31:55 PM	PH3 valve closed
7/29/2011	6:31:55 PM	SiCl4 pre valve closed
7/29/2011	6:31:55 PM	SiCl4 post valve closed
7/29/2011	6:31:55 PM	Bypass valve closed
7/29/2011	6:31:55 PM	Bubbler valve closed
7/29/2011	6:31:55 PM	Helium valve opened
7/29/2011	6:31:55 PM	Main Vac valve opened
7/29/2011	6:31:55 PM	Helium MFC set to  20.000000
7/29/2011	6:31:55 PM	H2 MFC set to  0.000000
7/29/2011	6:31:55 PM	BCl3 MFC set to  0.000000
7/29/2011	6:31:55 PM	PHl3 MFC set to  0.000000
7/29/2011	6:31:55 PM	SiCl4 MFC set to  0.000000
7/29/2011	6:31:55 PM	Bypass solenoid MFC set to  0.000000
7/29/2011	6:31:56 PM	Tube furnace set to 150
7/29/2011	6:32:26 PM	Helium valve closed
7/29/2011	6:32:26 PM	H2 valve closed
7/29/2011	6:32:26 PM	BCl3 valve closed
7/29/2011	6:32:26 PM	PH3 valve closed
7/29/2011	6:32:26 PM	SiCl4 pre valve closed
7/29/2011	6:32:26 PM	SiCl4 post valve closed
7/29/2011	6:32:26 PM	Bypass valve closed
7/29/2011	6:32:26 PM	Bubbler valve closed
7/29/2011	6:32:26 PM	Main Vac valve opened
7/29/2011	6:32:26 PM	Helium MFC set to  0.000000
7/29/2011	6:32:26 PM	H2 MFC set to  0.000000
7/29/2011	6:32:26 PM	BCl3 MFC set to  0.000000
7/29/2011	6:32:26 PM	PHl3 MFC set to  0.000000
7/29/2011	6:32:26 PM	SiCl4 MFC set to  0.000000
7/29/2011	6:32:26 PM	Bypass solenoid MFC set to  0.000000
7/29/2011	6:32:26 PM	Tube furnace set to 150
7/29/2011	6:32:56 PM	H2 valve closed
7/29/2011	6:32:56 PM	BCl3 valve closed
7/29/2011	6:32:56 PM	PH3 valve closed
7/29/2011	6:32:56 PM	SiCl4 pre valve closed
7/29/2011	6:32:56 PM	SiCl4 post valve closed
7/29/2011	6:32:56 PM	Bypass valve closed
7/29/2011	6:32:56 PM	Bubbler valve closed
7/29/2011	6:32:56 PM	Helium valve opened
7/29/2011	6:32:56 PM	Main Vac valve opened
7/29/2011	6:32:56 PM	Helium MFC set to  20.000000
7/29/2011	6:32:56 PM	H2 MFC set to  0.000000
7/29/2011	6:32:56 PM	BCl3 MFC set to  0.000000
7/29/2011	6:32:56 PM	PHl3 MFC set to  0.000000
7/29/2011	6:32:56 PM	SiCl4 MFC set to  0.000000
7/29/2011	6:32:56 PM	Bypass solenoid MFC set to  0.000000
7/29/2011	6:32:56 PM	Tube furnace set to 150
7/29/2011	6:33:26 PM	Helium valve closed
7/29/2011	6:33:26 PM	H2 valve closed
7/29/2011	6:33:26 PM	BCl3 valve closed
7/29/2011	6:33:26 PM	PH3 valve closed
7/29/2011	6:33:26 PM	SiCl4 pre valve closed
7/29/2011	6:33:26 PM	SiCl4 post valve closed
7/29/2011	6:33:26 PM	Bypass valve closed
7/29/2011	6:33:26 PM	Bubbler valve closed
7/29/2011	6:33:26 PM	Main Vac valve opened
7/29/2011	6:33:26 PM	Helium MFC set to  0.000000
7/29/2011	6:33:26 PM	H2 MFC set to  0.000000
7/29/2011	6:33:26 PM	BCl3 MFC set to  0.000000
7/29/2011	6:33:26 PM	PHl3 MFC set to  0.000000
7/29/2011	6:33:26 PM	SiCl4 MFC set to  0.000000
7/29/2011	6:33:26 PM	Bypass solenoid MFC set to  0.000000
7/29/2011	6:33:26 PM	Tube furnace set to 150
7/29/2011	6:33:27 PM	Run finished at 6:33 PM
7/29/2011	6:40:08 PM	Helium MFC set to  20.000000
7/29/2011	6:40:10 PM	Helium valve opened
7/29/2011	6:41:34 PM	Helium valve closed
7/29/2011	6:41:37 PM	Helium MFC set to  0.000000
7/29/2011	6:42:08 PM	Recipe started at 6:42 PM
7/29/2011	6:42:08 PM	Helium valve closed
7/29/2011	6:42:08 PM	H2 valve closed
7/29/2011	6:42:08 PM	BCl3 valve closed
7/29/2011	6:42:08 PM	PH3 valve closed
7/29/2011	6:42:08 PM	SiCl4 pre valve closed
7/29/2011	6:42:08 PM	SiCl4 post valve closed
7/29/2011	6:42:08 PM	Main Vac valve closed
7/29/2011	6:42:08 PM	Bypass valve closed
7/29/2011	6:42:08 PM	Bubbler valve closed
7/29/2011	6:42:08 PM	Helium MFC set to  0.000000
7/29/2011	6:42:08 PM	H2 MFC set to  0.000000
7/29/2011	6:42:08 PM	BCl3 MFC set to  0.000000
7/29/2011	6:42:08 PM	PHl3 MFC set to  0.000000
7/29/2011	6:42:08 PM	SiCl4 MFC set to  0.000000
7/29/2011	6:42:08 PM	Bypass solenoid MFC set to  0.000000
7/29/2011	6:42:09 PM	Tube furnace set to 0
7/29/2011	6:42:12 PM	Helium valve closed
7/29/2011	6:42:12 PM	BCl3 valve closed
7/29/2011	6:42:12 PM	PH3 valve closed
7/29/2011	6:42:12 PM	SiCl4 pre valve closed
7/29/2011	6:42:12 PM	SiCl4 post valve closed
7/29/2011	6:42:12 PM	Main Vac valve closed
7/29/2011	6:42:12 PM	Bypass valve closed
7/29/2011	6:42:12 PM	Bubbler valve closed
7/29/2011	6:42:12 PM	H2 valve opened
7/29/2011	6:42:12 PM	Helium MFC set to  0.000000
7/29/2011	6:42:12 PM	H2 MFC set to  500.000000
7/29/2011	6:42:12 PM	BCl3 MFC set to  0.000000
7/29/2011	6:42:12 PM	PHl3 MFC set to  0.000000
7/29/2011	6:42:12 PM	SiCl4 MFC set to  0.000000
7/29/2011	6:42:12 PM	Bypass solenoid MFC set to  0.000000
7/29/2011	6:42:12 PM	Tube furnace set to 0
7/29/2011	6:43:15 PM	Helium valve closed
7/29/2011	6:43:15 PM	BCl3 valve closed
7/29/2011	6:43:15 PM	PH3 valve closed
7/29/2011	6:43:15 PM	SiCl4 pre valve closed
7/29/2011	6:43:15 PM	SiCl4 post valve closed
7/29/2011	6:43:15 PM	Main Vac valve closed
7/29/2011	6:43:15 PM	Bypass valve closed
7/29/2011	6:43:15 PM	H2 valve opened
7/29/2011	6:43:15 PM	Bubbler valve opened
7/29/2011	6:43:15 PM	Helium MFC set to  0.000000
7/29/2011	6:43:15 PM	H2 MFC set to  500.000000
7/29/2011	6:43:15 PM	BCl3 MFC set to  0.000000
7/29/2011	6:43:15 PM	PHl3 MFC set to  0.000000
7/29/2011	6:43:15 PM	SiCl4 MFC set to  0.000000
7/29/2011	6:43:15 PM	Bypass solenoid MFC set to  0.000000
7/29/2011	6:43:15 PM	Tube furnace set to 0
7/29/2011	6:43:16 PM	Helium valve closed
7/29/2011	6:43:16 PM	BCl3 valve closed
7/29/2011	6:43:16 PM	PH3 valve closed
7/29/2011	6:43:16 PM	SiCl4 pre valve closed
7/29/2011	6:43:16 PM	SiCl4 post valve closed
7/29/2011	6:43:16 PM	Main Vac valve closed
7/29/2011	6:43:16 PM	Bypass valve closed
7/29/2011	6:43:16 PM	H2 valve opened
7/29/2011	6:43:16 PM	Bubbler valve opened
7/29/2011	6:43:16 PM	Helium MFC set to  0.000000
7/29/2011	6:43:16 PM	H2 MFC set to  500.000000
7/29/2011	6:43:16 PM	BCl3 MFC set to  0.000000
7/29/2011	6:43:16 PM	PHl3 MFC set to  0.000000
7/29/2011	6:43:16 PM	SiCl4 MFC set to  0.000000
7/29/2011	6:43:16 PM	Bypass solenoid MFC set to  0.000000
7/29/2011	6:43:16 PM	Tube furnace set to 1000
7/29/2011	7:03:16 PM	Helium valve closed
7/29/2011	7:03:16 PM	PH3 valve closed
7/29/2011	7:03:16 PM	Main Vac valve closed
7/29/2011	7:03:16 PM	Bypass valve closed
7/29/2011	7:03:16 PM	H2 valve opened
7/29/2011	7:03:16 PM	BCl3 valve opened
7/29/2011	7:03:16 PM	SiCl4 pre valve opened
7/29/2011	7:03:16 PM	SiCl4 post valve opened
7/29/2011	7:03:16 PM	Bubbler valve opened
7/29/2011	7:03:16 PM	Helium MFC set to  0.000000
7/29/2011	7:03:16 PM	H2 MFC set to  500.000000
7/29/2011	7:03:16 PM	BCl3 MFC set to  2.000000
7/29/2011	7:03:16 PM	PHl3 MFC set to  0.000000
7/29/2011	7:03:16 PM	SiCl4 MFC set to  50.000000
7/29/2011	7:03:16 PM	Bypass solenoid MFC set to  0.000000
7/29/2011	7:03:17 PM	Tube furnace set to 1000
7/29/2011	7:19:57 PM	Helium valve closed
7/29/2011	7:19:57 PM	BCl3 valve closed
7/29/2011	7:19:57 PM	PH3 valve closed
7/29/2011	7:19:57 PM	SiCl4 pre valve closed
7/29/2011	7:19:57 PM	SiCl4 post valve closed
7/29/2011	7:19:57 PM	Main Vac valve closed
7/29/2011	7:19:57 PM	Bypass valve closed
7/29/2011	7:19:57 PM	H2 valve opened
7/29/2011	7:19:57 PM	Bubbler valve opened
7/29/2011	7:19:57 PM	Helium MFC set to  0.000000
7/29/2011	7:19:57 PM	H2 MFC set to  500.000000
7/29/2011	7:19:57 PM	BCl3 MFC set to  0.000000
7/29/2011	7:19:57 PM	PHl3 MFC set to  0.000000
7/29/2011	7:19:57 PM	SiCl4 MFC set to  0.000000
7/29/2011	7:19:57 PM	Bypass solenoid MFC set to  0.000000
7/29/2011	7:19:57 PM	Tube furnace set to 750
7/29/2011	7:24:57 PM	H2 valve closed
7/29/2011	7:24:57 PM	BCl3 valve closed
7/29/2011	7:24:57 PM	PH3 valve closed
7/29/2011	7:24:57 PM	SiCl4 pre valve closed
7/29/2011	7:24:57 PM	SiCl4 post valve closed
7/29/2011	7:24:57 PM	Main Vac valve closed
7/29/2011	7:24:57 PM	Bypass valve closed
7/29/2011	7:24:57 PM	Helium valve opened
7/29/2011	7:24:57 PM	Bubbler valve opened
7/29/2011	7:24:57 PM	Helium MFC set to  500.000000
7/29/2011	7:24:57 PM	H2 MFC set to  0.000000
7/29/2011	7:24:57 PM	BCl3 MFC set to  0.000000
7/29/2011	7:24:57 PM	PHl3 MFC set to  0.000000
7/29/2011	7:24:57 PM	SiCl4 MFC set to  0.000000
7/29/2011	7:24:57 PM	Bypass solenoid MFC set to  0.000000
7/29/2011	7:24:57 PM	Tube furnace set to 0
7/29/2011	7:32:59 PM	Run aborted at 7:32 PM
7/29/2011	7:32:59 PM	Helium valve closed
7/29/2011	7:32:59 PM	H2 valve closed
7/29/2011	7:32:59 PM	BCl3 valve closed
7/29/2011	7:32:59 PM	PH3 valve closed
7/29/2011	7:32:59 PM	SiCl4 pre valve closed
7/29/2011	7:32:59 PM	SiCl4 post valve closed
7/29/2011	7:32:59 PM	Bypass valve closed
7/29/2011	7:32:59 PM	Main Vac valve closed
7/29/2011	7:32:59 PM	Bubbler valve closed
7/29/2011	7:32:59 PM	Helium MFC set to  0.000000
7/29/2011	7:32:59 PM	H2 MFC set to  0.000000
7/29/2011	7:32:59 PM	BCl3 MFC set to  0.000000
7/29/2011	7:32:59 PM	PHl3 MFC set to  0.000000
7/29/2011	7:32:59 PM	SiCl4 MFC set to  0.000000
7/29/2011	7:32:59 PM	Tube furnace set to 0
7/29/2011	7:33:00 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/29/2011	7:33:01 PM	Recipe started at 7:33 PM
7/29/2011	7:33:01 PM	Helium valve closed
7/29/2011	7:33:01 PM	H2 valve closed
7/29/2011	7:33:01 PM	BCl3 valve closed
7/29/2011	7:33:01 PM	PH3 valve closed
7/29/2011	7:33:01 PM	SiCl4 pre valve closed
7/29/2011	7:33:01 PM	SiCl4 post valve closed
7/29/2011	7:33:01 PM	Main Vac valve closed
7/29/2011	7:33:01 PM	Bypass valve closed
7/29/2011	7:33:01 PM	Bubbler valve closed
7/29/2011	7:33:01 PM	Helium MFC set to  0.000000
7/29/2011	7:33:01 PM	H2 MFC set to  0.000000
7/29/2011	7:33:01 PM	BCl3 MFC set to  0.000000
7/29/2011	7:33:01 PM	PHl3 MFC set to  0.000000
7/29/2011	7:33:01 PM	SiCl4 MFC set to  0.000000
7/29/2011	7:33:01 PM	Bypass solenoid MFC set to  0.000000
7/29/2011	7:33:01 PM	Tube furnace set to 0
7/29/2011	7:33:04 PM	H2 valve closed
7/29/2011	7:33:04 PM	BCl3 valve closed
7/29/2011	7:33:04 PM	PH3 valve closed
7/29/2011	7:33:04 PM	SiCl4 pre valve closed
7/29/2011	7:33:04 PM	SiCl4 post valve closed
7/29/2011	7:33:04 PM	Main Vac valve closed
7/29/2011	7:33:04 PM	Bypass valve closed
7/29/2011	7:33:04 PM	Bubbler valve closed
7/29/2011	7:33:04 PM	Helium valve opened
7/29/2011	7:33:04 PM	Helium MFC set to  500.000000
7/29/2011	7:33:04 PM	H2 MFC set to  0.000000
7/29/2011	7:33:04 PM	BCl3 MFC set to  0.000000
7/29/2011	7:33:04 PM	PHl3 MFC set to  0.000000
7/29/2011	7:33:04 PM	SiCl4 MFC set to  0.000000
7/29/2011	7:33:04 PM	Bypass solenoid MFC set to  0.000000
7/29/2011	7:33:05 PM	Tube furnace set to 0
7/29/2011	7:33:05 PM	Helium valve closed
7/29/2011	7:33:05 PM	H2 valve closed
7/29/2011	7:33:05 PM	BCl3 valve closed
7/29/2011	7:33:05 PM	PH3 valve closed
7/29/2011	7:33:05 PM	SiCl4 pre valve closed
7/29/2011	7:33:05 PM	SiCl4 post valve closed
7/29/2011	7:33:05 PM	Main Vac valve closed
7/29/2011	7:33:05 PM	Bypass valve closed
7/29/2011	7:33:05 PM	Bubbler valve closed
7/29/2011	7:33:05 PM	Helium MFC set to  0.000000
7/29/2011	7:33:05 PM	H2 MFC set to  0.000000
7/29/2011	7:33:05 PM	BCl3 MFC set to  0.000000
7/29/2011	7:33:05 PM	PHl3 MFC set to  0.000000
7/29/2011	7:33:05 PM	SiCl4 MFC set to  0.000000
7/29/2011	7:33:05 PM	Bypass solenoid MFC set to  0.000000
7/29/2011	7:33:05 PM	Tube furnace set to 0
7/29/2011	7:33:06 PM	Run finished at 7:33 PM
7/29/2011	7:33:06 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/29/2011	7:44:02 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/29/2011	7:44:03 PM	Recipe started at 7:44 PM
7/29/2011	7:44:03 PM	Helium valve closed
7/29/2011	7:44:03 PM	H2 valve closed
7/29/2011	7:44:03 PM	BCl3 valve closed
7/29/2011	7:44:03 PM	PH3 valve closed
7/29/2011	7:44:03 PM	SiCl4 pre valve closed
7/29/2011	7:44:03 PM	SiCl4 post valve closed
7/29/2011	7:44:03 PM	Main Vac valve closed
7/29/2011	7:44:03 PM	Bubbler valve closed
7/29/2011	7:44:03 PM	Bypass valve opened
7/29/2011	7:44:03 PM	Helium MFC set to  0.000000
7/29/2011	7:44:03 PM	H2 MFC set to  0.000000
7/29/2011	7:44:03 PM	BCl3 MFC set to  0.000000
7/29/2011	7:44:03 PM	PHl3 MFC set to  0.000000
7/29/2011	7:44:03 PM	SiCl4 MFC set to  0.000000
7/29/2011	7:44:03 PM	Bypass solenoid MFC set to  0.000000
7/29/2011	7:44:03 PM	Tube furnace set to 0
7/29/2011	7:45:23 PM	Helium valve closed
7/29/2011	7:45:23 PM	H2 valve closed
7/29/2011	7:45:23 PM	BCl3 valve closed
7/29/2011	7:45:23 PM	PH3 valve closed
7/29/2011	7:45:23 PM	SiCl4 pre valve closed
7/29/2011	7:45:23 PM	SiCl4 post valve closed
7/29/2011	7:45:23 PM	Main Vac valve closed
7/29/2011	7:45:23 PM	Bubbler valve closed
7/29/2011	7:45:23 PM	Bypass valve opened
7/29/2011	7:45:23 PM	Helium MFC set to  0.000000
7/29/2011	7:45:23 PM	H2 MFC set to  0.000000
7/29/2011	7:45:23 PM	BCl3 MFC set to  0.000000
7/29/2011	7:45:23 PM	PHl3 MFC set to  0.000000
7/29/2011	7:45:23 PM	SiCl4 MFC set to  0.000000
7/29/2011	7:45:23 PM	Bypass solenoid MFC set to  0.000000
7/29/2011	7:45:23 PM	Tube furnace set to 0
7/29/2011	7:46:23 PM	Helium valve closed
7/29/2011	7:46:23 PM	H2 valve closed
7/29/2011	7:46:23 PM	BCl3 valve closed
7/29/2011	7:46:23 PM	PH3 valve closed
7/29/2011	7:46:23 PM	SiCl4 pre valve closed
7/29/2011	7:46:23 PM	SiCl4 post valve closed
7/29/2011	7:46:23 PM	Bypass valve closed
7/29/2011	7:46:23 PM	Bubbler valve closed
7/29/2011	7:46:23 PM	Main Vac valve opened
7/29/2011	7:46:23 PM	Helium MFC set to  0.000000
7/29/2011	7:46:23 PM	H2 MFC set to  0.000000
7/29/2011	7:46:23 PM	BCl3 MFC set to  0.000000
7/29/2011	7:46:23 PM	PHl3 MFC set to  0.000000
7/29/2011	7:46:23 PM	SiCl4 MFC set to  0.000000
7/29/2011	7:46:23 PM	Bypass solenoid MFC set to  0.000000
7/29/2011	7:46:24 PM	Tube furnace set to 0
7/29/2011	7:46:25 PM	Run finished at 7:46 PM
7/29/2011	7:46:25 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
